High Vacuum Angle Valve

D-G

Table of Contents

A and D.

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M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

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M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

VFR

1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

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And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications

Table of Contents

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector Mounting screws (2 pcs.)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

) 23 7 2.3 R P Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11 11.5 M plug connector (M): 10-SYJ52M-M-M5 (-F) DIN terminal (D,Y): 10-SYJ52MD Y-M5 (-F) M8 connector (WO): 10-SYJ52M-WO-M5 (-F) L plug connector (L): 10-SYJ52M-L-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 65.5 [67.7] 60.9 28.1 [35.1]

LEC-OM07605CN

LECSS2-T5LECSS2-T7 40 168 135 0.8 H LECSS2-T8 40 168 170 1.0 LECSS2-T9 60 168 185 1.4 W D 4.8.3 [mm] a1 c d1 a a1 B c d d1 e e LECSS2-T5LECSS2-T7 LECSS2-T8 6 6 1560.5 6 M5 b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

3 Port Air Operated Valve Series SYJA300

VQZ VZ VS VFN 4-4-25 Series SYJ500 Manifold for Internal Pilot Type How to Order Applicable solenoid valve SYJ512--M5 SYJ512M--M5 SYJ522--M5 SYJ522M--M5 A port M5 x 0.8 Type 20 SS3YJ5 20 05 Stations Bracket P, R port thread type + + + + Nil Nil 02 : 20 Rc G NPT NPTF 2 stations : 20 stations Without bracket Applicable blanking plate assembly SYJ500-10-1A R P 00F 00N 00T With bracket F P port

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

Series VQ Base Mounted Metal Seal/Rubber Seal

A, B C3, C4, M5 C3, C4, C6, M5 VQ0 VQ1000 Max.16 Max.16 D-sub connector (25 pin) 015 030 050 AXT100-DS25Cable Assembly Wire color table by terminal number of D-sub connector cable ass'y: The D-sub connector cable ass'y can ordered individually or included in a specific manifold model No. Refer to How to Order Manifold. Terminal No.

AC

00 M5 01 00 01 02 00 02 03 04 Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06

Proposals for Energy Saving

VM-33A Push button (Flush) VM130-01-33 VM132-M5-33 VM-34AR Red VM130-01-34R VM130-01-34B VM130-01-34G VM130-01-34Y VM132-M5-34R VM132-M5-34B VM132-M5-34G VM132-M5-34Y Selector (2 position) VM-34AB Black VM-34AG Green VM-34AY Yellow VM-36A Key selector (2 position) VM130-01-36 VM132-M5-36 Red VM151-01-35R VM151-01-35B VM151-01-35G VM151-01-35Y VM153-M5-35R VM153-M5-35B VM153-M5-35G VM153-M5

Modular F.R.L. Units

thread type: M5, NPT.

Modular Type Lubricators Series AL

to d.