Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 682   Family Description: XLC HIGH VACCUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 682   Family Description: XLC HIGH VACCUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY HIGH TEMP   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 682   Family Description: XLC HIGH VACCUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 1m, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 1m, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 20 (2~16L/min), Thread: Rc, Port Size: 04 (1/2)

Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 20 (2~16L/min), Return Unit: None, Thread: N (NPT), Port Size: 04 (1/2), Flow Switch Output: 1T (Remote Sensor Unit; Out 1: Analog 1 to 5 V; Out 2: Flow Rate: None, Temp. Analog 1 to 5 V; Temperature Sensor: Yes)

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment S ZZ SS 38 16 14 2-6.9 through 8 30 1 M10 x 1.5 x 8L 2-11 counter bore depth 6.3 36 Z (Hexagon socket head cap bolt) 1 750.2 750.2 76 44 96 98 6.3 5 16 18 M8 x 1.25 x 23L and M8 x 1.25 2-M6 x 1 (Through-hole) 2-M5 x 0.8 thread depth 8 (Hexagon bolt)(Hexagon nut) M8 x 1.25 x 16L

MLU

Supply air pressure of 0.2MPa or more to the unlocking port, and set the lock ring to the perpendicular position. 3) Screw the unlocking bolt which is included (hexagon socket head screw 25, 32: M3 x 12l, 40, 50: M4 x 16l) into the lock ring to hold the unlocked condition.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

range (mm) D-X Shock Absorber Specifications Piston Speed 63 16 25 40 Bore size (mm) RB 2015 RB 2725 RB 0806 RB 1007 RB 1412 20Model 80 to 500 mm/s Without stroke adjusting unit (MY3A) 2.4 10.1 0.84 29.8 46.6 Max. energy absorption (J) 80 to 1000 mm/s 80 to 1000 mm/s Without stroke adjusting unit (MY3B) Data 6 7 12 15 25 Stroke absorption (mm) Stroke adjusting unit (L and H unit/MY3B) (16L

Table of Contents

range (mm) D-X Shock Absorber Specifications Piston Speed 63 16 25 40 Bore size (mm) RB 2015 RB 2725 RB 0806 RB 1007 RB 1412 20Model 80 to 500 mm/s Without stroke adjusting unit (MY3A) 2.4 10.1 0.84 29.8 46.6 Max. energy absorption (J) 80 to 1000 mm/s 80 to 1000 mm/s Without stroke adjusting unit (MY3B) Data 6 7 12 15 25 Stroke absorption (mm) Stroke adjusting unit (L and H unit/MY3B) (16L

Supply Unit: P (Stop Valve), Rated Flow Range: 20 (2~16L/min), Thread: Rc, Port Size: 03 (3/8)

Supply Unit: None, Rated Flow Range: 20 (2~16L/min), Thread: N (NPT), Port Size: 03 (3/8)

Supply Unit: P (Stop Valve), Rated Flow Range: 20 (2~16L/min), Thread: F (G), Port Size: 04 (1/2)

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 20 (2~16L/min), Thread: N (NPT), Port Size: 04 (1/2)

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2~16L/min), Return Unit: P (Stop Valve), Thread: Rc, Port Size: 03 (3/8), Flow Switch Output: CT (Integrated Display; Out 1: NPN; Out 2: (Analog 1 to 5 V) ⇔ Analog 1 to 5 V ; Temperature Sensor: Yes), Lead Wire: N (without Lead Wire), Flow Switch Unit: M (Integrated Display, IO-Link Campatible; Instantaneous Flow: L/min; Accumulated

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2~16L/min), Return Unit: W (Flow Adjustment Valve + Stop Valve), Thread: Rc, Port Size: 03 (3/8), Flow Switch Output: L2 (Integrated Display IO-Link Compatible; Out 1: IO-Link/Switch Output (N/P); Out 2: Switch Output (N/P) ; Temperature Sensor: None), Lead Wire: N (without Lead Wire), Flow Switch Unit: M (Integrated Display,

Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 20 (2~16L/min), Return Unit: None, Thread: Rc, Port Size: 04 (1/2), Flow Switch Output: 2T (Remote Sensor Unit; Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None, Temp. Analog 4 to 20 mA; Temperature Sensor: Yes)