Series MXQ Air Slide Table

/Symmetric Type 114 Air Slide Table Series MXQ Dimensions MXQ 25L/Symmetric Type 115 Series MXQ Air Slide Table Auto Switch/Proper Mounting Position at Detection of Stroke End 116 Air Slide Table Series MXQ Made To Order 117

BONNET ASSEMBLY, XLC-2 ANGLE VALVE, HIGH VACUUM VALVE

XLC is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL* family shares common features with all series members. Bodies are made of aluminum for lightweight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion.

XLC is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL* family shares common features with all series members. Bodies are made of aluminum for lightweight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion.

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 682   Family Description: XLC HIGH VACCUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 682   Family Description: XLC HIGH VACCUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Part Number Description: BONNET ASSY HIGH TEMP   Product Line: Z   Product Line Description: VACUUM SERIES   Family Code: 682   Family Description: XLC HIGH VACCUM VALVE   Class Code: 21   Part Code: 2   Reference Code:  L   PDF Documentation:  Datasheet   Click here to report information errorImage shown may not match exact part number

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 1m, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore

Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 1m, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Applicable bore size [mm] A1 D1 E1 L L1 MM ND NX NZ R1 U1 Split pin size Flat washer size Flat washer: Polished round MM Y-04D 40 22 10 24 55.5 55 M14 x 1.5 12 16+0.3 +0.1 38 13 25 3 x 18l Polished round 12 E1 NX NZ L Y-05D 50, 63 27 14 28 55.5 60 M18 x 1.5 12 16+0.3 +0.1 38 15 27 3 x 18l Polished round 12 D1 Y-08D 80 37 18 36 76.5 71 M22 x 1.5 18 28+0.3 +0.1 55 19 28 4 x 25l Polished round

SMC Pneumatic Clean Series

Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required. 4.9N 2 20, 25, 32 M2.5 x 0.45 x 25L or more M3 x 0.5 x 30L or more 40 10N 3 6. Use a speed controller with meter-out control. Lock cannot be released occasionally by meter-in control.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

T Note1) EB LL Concentrated piping on right (CY1F10 to 25R--) KA KB HW EW GD GC 2-P (Hexagon socket head plug) Hexagon socket head bolt For adjustment bolt fixing ES 2-P (Piping port) EY HA EH KC GB KH H GB GA GA G HB KW N N Adjustment bolt A Z + Stroke Concentrated piping on left (CY1F10 to 25L--) KA KB EW 2-P Hexagon socket head bolt For adjustment bolt fixing HW ES (Piping port) 2-P (Hexagon

Low Profile Guide Type

T EA EB LL Concentrated piping on right (CY1F10 to 25R--) KA KB EW HW GD GC For adjustment bolt fixing Hexagon socket head bolt 2 x P ES (Piping port) 2 x P (Hexagon socket head plug) EY HA EH KC H GB KH GB GA GA N G N A HB KW Adjustment bolt Z + Stroke Concentrated piping on left (CY1F10 to 25L--) KA KB EW For adjustment bolt fixing HW 2 x P 2 x P Hexagon socket head bolt ES (Hexagon socket

•

The standard lead wire length IS 06m.Grommet L IS added for 3m long lead wire (Example) ZSE4B-Ol -25L Port size: 01 stands for R(PT)1/8 and TI tor NPTF1 /8 Both types have M5X0.8 female threads InSide, Option (Available separately) Panel mount adaptor No.

CQ2

Example) Bolt M3 X 25l 4pcs. Calculation Example: CQ2D32-20DCM Cylinder weight: CQ2B32-20D Option weight: Both ends tapped Rod end male thread With rubber bumper Double clevis 193g 6g 43g 3g 151g 390g CQS CQ2 MU D 30 35 40 45 50 55 60 65 70 75 110 135 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 Model No. C Mounting bolt Model No. Mounting bolt Model No.

C95

Bore size (mm) Bolt Tightening torque (Nm) Width across flats 125 M12 x 1.75 x 25l 10 30.1 160, 200 M16 x 2 x 30l 14 99 M20 x 2.5 x 35l 17 193.5 250 Foot Others M20 x 2.5 x 30l 17 6-12-42

CJ2

D-X 20Data Stroke (mm) Bore size (mm) Thread size Pulling force 16 2 4.9 M2.5 x 0.45 x 25l or more Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. Rubber cap 6-3-83

70astamb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When