Modular F.R.L. Pressure Control Equipment

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

KR

4 14 1 4 KGE04-02 17 Connection thread 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 30 Applicable tubing 6 M14 x 1 15 17 13.1 10.4 17 19 29 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 x 1 18.5 8 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 41.5 29.5 53 67 34.5 36.5 12.5 14 21 21 M20 x 1 10 22 24 3 8 KGE10-03 3 8 KGE12-03 92 59 37 14 12 M22 x 1 27 23 24 58.3 46.1 22 1 2 KGE12-04 41 18 3

Table of Contents

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

Table of Contents

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000

5 Port Air Operated Valve

A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port

VEX1

VEX390 VEX342 Solenoid for subplate VEX342 Air operated for subplate VEX322 Solenoid valve Speed controller Silencer Port size Fitting (One side) 4 pcs System VEX3 2 1 2 AS4000 AN200 T1075 (10) DL10-02 A B T1209 (12) DL12-02 C AS420 AN300 T1209 (12) DL12-03 VEX3 2 3 4 D AS420 AN400 SGP elbow 90 1 2 B SGP B 1 2 E AS420 AN400 90 elbow F G AS500 AN500 AN600 SGP B 90 elbow 90 elbow 90 elbow

42

-P--02: 1/4 VVQ4000-P--03: 3/8 4(A) 2(B) 1(P') 5(R1) 3(R2) Plug-in type Plug lead type Circuit diagram Individual EXH spacer VVQ4000 R 1 02 163 (Plug-in type) Thread type 115.5 (Plug lead type) 25 Manifold Port size Nil Rc F G N NPT T NPTF 73 12.5 02 1/4 03 3/8 1 Plug-in type 5 Plug lead type 26.4 1(P) 4(A) VVQ4000-R--02: 1/4 VVQ4000-R--03: 3/8 2(B) 3(R') 3(R2) 5(R1) Circuit diagram Plug-in

Prevents Micro-Bubbles

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Manifold VV8 1 5 D T 02 03 Port thread Nil T F Rc NPTF G Size 1 2 3 Size 1 Size 2 Size 3 Location of P, EA, EB port Number of stations D U Bottom Top 1 1 station 10 10 stations Size of P, EA, EB port Note) SU and TBU require one station. 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Location and size of A, B port 02 03 04 06 10 02B 03B 04B Side 1/4 Side 3/8 Side 1/2 Side 3/4 SIde 1 Bottom 1/4 Bottom

Secondary Batteries

Bracket*1 Symbol 37B 75B 37 kW 75 kW Nil B *1 Bracket is included, (but not assembled).

Modular Design with Uniform Body Style

B B B AC20-D 1/8 1/8 M5 x 0.8 Width across flats 14 Width across flats 14 N.O.: Black N.C.: Gray B AC30-D to AC60-D B B B B B B Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Barb fitting applicable tubing: T0604 1/4 1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 A B C E F G J K M N Q1

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Rubber seal 5 Port Solenoid Valve Series SYJ7000

regulator 27 A B Manual override R1 R2 P 8.5 34 2-4.3 (For mounting) 128.8 [131] 1/4, 1/8 (P, A, B port) (Light/surge voltage suppressor) 80 [87] 57.5 [64.5] + 64.6 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7240-L01 02 M plug connector (M): SYJ7240-M01 02 DIN terminal (D): SYJ7240-D01 02 M8 connector (W0): SYJ7240-W001 02 Applicable cable

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

P), 3(R) port] Applicable tubing O.D.: 8, 5/16" 13.3 (Pitch) P = 10.5 24 13.3 24 36.7 16.2 34 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 P 1 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

Hand Valve Series VH

VH20l-02 VH30l-02 to 03 2 (A) 4 (B) 25 25 25 4 (B) 1 (P) 3 (R) 1 (P) 62 74 49 62 2 (A) 4-5.5 4-6.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R)

Speed Controller with One-touch Fitting

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 Gasket seal Note 3) AS121F-U10/32AS131F-U10/32 10-32UNF Note 3) AS221F-01 AS231F-01 1/8 Note 3) AS221F-02 AS231F-02 1/4 Note 3) Note 3) R NPT Note 1) Sealant AS321F-02 AS331F-02 1/4 AS321F-03 AS331F-03 3/8 AS421F-04 AS431F

0.4

)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQ2300 VQ2400 VQ2301 VQ2401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQ2500 VQ2501 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ2A01 VQ2B01 4(A) 2(B) 2(B) 4(A) r 5(R1) 1(P) 3(R2) 5(R1) 1(P) 3(R2) VQ2C01 2(B) 4(A) 5(R1) 1(P) 3(R2) Component Parts Component