VQC

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm] P: Pressure drop rate (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Clean Regulator/Fluororesin Type

IR-A 52 5.5 IR HEX.24 (112) IRV With nut 41.7 VEX Pilot port Rc, NPT 1/8 SRH 12 R SRP 75 52 64 1 2 SRF SRF SMC 4 x 5.5 (Mounting hole) ITV 41.7 52 SRF30 IC Model A1 A2 B1 B2 3/8" SRF30S-1S11 SRF30S-1S1113 SRF30S-1S13 SRF30S-1S1311 SRF30S-2S11 SRF30S-2S1113 SRF30S-2S13 SRF30S-2S1311 35 58 ITVH 35 58 34 62 IN 67.7 32.3 OUT 34 62 ITVX 34 62 35 58 34 63 PVQ 34 63 32 65 A1 A2 32 65 5.5 VY1

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

For saturated steam Viewing the graph [664] (183) Upstream pressure of valve P1 = 1.0MPa 1.0 The sonic range pressure to generate a flow rate of 25kg/h for orifice 3 (VCS21) is P1 approx. 0.68MPa for orifice 4 (VCS21) is P1 approx. 0.40MPa for orifice 5 (VCS21) is P1 approx. 0.29MPa The holding heat differs somewhat depending on the pressure P1, but at 25kg/h it is approximately 16000kcal

Series VCS

For saturated steam Viewing the graph [664] (183) Upstream pressure of valve P1 = 1.0MPa 1.0 The sonic range pressure to generate a flow rate of 25kg/h for orifice 3 (VCS21) is P1 approx. 0.68MPa for orifice 4 (VCS21) is P1 approx. 0.40MPa for orifice 5 (VCS21) is P1 approx. 0.29MPa The holding heat differs somewhat depending on the pressure P1, but at 25kg/h it is approximately 16000kcal

High Vacuum Angle Valve, XL Series

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).

XL

Item Classification pD(Torrcm) /D (Knudsen number) >0.5 <0.01 Viscous flow 0.5 to 0.015 0.01 to 0.3 Intermediate flow <0.015 >0.3 Molecular flow 8 Exhaust time (low/medium vacuum) 4 5 1 2 3 4 1 2 3 The time (gt) required to exhaust a chamber at low vacuum with volume V (l), from pressure P1 to P2, using a pump with pumping speed S (l/sec) is gt=2.3(V/S)log(P1/P2).

CEx-OMG0106

When P1 is blinking, use UP & DOWN key to reconfirm each and individual present value. When the input, value is blinking, press READ once to shift the operation back to P1. 48 11-2 Program Setting Input desired cylinder positions. 11-2-1 Input Method Turn the controller switching mode to PROGRAM. Note: Step 0 for every program is END. Program no 1 will start blinking.

SYJ3000/5000/7000

= 0.7 MPa, P2 = 0.5 MPa Effective area at supply side (mm2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Note 3) 5.1 1.9 PA 5.8 2.1 PB Note 3) 12.6 4.5 AEA 12.6 4.5 BEB 1-5-80

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Refer to p.1.12-52 for DIN raile model no. Note 2)Applicable to VQZ2000 and 3000.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

How to Calculate Flow (At an air temperature 20C) 1P1+0.1013<1.89(P2+0.1013) Q=226S P(P2+0.1013) Piping 2P1+0.10131.89(P2+0.1013) 1Completely flush (air blow) pipes before plumbing to remove dust. 2Clamping torgue: Q=113S(P1+0.1013) Q:Flow rate under standard conditions [ /min (ANR)] P1:Upstream pressure (MPa) P2:Downstream pressure(MPa) P:Pressure differential(P1-P2)(MPa) S:Effective area

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9

VCW

(P1 P2) : Upstream pressure (MPa) : Downstream pressure (MPa) : Effective area (mm) : Cv factor Q P P1 P2 S Cv 9 10 Series VCW Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: K1 (Supply: NC, Release: NC), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air Pressure

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: J1 (Supply: NC, Release: None), Pilot Valve: Standard (1W for DC), Power Supply Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: P1 (Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S.), Air Pressure

Main Body Shape: Unit, Additional Function: -, Ultimate Vacuum(kPa): -74, Air Consumption Flow Rate(l/min): 12, Vacuum Port Connecting Port Shape: One-Touch Couplings, Vacuum Port One-Touch Fitting Size: Ø4, Air Supply Port Connecting Shape: One-Touch Fitting Elbow, Air Supply Port One-Touch Fitting Size: Ø4, Application: Individual Item, Operating Pressure Range(MPa): 0.2～0.5, Operating

Nozzle Nominal Size: ø0.5, Solenoid Valve Combination: Supply: NC, Release: None, Pilot Valve: Standard (1W for DC), Power Supply Voltage: 24VDC, Electrical Entry: L Plug Connector w/0.3m Lead Wire, Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Suction Filter: None, Pressure Sensor Specs: Pressure Sensor, 0 to -101kPa, Accuracy ±2% F.S., Air Pressure Supply, P Port

Modular Type Filter Regulator Series AW

When the inlet pressure (P1) is shut off and released, the check valve w, opens and the pressure in the diaphragm chamber q is released into the inlet side (Figure 2). This lowers the pressure in the diaphragm chamber q, and the force generated by pressure regulator spring e lifts the diaphragm.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ1100-52 sets-Valve No. (Stations 1 to 2) VQ1200-54 sets-Valve No. (Stations 3 to 6) VQ1300-52 sets-Valve No. (Stations 7 to 8) VVQ1000-10A-11 set-Blank plate No.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70