Table of Contents

Dimensions . 46 47 48 50 52 52 53 54 54 55 55 56 57 58 60 60 60 61 62 63 65 65 65 66 66 67 67 68 69 69 70 70 71 72 73 75 75 75 77 77 78 78 78 79 80 82 84 84 84 85 86 87 87 88 89 90 Series AS * 2 * 0-D Speed Controller Adjustable by Flat Head Screwdriver: Standard Type Elbow Type \(Metal Body\) . Specifications. How to Order . Construction. Dimensions .

ZR

Vacuum release pressure port EXH EXH 109 PE PE PE PE PD PD PD PD 81.5 80.8 80.8 PD PD PD PD PS PS PS PS PV PV PV PV 52 52 13.5 13.5 50 42 42 PD PS PD PS 35.5 35.5 31.5 33 33 28 28 16.5 17 17 PV PV PV PV PV PV M5 PD port Release flow rate adjustment needle Vacuum release pressure port 2-M5 PD port Common vacuum release pressure port Rc 1/8 PV port Air supply pressure port M5 PS port 2-Rc

VNC

N.C. 12 (P2) 12 (P1) 12 (P1) 12 (P1) VX2 VX (1) (2) (1) (2) (1) (2) (1) (2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 VXA VN LVC Wide selection of port size and variations LVA LVH Threaded type (6A to 50A) Flange type (32F to 80F) LVD LVQ LQ LVN Low water

KJ

(inch) Connection thread UNF NPT H (Width across flats) Min. port size D1 Note) D2 L1 P2 A Weight (g) Model L2 M P1 L3 1 8 1 8 5 32 3 16 KQ2ZD01-34S KQ2ZD03-34S KQ2ZD05-34S KQ2ZD07-34S KQ2ZD07-35S KQ2ZD07-36S KQ2ZD09-35S KQ2ZD09-36S KQ2ZD09-37S KQ2ZD11-35S KQ2ZD11-36S KQ2ZD11-37S KQ2ZD13-36S KQ2ZD13-37S 14.29 14.29 14.29 9.6 10.4 11.4 37 37 37 37.5 38.5 40.5 45 45.5 47.5 52 52.5 54 60.5

Compact and Lightweight

P1 12 C L4 M2 9.7 2 The release button of 6 One-touch fitting is oval as shown above. The button can be rotated freely. L1 L21 L3 M1 d2 M3 Q1 D22 2 x F VAC.

VQC

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm] P: Pressure drop rate (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Clean Regulator/Fluororesin Type

IR-A 52 5.5 IR HEX.24 (112) IRV With nut 41.7 VEX Pilot port Rc, NPT 1/8 SRH 12 R SRP 75 52 64 1 2 SRF SRF SMC 4 x 5.5 (Mounting hole) ITV 41.7 52 SRF30 IC Model A1 A2 B1 B2 3/8" SRF30S-1S11 SRF30S-1S1113 SRF30S-1S13 SRF30S-1S1311 SRF30S-2S11 SRF30S-2S1113 SRF30S-2S13 SRF30S-2S1311 35 58 ITVH 35 58 34 62 IN 67.7 32.3 OUT 34 62 ITVX 34 62 35 58 34 63 PVQ 34 63 32 65 A1 A2 32 65 5.5 VY1

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

For saturated steam Viewing the graph [664] (183) Upstream pressure of valve P1 = 1.0MPa 1.0 The sonic range pressure to generate a flow rate of 25kg/h for orifice 3 (VCS21) is P1 approx. 0.68MPa for orifice 4 (VCS21) is P1 approx. 0.40MPa for orifice 5 (VCS21) is P1 approx. 0.29MPa The holding heat differs somewhat depending on the pressure P1, but at 25kg/h it is approximately 16000kcal

Series VCS

For saturated steam Viewing the graph [664] (183) Upstream pressure of valve P1 = 1.0MPa 1.0 The sonic range pressure to generate a flow rate of 25kg/h for orifice 3 (VCS21) is P1 approx. 0.68MPa for orifice 4 (VCS21) is P1 approx. 0.40MPa for orifice 5 (VCS21) is P1 approx. 0.29MPa The holding heat differs somewhat depending on the pressure P1, but at 25kg/h it is approximately 16000kcal

High Vacuum Angle Valve, XL Series

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).

XL

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).

CEx-OMG0106

When P1 is blinking, use UP & DOWN key to reconfirm each and individual present value. When the input, value is blinking, press READ once to shift the operation back to P1. 48 11-2 Program Setting Input desired cylinder positions. 11-2-1 Input Method Turn the controller switching mode to PROGRAM. Note: Step 0 for every program is END. Program no 1 will start blinking.

SYJ3000/5000/7000

= 0.7 MPa, P2 = 0.5 MPa Effective area at supply side (mm2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Note 3) 5.1 1.9 PA 5.8 2.1 PB Note 3) 12.6 4.5 AEA 12.6 4.5 BEB 1-5-80

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Refer to p.1.12-52 for DIN raile model no. Note 2)Applicable to VQZ2000 and 3000.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

How to Calculate Flow (At an air temperature 20C) 1P1+0.1013<1.89(P2+0.1013) Q=226S P(P2+0.1013) Piping 2P1+0.10131.89(P2+0.1013) 1Completely flush (air blow) pipes before plumbing to remove dust. 2Clamping torgue: Q=113S(P1+0.1013) Q:Flow rate under standard conditions [ /min (ANR)] P1:Upstream pressure (MPa) P2:Downstream pressure(MPa) P:Pressure differential(P1-P2)(MPa) S:Effective area

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9

VCW

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9 10 Series VCW Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air Pressure

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Y (DC Low Wattage Type (0.5W), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.