Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Cylinder port Symbol Port size Symbol Port size C3 C4 C6 M5 CM Note 1) L3 L4 L6 L5 B3 B4 B6 B5 LM Note 1) With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow M5 thread Bottom ported elbow with 3.2 One-touch fitting Bottom ported elbow with 4 One-touch fitting Bottom ported elbow with 6 One-touch fitting Bottom

SZ3000

Elbow fitting assembly (Downward) B4: 4 elbow fitting assembly B6: 6 elbow fitting assembly 5 (EA) 1 (P) 3 (EB) 4 position dual 3 port valve: N.C./N.C. A 4 Back pressure check valve (A) 4 (B) 2 Nil K None A 2 B SOL.b SOL.a 3 (R) 5 (R) Built-in The built-in back pressure check valve type has an effective area approximately 20% smaller.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

External pilot Nil R Internal pilot Elbow fitting assembly (downward) B4: 4 elbow fitting assembly B6: 6 elbow fitting assembly 5 (EA) 1 (P) 3 (EB) The 4 position dual 3 port valve is not available with external pilot specifications. 4 position dual 3 port valve: N.C./N.C.

LA-OMT0056

A5 A5 A6 A6 A7 A7 Internal Internal A8 A8 resistance resistance 10[k ] 10[k ] 24 VDC 24 VDC A9 A9 Main circuit Main circuit power supply power supply for the input for the input A10 A10 signals signals B1 B1 B2 B2 B3 B3 B4 B4 B5 B5 Maximum output Maximum output B6 B6 current: 10 mA current: 10 mA B7 B7 Pulse input internal circuit Note2) B8 Pulse input internal circuit Note2) B8 Pulse input

ZCUK

Symbol 2 to 8 10 to 16 40, 50 20 to 32 U C D B Flat Flat with ribs Deep Bellows B4 M4 x 0.7 Symbol Applicable cylinder model Female thread M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Application: Refer to Table (1). Nil ZC(D)UK 16/32 M10 x 1.25 B10 Note) -X11 Pad: 2 to 8 diameter and flat style only available.

Table of Contents

VVQ1000-N4-Station (1 to Max. stations) Name plate [-N4] AN103-X233 Silencer (For EXH port)

Series VQ Metal Seal/Rubber Seal Body Ported

For SUP passage block VQ0 4 ---P 1 2 0 1 VQ0 4 ---R 1 2 0 1 VQ0 4 ---PR 1 2 0 1 For EXH passage block For SUP/EXH passage block Name plate [-N4] VVQ0-N4-Station (1 to Max. stations) When ordering assemblies incorporated with a manifold, suffix N to the manifold No. It is a transparent resin plate for placing a label that indicates solenoid valve function, etc.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n4

PSE530/200

the set value Decreases the set value Switch output 1 & 2 CH 1 2 3 4 For normally closed PRESSURE OFF IF SET P1 P2 P3 P4 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Data SET (For CH1) Hysteresis Hysteresis OUT2 setting (1)/CH1 only Manual mode ON Switch output 1 & 2 For normally open Displays alternately MPa OFF kPa n1 n2 n3 n4

PSE200

Hysteresis OUT2 CH 1 2 3 4 ON PRESSURE Switch output 1 & 2 CH1 CH2 CH3 CH4 SET OFF P2 P4 P1 P3 High pressure: Compound pressure type Positive pressure type High vacuum: Vacuum type SET Hysteresis OUT1 setting (1) Manual mode For normally open Displays alternately ON MPa Switch output 1 & 2 kPa OFF OUT1 OUT2 CH Increases the set value Decreases the set value 1 2 3 4 n2 n4

Table of Contents

the set value Decreases the set value Switch output 1 & 2 CH 1 2 3 4 For normally closed PRESSURE OFF IF SET P1 P2 P3 P4 High pressure:Compound pressure type Positive pressure type High vacuum: Vacuum type SET Data SET (For CH1) Hysteresis Hysteresis OUT2 setting (1)/CH1 only Manual mode ON Switch output 1 & 2 For normally open Displays alternately MPa OFF kPa n1 n2 n3 n4

0.4

(Except double wiring) With name plate External pilot Direct EXH outlet with built-in silencer C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread

VQC

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow Wtih 3.2 One-touch fitting Top ported elbow With 4 One-touch fitting Top ported elbow With 6 One-touch fitting M5 thread Bottom ported elbow With 3.2 One-touch fitting Bottom ported elbow With 4

Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) L5 B3 Nil PNP (+) or without SI unit/input block (SD0) NPN () N B4 Input block type (Fill out for I/O unit only) B6 B5 LM Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) 1 2 3 Ports 2, 4 size (inch) Ports 2, 4 Symbol N1 N3 N7 NM Ports 1, 3, 5 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting Mixed Top ported elbow 1

5 Port Solenoid Valve, Series VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil Without SI unit/input block (SD0) Without input block With 1 input block Nil DeviceNet PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate

Series VQ Base Mounted Metal Seal/Rubber Seal

2 sets of regulator unit 3 sets of regulator unit With vacuum ejector unit B D G1 G2 G3 J K N R S (2) Series VQ1000 1 (3) Kit Manifold (3) (3) Plug-in unit 1 (4) Stations (5) Special wiring specification (Not double wiring) With name plate External pilot Built-in silencer (Direct exhaust) Cylinder ports 01 1 station Symbol Port size Symbol Port size C3 C4 C6 M5 CM L3 L4 (6) L6 L5 B3 B4

VQC

Bottom ported elbow With 4 One-touch fitting B4 Bottom ported elbow With 6 One-touch fitting B6 r SI unit COM t Input block (Fill out for I/O unit only) B5 LM M5 thread Elbow port, mixed sizes EX500 EX250 DeviceNet SI unit COM Nil DeviceNet Nil Without SI unit/input block (SD0) Without input block With 1 input block PROFIBUS-DP PROFIBUS-DP Remote I/O 0 1 +COM COM N Note 1) Indicate

Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 11 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: B4 (ø4 One-touch Fitting), Downward Elbow

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 16 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: B4 (ø4 One-touch Fitting, Downward Elbow)

Adapter Material: Brass, Standard, Vacuum Inlet Direction: T (Vertical), Pad Diameter: ø8, Pad Styles: B (Bellows), Material: S (Silicon Rubber), Vacuum Entry: B4 (Female Thread M4X0.7)