Process Pump

(mm) Model A Size Applicable tubing size 4 5 118 PAF3410S-1S13 PAF3410S-1S19 10 x 8, 12 x 10, 3/8" x 1/4", 1/2" x 3/8" 115 12 x 10, 19 x 16, 1/2" x 3/8", 3/4" x 5/8" With nut (with LQ3 fittings): PAF3410S-3S13 11 (40) 121 63 (Option) Foot 610 Process Pump Automatically Operated Type/Air Operated Type PAF Series Dimensions: Air Operated Type (PAF3000 Series) Female thread: PAF341303 N03 F03

2

) Note 11) Note 11) Note 11) Note 11) Note 11) 6C Nylon bowl with bowl guard Note 12) Note 12) Note 12) Note 12) Note 12) Note 12) 221 Air Combination Series AC20-B to AC60-B Modular F.R.L.

IR1000/2000/3000

11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Table of Contents

(inch) Model N L1 L2 Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 26 61.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

KJ

(inch) Model N L1 L2 Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 26 61.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Speed Controller with Indicator

, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Air Fittings & Tubing

N L1 L2 Port B Min. port size Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 18 29.5 19.5 27 12 16 18.5 6 10.6 5 32 5 16 10 86 6 77.8 10 104 6 85 10 115 26 61.5 30 48 19.5 31.5 21.5 30.5 13 17 21 7 13.2 10 1 4 3 8 40 73.5 41 52.8 23.7 37.7 25 35.9 15 18.5 22 9.5 15.2 12.7 5 16 1 2 57 83 KM12 H (Hex.

Pulse Valve

JSXFA(E, F, H)-10-BJSXF-10B-KT JSXFA(E, F, H)-10-B-A JSXF-10B-A-KT JSXFA(E, F)-14-BJSXF-14B-KT JSXF-14B-KT2 AN30-03 (14R, 14F), AN30-N03 (14N) Disassembly/Assembly Procedure Caution Port size: 06, 10 Port size: 14 1.

Vacuum Unit

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

F

-6 19.5 5/16 10 86 10 18 29.5 27 10.6 61.5 12 16 18.5 5/32 6 30 KM11-03-09-10 21.5 3/8 6 77.8 10 19.5 31.5 30.5 13.3 48 13 17 21 1/4 7 32 KM11-07-11-6 21.5 10 13.3 3/8 104 10 19.5 31.5 30.5 73.5 13 17 21 1/4 7 44 KM11-07-11-10 25 1/2 6 85 12.8 24 37.7 35.9 15.2 52.8 15 18.5 22 5/16 9.5 44 KM11-09-13-6 25 1/2 10 115 12.8 24 37.7 35.9 15.2 83 15 18.5 22 5/16 9.5 62 KM11-09-13-10 MORE DIMENSIONS

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

5 Port Solenoid Valve Series SY3000/5000/7000/9000

14 KQ2P-01 16 31.5 5 KQ2P-03 16 32 6 KQ2P-07 18 35 8.5 KQ2P-09 20.5 39 10 KQ2P-11 22 43 11.5 Fill in with an appropriate no. listed on the table of DIN rail dimensions shown below.

reduces flow setting time

, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002FS TMH-01J TMH-03J TMH-07J AS2002FS AS2052FS TMH-07 TMH-09 AS3002FS TMH-10 AS4002FS TMH-13 Tubing size Applicable model Dimensions D2 through Part no.

LEC-OM02704CN

PA12 P A 11 PA12 P A 11 PA12 15 46 15 1.

SX

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

TABLE OF CONTENTS

LEAD EGRESS .11 (2.8) DIA. WIRE LEAD EGRESS .11 (2.8) DIA. WIRE 1.31 (33.3) 1.31 (33.3) R.18 (4.6) TYP . R.15 (3.8) TYP . R.18 (4.6) TYP . R.15 (3.8) TYP . .66 (16.8) .66 (16.8) .15 (3.7) DIA. THRU (2) PLACES .15 (3.7) DIA. THRU (2) PLACES Mtg. HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.