ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

Prevents Micro-Bubbles

S) C 2-Q Breathing port: R H G SMC SMC SMC SMC N V 1/4 1/4 1/4 U 3/8 E Pitch = B Dimensions (mm) Station n-A port 2 3 4 5 Model Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 LLC2A 75 106 137 168 146 177 208 239 73 109.5 146 182.5 LLC3A 84 120.5 157 193.5 183 219.5 256 292.5 (mm) Dimensions 94 141 188 235 A B Q C D E G H K N R S U V W Y LLC4A Model LLC2A LLC3A LLC4A LLC5A 109 156

AS

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

AC Servo Motor Driver (Network card type ）

370 V TND10V-221KB (360[V]) Note 1.

AC Servo Motor Driver

(Note 4) 10[V] 8[V] 100M[pulse] 0 100M[pulse] 400[V] 0 -10[V] CW direction Note 1.

Vacuum Module Series ZX

V V V Vacuum port (V) M5 (or M6) 4.2 Pitch = 21 22.5 Vacuum port (V) M5 (or M6) Vacuum port (V) M5 (or M6) 919 Series ZX Vacuum port (V) Vacuum port (V) Vacuum Pump System Manifold: Type K1 Common EXH port (EXH.)

JXCx-OMT0023

Connection of driver and servo motor The servo motor power supply terminals (U, V, W) of the driver should match in phase with the power input terminals (U, V, W) of the servo motor. Driver Servo amplifier Servo motor U U V V M W W The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

ZX

PV port and V port can be connected.

Table of Contents

AC20A to 40A AW + AL + [V] Residual pressure relief 3 port valve V AC20B to 50B AF + AR + [V] Accessory AC20C to 40C AF + AFM + AR + [V] AC20D to 40D AW + AFM + [V] Description Symbol Applicable model [V] + AF + ARK AC20B to 50B Nil C D E Residual pressure relief 3 port valve V1 [V] + AF + AFM + ARK AC20C to 40C AC10 to 60 Float type auto-drain (N.C.) (4) [V] + AWK + AFM AC20D to 40D

Ionizer Nozzle type IZN10 Series IZS

Metal ( shaded) part Metal ( shaded) part Tap for ground wiring Resin part ( shaded) 454 Ionizer IZN10 Series Power Supply Cable Connection Circuit NPN PNP Ionizer Ionizer IZS Brown +24 VDC Brown +24 VDC +24 V +24 V Power supply 24 VDC 10% 0 V +24 V Power supply 24 VDC 10% 0 V +24 V Blue 0 V Blue 0 V IZN IZN INPUT PLC OUTPUT OUTPUT PLC INPUT IZF Orange Discharge stop signal Orange Discharge

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

110 V [115 V] 200 V 220 V [230 V] (R1)5 1 (P) 3(R2) 1 (P) (R)3 AC Apparent power (VA) 2 position double 2 position double 2(B) (A)4 4(A) (B)2 Diode (DIN terminal, Varistor when non-polar types) LED (Neon light when AC with DIN terminal) Surge voltage suppressor Indicator light (R1)5 1 (P) 3(R2) (R)3 1 (P) Common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

SYJ3000/5000/7000

For DC voltages other than 12 V and 24 V, incorrect wiring will case damage to the surge suppressor circuit. Applied voltage 24 V 0 V Standard With power saving circuit 0.4 W 0.1 W 0 W 62 ms 1-5-76 77 Series SYJ3000/5000/7000 Specific Product Precautions 4 Be sure to read before handling.

KQ2

P. 71 63 Series KQ2 Male Connector: KQ2H Note) 01-32 KQ2H03-32 07-32 H Connection thread UNF NPT 01-32 KQ2H03-32 07-32 Applicable tubing O.D.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

DC specifications of type "D" and "DO" is only available with 12 and 24 V DC.

Air cylinder

.) < Applicable Auto switches > Solid state auto switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed auto switch D-A90(V)A93(V)A96(V) Figure 4.

•

4D 4P Ii) I I NBR NLP-40 Piston packing NLP-SO NLP-63 I: NBR CM-040-16-127 Tube gasket CM-OSO-16-1 28 CM-063-16-129 I Plastic C1AOSO-07-306 C1A040-07-30S Wear ring C1A063-07-307 NBR Cushi9n packing A MC-2S $ I MC-25 NBR . Cushlb!')'p8cking B MC-20 MC-20 "qr .,. Gasket tor GusHi<:>n va 've. NBR CK40-1697 !

V100

Indicator light LED Can be used for 110 V and 115 VAC, 220 V and 230 VAC in common.

AC Servo Motor Driver (CC-Link Type ）

370 V TND10V-221KB (360[V]) Note 1.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 1 2 3 4 7 8 J 5 6 Enter the valve and blanking plate to be mounted under the manifold base part number.