3 Port Air Operated Valve

N.O. 13.5 SYA 12 NC 26.2 65.2 58.2 3R 58.2 27 50 50.1 65.2 SYJA 1P 26.2 NO 12 VZA 1/4 1(P), 3(R) port 1/8 (Pitch) P = 27.5 12(PA) port 28 M5 x 0.8 (Breathing hole) VFA 7.5 L2 L1 VFRA (Station n) (Station 1) 1/8 12(PA) port VPA4 12 SYJA 73.5 54 VZA 37.5 11 2A 2A VTA 1/4 2(A) port (Pitch) P = 27.5 28 VGA 2 stations 83.5 68.5 111 96 138.5 123.5 166 151 193.5 178.5 221 206 248.5 233.5 276 261

Table of Contents

1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

LEC-OM07605CN

.1 1-1 EDB 2A.2 1-2 EDB 2A.3 1-3 EDB 2A.4 1-4 EDB 2A 1 2A.5 1-5 EDB 2A.6 1-6 EDB 2A.7 1-7 EDB 2A.8 1-8 EDB 2B 2B.1 1 EDB 2B.2 2 EDB 30.1 DB (1) (1) (1) 30.2 DB 30 (1) (1) (1) (1) 30.3 DB (1) (1) (1) 31 31.1 / SD 8 3 8.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

GA pin CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com KK UNF 2A KK UNF 2A FF UNF 2A D across flats NN mounting nut (included) D across flats LB + ZC per 1" of stroke MB LB + ZC per 1" of stroke NN mounting nut (included) NN UNF 2A (in) MB1 Bore size (in) MM KK

Vacuum System Peripherals:

block assembly (Standard): SX3000-51-2A The following columns shall be filled in by SMC.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

How to Order Type 41 (5 port / Base mounted) 10-SS5YJ7-4105 01 01 1/8 A, B port size Thread type Stations P port 1/4 Nil F N T Rc G NPT NPTF 02 2 stations Applicable individual EXH spacer assembly SYJ7000-17-2A Applicable individual SUP spacer assembly SYJ7000-16-2A : : 20 20 stations A, B port 1/8 R port 1/4 Note) For more than 8 stations, supply air to both sides of P port and exhaust air

SQ1000/2000

B (+) () 1B 1A 2A 3A 4A 5A 6A 7A 8A 9A 10A COM SOL. A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B COM 10A 9A 8A 7A 6A 5A 4A 3A 2A 1A (+) () 2A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 2 SOL. B (+) () 2B SOL. A (+) () 3A Station 3 SOL. B (+) 3B () SOL. A (+) 4A () Station 4 SOL. B 4B (+) () SOL. A (+) () 5A Station 5 SOL. B (+) 5B () SOL. A (+) () 6A Station 6 SOL. B 6B (+) () SOL.

42

However, the maximum number of stations is 16. 1B 2A 2B 3A 3B 4A VFR 4B 5A 5B 6A 6B 7A 7B VQ7 1.

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-2A .1 pc.

Non-contact Gripper

ZPT ZPR XT661 XT661 735 Non-contact Gripper XT661 Series How to Order Specifications Cyclone type 2A 4A 6A 8A 10A XT661 2A R Outer body diameter (mm) 20 40 60 80 100 Piping port size M5 x 0.8 Rc 1/8 Fluid Air* Outer body diameter: Operating pressure 0.01 to 0.5 MPa 2A 20 mm 4A 40 mm 6A 60 mm 8A 80 mm 10A 100 mm Proof pressure 0.75 MPa Ambient and operating temperature 5 to 60C (no freezing

C85

4 (Switch type only) 2A CA2 2B (2 for switch type) 2C CS1 2D e r C76 Nickel plating Nickel plating 5A C85 (Switch type piston) 5B C95 C8520/25 Rubber cushion !8 2A o y !6 !9 u q r e !3 t !7 !5 !2 !4 i !0 2A 2B 2C 2D CP95 NCM NCA DF Front nose N Basic style integrated clevis E Double end Y Front nose in line port -X !1 !8 o y !6 !

SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Appicable blank plate assembly Valve mounting direction Stations R port Rc(PT)1/8 Single solenoid coil is located on opposite side as the A, B port. 2 stations 02 SYJ3000-21-2A P port Rc(PT)1/8 : : 20 stations 20 Single solenoid coil is located on same side as the A, B port.

CATALOG

www.stevenengineering.com I 2.15 SOLENOID VALVES SERIES SY3000/5000/7000 M A N I F O L D O P T I O N S BLANKING PLATE ASSEMBLY INDIVIDUAL/EXH SPACER ASSEMBLY INDIVIDUAL/SUP SPACER ASSEMBLY Series Assembly Part No SY3000 SY3000-26-2A SY5000 SY5000-26-2A SY7000 SY7000-26-2A Series Assembly No Port Size Series Assembly No Port Size SY3000 SY3000-38-2A M5x0.8 (10-32Nom) SY3000 SY3000-39-2A M5x0.8

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: -, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -

Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -