VZS

0 Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-3-Port size (1) (-1) (2) Note 1) Bore-01: Rc 1/8, -C4: Embedded type One-touch fitting for 4, -C6: Embedded type One-touch fitting for 6. Note 2) Refer to page 3-7-5 for the model of D-sub connector type manifold block assembly. How to Increase Manifold Base Insertion Method for Pin of D-Sub Connector D-sub connector terminal no.

3 Port Air Operated Valve Series SYJA300

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve M5 C4 C6 M5 C4 C6 SS5YJ520 05 SYJ520-A, B port M5 x 0.8 SYJ523-Applicable blanking plate assembly SYJ5000-21-1A Applicable individual EXH spacer assembly SYJ5000-17-1A P, R port thread type Number of stations -+ -+ P port 1/8 02 2 stations R R P Nil 00F 00N 00T Rc G NPT NPTF : : 20 20 stations R port 1/8 Type 40 (5 Port/

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications

smcmaintenancepartslist

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Type 10-SS3YJ3-S42-M5 Type 10-SS3YJ3-S42-C4 Base mounted for internal pilot 0.17 0.36 0.3 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.2 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 10-SYJ34M 1/8 C4 M5 x 0.8 C4 10-SYJ34M 1/8 Note) The values are for individually operated 2 position type manifold bases.

VCC

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

0.4

C3,C4,C6,M5 C4,C6,C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

VZ100/300/500

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

modular-press-e

121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2 IS400-2 Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

Modular F.R.L. Pressure Control Equipment

121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2 IS400-2 Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

Table of Contents

D. Applicable tube O. D.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 D side SZ3000-40-2A-D For D-sub connector 1 2 P N SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ2000 Max. 24 stations Max. 20 stations C3, C4, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

VQ2000 Max. 24 stations Max. 20 stations C3, C4, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

High Vacuum Angle Valve

D-G

Modular F.R.L. Units

D*7 N.O. (Normally open) Drain port is open when pressure is not applied.

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.