AC Servo Motor Driver (CC-Link Type ）

OPTIONS AND AUXILIARY EQUIPMENT (b) Surge protector RAV-781BYZ-2 [Unit: mm] 1) 2) 3) 5.5 1 Black Black Black 11 1 4.2 0.2 28.5 1.0 28 1.0 UL-1015AWG16 200 30 0 1 3 2 4.5 0.5 41 1.0 RAV-781BXZ-4 [Unit: mm] 1) 2) 3) 4) 5.5 1 11 1 28.5 1.0 200 30 4.2 0.2 UL-1015AWG16 0 28 1.0 1 3 2 4.5 0.5 41 1.0 13 30 14. COMMUNICATION FUNCTION 14.

AC Servo Motor Driver (CC-Link Type ）

OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 (b) Surge protector RSPD-250-U4/RSPD-500-U4 [Unit: mm] 1 2 3 5.5 1 11 1 4.2 0.5 Resin 28.5 1 28 1 Lead +30 0 200 1 3 2 4.5 0.5 Case 41 1 13 29 14. COMMUNICATION FUNCTION 14.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-02-06SD 5/16" 15.2 27.2 36.4 18.5 39.3 27.8 17 6 12.8 73 44 AS221F-N02-11SD AS321F-02-08SD 18.3 35.3 44.5 41 3/8" 29.5 18.5 8 15.2 21 76 18.3 R 1/4 19 23 9.8 1.2 49.3 21.3 54.8 AS321F-N02-07SD AS321F-02-10SD 1/4" 13.2 27.8 39.3 17 43.3 31.8 21 10 18.5 80 73 AS321F-N02-09SD AS321F-02-12SD NPT 1/4 19 23 9.8 1.2 49.3 5/16" 15.2 29.5 41 18.5 44.3 32.8 22 12 20.9 82 76 21.3 54.8 AS321F-N02-11SD

5 Port Solenoid Valve

Blanking plug (For one-touch fittings) L KJP-02 Dimensions 23 04 06 KQ2P(mm) A Applicable fitting size d 2 3.2 4 6 A L D Model Weight: g KJP-02 KQ2P-23 KQ2P-04 KQ2P-06 8.2 16 16 18 17 31.5 32 35 3 3.2 6 8 0.1 1 1 1 It is inserted into an unused cylinder port and SUP/EXH ports.

CQ2

Standard (Through-hole)/CQ2B Rod end male thread (mm) Rod end male thread A Bore (mm) C1 1 H1 L1 X 141 141 155 42 42 47 M30 X 1.5 M30 X 1.5 M36 X 1.5 58 58 64 45 45 50 125 140 160 CU CQS Above switch: D-A73/A80 Refer to below for auto switch mounting position and mounting height.

Manifold Specifications

VK Rc 1/8 Applicable solenoid valve How to Order Type 41 VZ VV5Z5 05 41 1 01 G L M D VZ54VF 4(A), 2(B) Port size P, R port thread type Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-2A Applicable individual SUP spacer assembly DXT199-35-1A Applicable interface regulator ARBZ5000-00-P Stations VFR 1(P) port Rc 1/4 02 2 stations 01 Rc1 8

High Purity Chemical Valve

Port size 1/4 Symbol 02 Construction q e w Description Material Parts list R P No. 1 Actuator section PPS 2 Body PFA r 3 Diaphragm PTFE 4 End plate Stainless steel 479 Series LVA Dimensions P R 30 41 26 A M5 x 0.8 Pilot port (3 x NPT1/4) 3 x Rc1/4 Breathing port M3 x 0.5 PB 13 46 PA 72 41 22.5 30 6.5 52.5 2 x M5 x 0.8 Depth 6 20 480 Manually Operated Integral Fitting Type/Threaded Type Series

CNG

A1 E1 L1 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 16 20 22 +0.4 +0.2 8 16 34 41 42 2 25, 32 40 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 8 10 10 21 11.5 25 30 30 20 34 41 42 8.5 M8 x 1.25 10.3 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 20 M10 x 1.25 25.6 14 M10 x 1.25 12.8 25, 32 40 10.5 16 +0.5 +0.3 18 M14 x 1.5 41.6

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot port (Only external pilot style(R)) 3 4 5 3 4 5 L plug connector (L): VQZ2 5 (R)lLl 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ2 5 (R)lYl Indicator light 148<150> 300 (Lead wire length) 67.5<68.5> Applicable cord O.D. 3.5 to 7 Pg.7 155.5 MAX.10 53<56.5> 71.5 Indicator light Cover diameter 1.5 Cross section 0.23mm2 < >: AC 82.5 75 3 4 5 M plug connector (M): VQZ2 5 (R)lMl 0 1 01 02

Electric Actuator

Description Description Note 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

g W (Mounting orientation: Horizontal) 7-6-5 6 Series CQ2 (N) Theoretical Output (g) Weight Cylinder stroke (mm) Operating Operating pressure (MPa) Bore size (mm) 5 Bore size (mm) direction 0.3 75 50 45 40 0.7 35 30 0.5 25 20 15 10 100 12 59 60 42 54 47 25 41 35 29 IN 12 16 79 84 57 76 67 34 59 50 42 OUT 20 178 165 152 106 140 127 75 114 101 45 88 75 63 IN 16 25 216 202 187 141 173

CM2

8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66 5 7 24 16 45 52 14 88 21 22 41 47.3 8 10 46.5 7 M14

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

See page 5 for How to Order Pilot Valve Assembly See page 5 for How to Order Port Block Assembly SY3000-41-2A (with screw & gasket) SY5000-41-2A (with screw & gasket) Description Pilot valve assembly Port block assembly Note No. 6 7 Die-cast aluminum SY3000 is die-cast zinc 1 Body White ( ) Note) 8 Bottom cover assembly 2 3 4 5 Adapter plate End plate Piston Spool valve assembly White White

CM2

20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 120 40 10 15 30 62 22 13 41 7 4 60 25 75 8 45 26 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 122 40 12 15 64 22 13 41 7 4 60 32 75 8 45 26 21 47.3 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 154 52 14 88 24 16 45 7 5 66 40 36 82 11 50 32 With rod boot (mm) ZZ Symbol h l Stroke f e Bore 1 to 50 1 to 50 1

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

Proposals for Energy Saving

06 VM230-02-06S Polyacetal roller Hard steel roller Cross roller plunger VM230-02-07 VM230-02-07S Toggle lever VM230-02-08 VM-30AR Red VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y Push button (Mushroom) VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red VM230-02-32R VM230-02-32B VM230-02-32G VM230-02-32Y Push button (Extended) VM-32AB Black VM-32AG Green VM-32AY Yellow A set of

CG1

Bore size (mm) C d B1 D H1 (15) (19.6) (21.9) (31.2) (37.0) (47.3) 5 6 8 11 13 16 13 17 19 27 32 41 12.5 20 25, 32 40 50, 63 80 100 M8 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 NT-02 NT-03 NT-G04 NT-05 NT-08 NT-10 16.5 18 26 31 39 AccessorySCG1 Bore size #11 1.6-11 Series CDG1 Auto Switch Specifications Refer to p.5.3-2 for details of the auto switch.

Table of Contents

Driver Non-standard motor electric actuator Standard motor electric actuator Controller How to Order How to Order B LG1 02 1 Compatible model 1 G LG1 05 Cable length G R Y Matsushita Electric Industrial Co., Ltd. Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Compact Manifold Regulator Series ARM5

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.