MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

CU

6.6 25 6.7 32 7.7 Standard Strokes Standard strokes (mm) 20, 30, 40, 50, 60, 70, 80, 90, 100 Bore sizes (mm) 20, 25, 32 Intermediate strokes are also available upon receipt of order.

7ND9071en

The display starts to blink next position (50 % or 20 %).

Electromagnetic Digital Flow Switch

Analog Output Flow/Analog output Output A B C Voltage output 1 V 1.1 V 5 V Current output 4 mA 4.4 mA 20 mA C Model Rated flow [L/min] Minimum Maximum LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 B A Outside the range 0 Min.

Series KP/KPQ/KPG

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20m bundle 100m bundle Symbol 20 100 2 1 1m = 3.28ft Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 1MPa = 145 psi F = (1.8 x C) + 32 14 Related

Series KP/KPQ/KPG

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Color White Black Red Blue Yellow Green Symbol W B R BU Y G Length 20m bundle 100m bundle Symbol 20 100 2 1 1m = 3.28ft Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 1MPa = 145 psi F = (1.8 x C) + 32 14 Related

KP/KPQ/KPG

Burst Pressure Characteristics Curve and Operating Pressure How to Order TPS0604 B 20 5 4 Tubing designation Burst pressure MPa Burst pressure 3 Color Roll length Symbol W B R BU Y G Color White Black Red Blue Yellow Green Symbol 20 100 Length 20m bundle 100m bundle 2 1 Max. operating pressure -20 0 0 20 40 60 80 Operating temperature C 11 Related Equipment Clean Series Tubing Polyurethane

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

VQ7-6/7-8

(20) (port B) 16 (20) (port A) 16 (20) (port B) Manual override A B A B B PB B PB 75 (86) 62 (72) 108.5 (121.5) 141 (154) 153 (166) 75 (86) 62 (72) 50 38 50 38 Indicator light PA PA R2 R1 P R2 R1 P Indicator light 49 (64) 49 (64) 2-7.5 Mounting hole 2-7.5 Mounting hole 49 (64) 49 (64) G1/2 (cable 6.8 to 10) G1/2 (cable 6.8 to 10) 153 (166) 141 (154) 108.5 (121.5) 50 (63) 5 3 38 (53) 32 (42

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

VM

P.T. 20 N F.O.F. 30 O.T. 50 T.T.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

stattons : l : 20 | 20 staitons Type /rc Nvv5z3-4o-@2g|5 Stations I asize of A, B port lils | 10.32 Nom.

Title not found

stattons : l : 20 | 20 staitons Type /rc Nvv5z3-4o-@2g|5 Stations I asize of A, B port lils | 10.32 Nom.

SMC Electronic Switch Series Variations

ZS-20-A 16 NPN Open Collector 2 output w/o analog output, 3 revolution adjustment ISl IWith lead wire ZS-20-5A 17 NPN Open Collector 2 output w/o analog output, 200 revolution adjustment Note) When ordering switch with 5m long lead wire, indicate both part numbers. Ex.) ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

Ejector Valve Unit Series ZYY/ZYX 1

20 40 40 40 40 Suction flow rate Suction flow rate 10 10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply

Rotary Table

Table 9 Port size Size Port size Size Port size A1, B1 A2, B2 10 M5x0.8 10 20 20 A1 30 Rc1/8 30 50 50 M5x0.8 B2 B1 G1/8 70 70 NPT1/8 100 100 Fig. 8 NPTF1/8 200 200 Rotary table ports and plate have a fixed orifice. Do not make the diameter of this hole larger by additional processing.

NCQ8

Applicable load Relay, PLC IC Caution Load voltage 24 VDC 4 to 8 VDC 100 VAC Operating Precautions Load current range and max. load current 5 to 40 mA 20 mA 5 to 20 mA q Do not use anything other than the mounting screws attached to the auto switch body to secure the switch. If screws other than those specified are used, it may cause the switch to be damaged.

CY1F

Refer to the Made to Order Specifications on page 20.

MGF

Allowable horizontal direction load l l m m0 l = 50mm Graph 1 l = 100mm Graph 2 v = 100mm/s or less Graph 6 v = 50mm/s or less Graph 5 300 300 MGF100 MGF100 50 200 200 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 20 20 MGF40 MGF40 10 10 10 MGF40 MGF40 10 5 4 3 5 4 3 2 2 5

Low Differential Pressure Sensor

DC() IN (1 to 5 V) Analog output or auto shift input Gray 2 DC(-) Blue 1 20 2 m 20 With bracket A 30 20 46 4.2 10 15 40 31.5 26.5 1.6 7.2 22 35 41 A View ZS-28-B Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 7 34.5 24 11 Panel thickness 0.5 to 6 ZS-27-D Panel mount adapter + Front protective cover 8.75 ZS-27-C Panel mount adapter 6 Series