Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Valve Type: Double Acting, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: -, Valve Action

Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Open, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: A90--Reed, AC Volt, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: B (1 pc, Valve Open), Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead

Microspeed Cylinder

Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

Table of Contents

For air VV2CA3-05 VCA35-5G-4-03 1 set Manifold part no. 5 sets Valve part no. (Stations 1 to 5) IN port direction Side Front Nil A Series is the symbol for assembly. Add an in front of the part numbers for solenoid valves, etc., to be mounted. 3 4 Class 3 Class 4 Enter together in order, countingfrom station 1 on the D side.

CA2

Stroke (mm) Pulling force Bore size (mm) 40, 50, 63 80, 100 Thread size 3 10 N M3 x 0.5 x 30l or more 3 24.5 N M5 x 0.8 x 40l or more Remove the bolt for normal operation. It can cause lock malfunction or faulty release. Rubber cap 2. Manual release lock type Push the M/O knob and turn it 90 counterclockwise.

1

pin ZZ + Stroke H10 d9 NZ ND L1 RR1 H ZZ PY PX NX Bore size (mm) Spring pin +0.070 0 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 +0.3 +0.1 16 4 x 24l 40 12 13 51 192 84 11 38 55 +0.3 +0.1 4 x 25l 50 16 12 15 58 207 91 12 60 38 +0.3 +0.1 4 x 25l 63 16 12 15 58 218 91 12 60 38 +0.3 +0.1 +0.3 +0.1 4 x 36l 80 28 18 19 71 257 105 16 55 71 4 x 40l

Table of Contents

M2.5 x 0.45 x 25l or more 20, 25, 32 4.9 N 2 M3 x 0.5 x 30l or more 40, 50, 63 10 N 3 M5 x 0.8 x 40l or more 80, 100 24.5 N 3 5. Do not operate multiple cylinders in synchronization. Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required.

MG

M2.5 x 0.45 x 25l or more 20, 25, 32 4.9 N 2 M3 x 0.5 x 30l or more 40, 50, 63 10 N 3 M5 x 0.8 x 40l or more 80, 100 24.5 N 3 5. Do not operate multiple cylinders in synchronization. Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required.

Made to Order

H10 RR1 Bore size (mm) Spring pin +0.070 0 +0.070 0 +0.070 0 +0.070 0 +0.084 0 0.050 0.093 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 +0.3 +0.1 16 40 55 13 51 11 12 84 38 192 4 x 24L +0.3 +0.1 50 16 60 15 58 12 12 91 38 207 4 x 25L +0.3 +0.1 63 16 60 15 58 12 12 91 38 218 4 x 25L -X -X +0.3 +0.1 +0.3 +0.1 80 28 71 19 71 16 18 105 55 257 4 x 36L 100 30 83 21 72 16 20 118 61 282 4 x 40L

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 40 (5~40L/min), Thread: N (NPT), Port Size: 06 (3/4)

Supply Unit: W (Flow Adjustment Valve + Stop Valve), Rated Flow Range: 40 (5~40L/min), Thread: N (NPT), Port Size: 04 (1/2)

Flow Switch Type: 5 (Remote Sensor Unit), Rated Flow Range: 40 (5~40L/min), Return Unit: None, Thread: N (NPT), Port Size: 06 (3/4), Flow Switch Output: 2T (Remote Sensor Unit; Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None, Temp.

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5~40L/min), Return Unit: W (Flow Adjustment Valve + Stop Valve), Thread: N (NPT), Port Size: 04 (1/2), Flow Switch Output: E (Integrated Display; Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V, Temp.

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 40 (5~40L/min), Return Unit: W (Flow Adjustment Valve + Stop Valve), Thread: N (NPT), Port Size: 04 (1/2), Flow Switch Output: E (Integrated Display; Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V, Temp.