Table of Contents

Same side Same side Different sides Different sides D-C7/C80 50 50 + 45 (n 2) 10 15 15 + 45 ( n 2) (n = 2, 4, 6) 2 D-H7/H7W D-H7NF 60 + 45 (n 2) 60 15 10 15 + 50 ( n 2) (n = 2, 4, 6) Mounting D-C73C/C80C D-H7C D-B5 D-B64 D-G5NTL 2 65 + 50 (n 2) 65 15 10 Warning 15 + 50 ( n 2) (n = 2, 4, 6) 15 75 2 10 1. Do not rotate the cover.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 41 Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in one-touch fitting 65.2 [67.4] Approx. 300 (Lead

OMU0023

Instruction to perform the Return to Origin operation 4 01 05 001A FF00 01 05 001A FF00 sent. 5 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Modular Type Filter Regulator Series AW

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(For manifold type 20, 21R) 1 SYJ7 2 5 M 01 Body ported SYJ7 4 5 M 01 1 Base mounted Manual override 3 port Thread type Nil: Non-locking push type D: Push-turn locking slotted type Coil specifications F Nil Rc Nil Standard G N T NPT NPTF With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of D, DO, W type.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

CLA

1\:1;1 ,2,3,4. n -2.4.6,8 ... " =2,4 ,6.8 .. n= 2,4,6,8 ...

LEC-OM02704CN

2)0 RX(n+2)0 RY(n+2)1 RX(n+2)1 RY(n+2)2 RX(n+2)2 1 PT0 RY(n+2)3 6 DI5 RX(n+2)3 2 PT1 RY(n+2)4 7 DI6 RX(n+2)4 3 PT2 RY(n+2)5 8 DI7 RX(n+2)5 4 PT3 RY(n+2)6 TL1 RX(n+2)6 5 PT4 RY(n+2)7 PC RX(n+2)7 6 PT5 RY(n+2)8 CDP RX(n+2)8 7 PT6 RY(n+2)9 RX(n+2)9 8 PT7 RX(n+2)A RY(n+2)A RX(n+2)F RX(n+3)0 RY(n+2)B / RX(n+3)9 RY(n2)C RX(n+3)A ALM 15 RY(n+2)F RY(n+3)0 RX(n+3)B Ready CRD RY(n+3

VK300

01 Grommet: G DIN terminal: D Applicable cable O.D: 3.5 to 7 Max.10 69.8 83.4 75.9 2 x 4.5 (Mounting hole) Manual override (Non-locking) Pg7 300 (Lead wire length) 4 x Rc 1/8 (P, R port) 4 x Rc 1/8 (P, R port) 2 x 4.5 (Mounting hole) 39 23 8 (Pitch) 1.5 10.5 49.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) (Pitch) n x Rc 1/8 (A port) L Dimension n L n: Stations 1

F

Release Button: Imperial: Red Metric: Blue C O N N E C T I O N T H R E A D C O N F I G U R AT I O N Metric M5 M5 x 0.8 Metric 01 1/8 02 1/4 03 3/8 04 1/2 06 6mm Diffent Dia Reducer 08 8mm Diffent Dia Reducer 10 10mm Diffent Dia.

Intrinsically Safe Valve

Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For manifold type 20, 21R) 1 SYJ5 2 5 M M5 Body ported SYJ5 4 5 M 01 1 Base mounted Thread type Port size Manual override 3 port F Nil Rc Nil: Without sub-plate 01: 1/8 port With sub-plate Nil: Non-locking push type G N T NPT NPTF Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T For sub-plate style, manifold type 40, 40R, 41, 41R Power saving circuit is not

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Normally open) 2 01 Body ported Rc 1/8 Without sub-plate Rc 1/8 Base mounted 01 Nil Light/Surge voltage suppressor V100 Body type Nil None Rc 1/4 02 SY Z With light/surge voltage suppressor (Indicator light is not available for grommet type.)

VS 8-2/VS 8-4

N 1 1 N 5 W1 Size 01 02 Size 26 mm Size 18 mm CE compliant Nil Q CE compliant Stations 1 1 station Option Nil None 16 16 stations Special wiring specifications (Except double wiring) K Cylinder port size Direct exhaust with built-in silencer S Symbol 01 02 03 01B 02B Port size Side ported 1/8" Side ported 1/4" Side ported 3/8" Bottom ported 1/8" Bottom ported 1/4" Size 26 mm Size 18 mm

Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the SMC

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

HRX-OM-R028

(Request)[STX] 01WLOC01 [ETX] [26h] (Response)[STX] 01[ACK] [ETX] [06h] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address W Request message to write [ACK] Normal response message LOC Key-lock setting [06h] BCC value 01 Read information (01All locked) [26h] BCC value 5.8 Command explanation HRSH Series 5-20 HRX-OM-R028 Chapter 5 Simple communication

A

N C Q 2 / C Q 2 M5 0.8 M6 1 M8 1.25 Flange Double Clevis** Bore Size (mm) Foot* M10 1.5 (N)CQ-F012 (N)CQ-D012 12 (N)CQ-L012 (N)CQ-F016 (N)CQ-D016 16 (N)CQ-L016 (N)CQ-F020 (N)CQ-D020 20 (N)CQ-L020 (N)CQ-F025 (N)CQ-D025 25 (N)CQ-L025 (N)CQ-F032 (N)CQ-D032 32 (N)CQ-L032 (N)CQ-F040 (N)CQ-D040 40 (N)CQ-L040 (N)CQ-F050 (N)CQ-D050 50 (N)CQ-L050 (N)CQ-F063 (N)CQ-D063 63 (N)CQ-L063 Note) * If Foot