Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

MSQ +4 0 0 9 e ov o gr y MRQ ke of e g n Dra R n ot io at at io ot 20n R ra R ot at n io g n ra e ng of e k of e y ke gr o o y v e 9 gr 0 +4 0 oo ve Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction.

C95

A59W n n = 2, 4, 6, 8 n = 2, 4, 6, 8 CP95 15 25 1 F5(W)/J5J 15 25 1, 2 59W NCM 15 + 55 (n 2)/2 25 + 55 (n 2)/2 n F5BAL/F59F n = 2, 4, 6, 8 n = 2, 4, 6, 8 15 25 1, 2 NCA F5NTL 15 + 55 (n 2)/2 25 + 55 (n 2)/2 n n = 2, 4, 6, 8 n = 2, 4, 6, 8 D10 10 1 100 100 2 (Same side) -X A3 2 (Different sides) 35 35 K3 n (Same side) 100 + 100 (n 2) 100 + 100 (n 2) G3 n = 2, 4, 6, 8 n = 2, 4, 6, 8 20n

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Spring return Spring extend Rubber bumper Heat resistant Cold resistant Low speed Stainless steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N

CE

F.G. 4. 1. 1. 2. 12 10N [102kgfcm] 1. 2032 20N [204kgfcm] () 40,50,63 30N [306kgfcm] 2. 3. 2. 1.52 1. 2. 1. 1()ISO VG32 3. 4. 5. 6. 1. 2.14.5mT CE1 3. 4. (DC1224V) [] 1. 2. 3. 4. 2.

MHZ

(For D-Y) 4 Finger Position/Narrow Type 9 MHZ2-20N 14 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 17.2 When closed 7.2 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-35 35 Series MHZ2 Dimensions MHZ2-25 Double acting/Single acting Basic type 36.5 22 2-M6 x 1 thread depth 10 (Mounting thread) 4-M6 x 1 thread

MHZ

(For D-Y) 4 Finger Position/Narrow Type 9 MHZ2-20N 14 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 17.2 When closed 7.2 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-35 35 Series MHZ2 Dimensions MHZ2-25 Double acting/Single acting Basic type 36.5 22 2-M6 x 1 thread depth 10 (Mounting thread) 4-M6 x 1 thread

Rotary Table Series MSU

Rotation 1 9010 18010 9010 18010 9010 18010 9010 18010 Fluid Air (unlubricated) Proof pressure MPa (psi) 1.05 (152.25psi) 1.5 (217.5psi) Ambient and fluid temperature 5 to 60C (41 to140F) Operating pressure range MPa (psi) 0.15 to 1.0 (21.75 to 145) 0.15 to 0.7 (21.75 to 101.5) 0.2 to 0.7 (29 to 101.5) Rotation time adjustment range sec/90 0.07 to 0.3 (seconds per 90) Allowable radial load 20N

LX Series Compact Electric Actuators

stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08; 6mm lead @5 stepping 200 @q 12mm lead I a-.1 Teaching Box See Page 40 Low Pmfils tlEctrh Slide lilE Specif ications Stroke(mm) 25, 50, 75, 100 Motol 5-phase stepping motor Screw(mm) 08, Lead 6 s8, Lead 12 68, Lead 2 s8, Lead 5 Max. pay load (horlzontal orientation) 30N (6.6 rb) 20N

ZL3-OM00801

3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40 ) (3/E) 40 ) [Nm] G Rc1/8,G1/8,NPT1/8 35 Rc1/2,G1/2,NPT1/2 2830 (2/V) Rc3/4,G3/4,NPT3/4 2830 (3/E) Rc1,G1,NPT1 3638 10 No.ZL3-OM00801-A 3.4.3 1/P 0.20.6MPa 2/V 1 3/E G 3.4.4 1/P 1) 2) 3) 4) 1) 2) 3) 1) 0.1 2) 0.1 3) +0.15 -0.2 3.4.5 1) 2), 3) 4) 5) URL http://www.smcworld.com& 11 No.ZL3-OM00801-A 3.5 3.5.1 1) . 30N 35N 20N

VEX-OMY0001

(P2) () 3) 4) 5) 23 5 No.VEX-OMY0001 VEX3 3 / DC () 5 20N 1) 2) 1 ()ISO VG32 2 ISO VG32 ,(SDS) 6 No.VEX-OMY0001 VEX3 3 / () 30 ( ) , 1 VG32 2 ()ISO VG32 7 No.VEX-OMY0001 VEX3 VEX3 12,22,32,42 ,300mm DXT170-80-A1) 2) Lmm 2 300 6 600 1 (2 ) AC100V 10 1000 2 (2 ) AC200V 15 1500 3 (2 ) AC 20 2000 DC L 4 :+ :DC 25 2500 DXT170-71-1 30 3000 0.20.33mm ( 1.7mm) DC : M 3.23.7mm

This is a legacy product, and replaced byVEX1900-20N-G

SY

Handling of pilot valves Be sure that forces exceeding 20N are not applied to the pilot valves due to lead wire deflection and external forces, as this may cause damage. Piping Caution 1. Preparation before piping Before piping is connected, it should be thoroughly blown out with air (flushing) or washed to remove chips, cutting oil and other debris from inside the pipe. 2.

Compact

stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08; 6mm lead @5 stepping 200 @q 12mm lead I a-.1 Teaching Box See Page 40 Low Pmfils tlEctrh Slide lilE Specif ications Stroke(mm) 25, 50, 75, 100 Motol 5-phase stepping motor Screw(mm) 08, Lead 6 s8, Lead 12 68, Lead 2 s8, Lead 5 Max. pay load (horlzontal orientation) 30N (6.6 rb) 20N

•

4D 4P Ii) I I NBR NLP-40 Piston packing NLP-SO NLP-63 I: NBR CM-040-16-127 Tube gasket CM-OSO-16-1 28 CM-063-16-129 I Plastic C1AOSO-07-306 C1A040-07-30S Wear ring C1A063-07-307 NBR Cushi9n packing A MC-2S $ I MC-25 NBR . Cushlb!')'p8cking B MC-20 MC-20 "qr .,. Gasket tor GusHi<:>n va 've. NBR CK40-1697 !

•

,xt2S Y G G Aat Rat with_ril l G G 'G Rat FJat~ ri ZPR40g 4D 43 1 8.5 32 42B 160.6 6 8 6.5 , 3.3 ZPR20~ 20 23 1 4 29 39.8 57.6 5 6 6 4 1.7 zPR25~ 25 28 , . 14 29 39B 57.6 5 6 8 , ZPR5O~ (iO 53 1 95 33 m l61.6 6 . 6 75f i 3 .8 , 4 1.8 ZPR32~ 32 35 14.5 29.5 40.3 sal 5 6 8 4.5 2.3 Deep type (mm) "B E I. F '-1: M6 x1 M:U8xt25 y Model C 0 M G I.. G Deep type (mm) H:M5xO.8 H:t.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D

IDUS/IDFS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series IDUS Series IDUS Inlet air temperature C Model IDUS3E IDUS4E IDUS6E 500 310 55 740 Air flow capacity l/mim(ANR) 295 (300) 475 (430) 703 (640) 60 160 275 225 55 Power consumption W 165 (189) 230 (275) 280 (295) 60 ( ): Previous model IDU3D/4D/6D

Table of Contents

Free CUJ 10 13 + Stroke 17 CU 4 E Pitch Dimensions (Without magnet) Free 15 19 CUJB4-4D CQS E Bore (mm) CQM 4 6 8 10 10 13 13 13.5 13 18 + Stroke 26 CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 RQ Free CDUJB6-8D MU DWith boss in rod side (h9) Easy seal replacement

CUJ

Free CUJ 10 13 + Stroke 17 CU 4 E Pitch Dimensions (Without magnet) Free 15 19 CUJB4-4D CQS E Bore (mm) CQM 4 6 8 10 10 13 13 13.5 13 18 + Stroke 26 CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 RQ Free CDUJB6-8D MU DWith boss in rod side (h9) Easy seal replacement

Electromagnetic Digital Flow Switch

The straight piping length shall be 5 times (5D) or more of the piping size to achieve the stable measurement. 3 Accuracy change [% F.S.] 2 [mm] 1 Model Straight piping length D 5D LFE1 11 55 LFE2 21 105 LFE3 27 135 [Port size] [Measurement conditions] Fluid: Tap water Pressure: 0.2 MPa 0 D 2D 3D 4D 5D LFE1: 3/8 inch LFE2: 3/4 inch LFE3: 1 inch 0 Straight piping length Operating Pressure