Seal Type: S (Metal), Configuration: FIG (3-Position, Pressure Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust)

Seal Type: R (Rubber), Configuration: FIG (3-Position, Pressure Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust)

Seal Type: S (Metal), Configuration: FIG (3-Position, Pressure Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust)

Seal Type: R (Rubber), Configuration: FIG (3-Position, Pressure Center), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust), Subplate: B04T (Bottom 1/2)

smcmaintenancepartslist

Rod seal and piston seal [Fig. 6, Fig. 7] Apply the grease all around new packing evenly. Also add the grease inside the groove. Series HYC Series HYC Cover entirely with grease. grease grease Sliding part Taper Width of two Fig. 6 Rod seal Fig. 7 Piston seal 3-2.

7ND9071en

Fig. 33 Write protection, ND9000F and ND9000P 32 7 ND90 71 en 6 MAINTENANCE 6.1.2 Installation ND9100, ND9400 and ND7100 Ex d WARNING (ND9200, ND7200, ND9300): Service of the cylindrical flameproof joints is not allowed.

HEC_W-E

-5-3 FIG. 5-4 DISPLAY -5-4 FIG. 5-5 RESERVOIR CAP -5-4 FIG. 6-1 COOLING CAPACITY OF HEC006 -6-3 FIG. 6-2 HEATING CAPACITY OF HEC006 -6-3 FIG. 6-3 PUMP CAPACITY OF HEC006 -6-4 FIG. 6-4 PRESSURE LOSS OF HEC006 -6-4 FIG. 6-5 COOLING CAPACITY OF HEC012 -6-5 FIG. 6-6 HEATING CAPACITY OF HEC012 -6-5 FIG. 6-7 PUMP CAPACITY OF HEC012 -6-6 FIG. 6-8 PRESSURE LOSS OF HEC012 -6-6 FIG. 9-1 ALARM INDICATION

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Table of Contents

/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

Table of Contents

8 6 D-M9/D-F9W 5 4 D-Z7/Z80 9 9 11 A B D-Y59/Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

A_HEC-OM-I009

-2 Fig. 4-4 Electrical diagram -4-3 Fig. 4-5 Circulating fluid circuit -4-3 Fig. 5-1 HEC002-A -5-1 Fig. 5-2 HEC006-A -5-1 Fig. 5-3 Air Filter -5-2 Fig. 5-4 Top view -5-2 Fig. 5-5 Operation panel-5-3 Fig. 5-6 Display -5-3 Fig. 5-7 Reservoir Cap -5-4 Fig. 6-1 Cooling capacity -6-2 Fig. 6-2 Heating capacity -6-2 Fig. 6-3 Pump capacity -6-3 Fig. 9-1 Alarm indication in the event ERR14 arises

A_HEC-OM-K001

V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N o r m a l Fig. 6-3 Alarm indication in the event temp. upper and lower limit occurs LIGHT W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E Remote off Fig. 6-4 Alarm indication in the event Remote off occurs 6.2 Alarm indication 6-2 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.3 Content of Alarms Table 6-2 Content of alarm (1/2) Temp.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

EXxx-OMY0004

Fig. 10-8 Retaining Screws O N O N 1 2 1 2 3 4 5 6 SW3 SW2 Fig. 10-9 SW3 and SW2 DIP switches When the DIP-Switches have been set ensure the M12 connector block and all retaining screws are refitted.

IP8101 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s B D C Fig. 40 No.DIG-31900-OM002 49 B Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-1 C Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-2 D Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant

EXxx-OMY0006CN

DIP (2 6 ) DIP SW2:2 SW3:6 M12 SW3 DIP DIP =0.6Nm SI M12 Fig. 10-8 O N O N 1 2 1 2 3 4 5 6 SW3 SW2 Fig. 10-9 SW3 and SW2 DIP switches DIP SI DIP SI 66 No.EX##-OMY0006CN 10.11.2.1. SW2 10.11.2.2.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8 6 D-M9/D-F9W 5 4 D-Z7/Z80 9 9 11 A B D-Y59/Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Table of Contents

V) 3 The length (Dimension S) is 25.5 when any of the following grommet type auto switches are used: D-R73, D-R80, D-S79, D-T79, and D-S7P The length (Dimension S) is 34.5 when any of the following connector type auto switches are used: D-R73, D-R80, and D-T79 (mm) R A B C D E (g6) F (h9) G K L M N P Q S 90 100 241 Y Model 301 CDRB2BW15-D CDRB2BW20-D CDRB2BW30-D 5 6 8 12 14 16 34 42 50 20

Cylinder with lock

Lateral load is applied. 42 - 6. Maintenance 6-1. Construction Fig. 23 Construction No. Description Qty Note No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Stopper ring Block C MSU CRJ CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise <Fig. 2-2> <Fig. 1-2> MSQ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation q to end of rotation w.