Stations: 3 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: ø8 One-touch Fitting, Thread: Rc (PT), Kit Name: Terminal Box, Box Mounting Position: U Side Mounting, Control Unit: -, Release Valve Rated Voltage: -, Option 1: -, Option 2: -

Wireless System

No wireless slaves connected (Non-restorable error in wireless communication) 4 W-NS Red/Green Wireless communication connection is under construction. (Pairing) Orange LED is ON.

EX600-WEN_WSV.eng

Wireless communication connection status PB72, 02231, Espoo, Finland W-NS Restorable error is detected. (LED flashes when more than one diagnostic information item is detected.)

MXU

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

(de-energized) 980 m/s2 in X, Y, Z directions 3 times each (de-energized) 500 Vp-p, Pulse width 1 s, Rise time 1 ns Connection Material Weight Power supply / Output connection: 8P connector, Sensor connection: 4P connector (e-con) Housing: PBT, Display: PET, Backside rubber: CR 60 g (Except for any accessories that are shipped together.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

EX260-SDN_eng

MS status Description NS status Installation Green On Green On On-line state, The device has connections in the established state.

MU

MM NC 7.5Depth4.5 9Depth5.5 10.5Depth6.5 13.5Depth8.5 17Depth10.5 NS 43 45 44 54 53 Model MUB25 MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4

MXU

34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !

-fl Seies

St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

Stations: 8 Stations, Port Size: ø6 One-touch Fitting, Cable Length: 5.0m Cable 20 Pin, Option 1: None, Option 2: Name Plate, Silencer, CE Compliant: -

Stations: 8 Stations, Port Size: C6 (ø6 One-touch Fitting), SI Unit: R1 [OMRON Corp.: CompoBus/S (16 outputs)], Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: N3 (5/32" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 6 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 4 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 8 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 2 (3.0m Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 5 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 12 Stations, Port Size: N9 (5/16" One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 8 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 1 (1.5m Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)

Stations: 10 Stations, Port Size: C8 (ø8 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: U (Upper), Cable Length: 3 (5.0m Cable 25 Pin), Option 1: None, Option 2: None, Option 3: N (Name Plate), Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)