Smooth Cylinder/Low Speed Cylinder

Installed state New Shortened installation width Reduced width for short pitch mounting (mm) Compact foot type width A (mm) New New Existing foot type width B (mm) Bore size (mm) 1 unit 2 units 3 units 12 16 20 25 32 40 50 63 80 100 19 38 57 25 44 19 38 57 29 48 26 52 78 36 62 26 52 78 40 66 26 52 78 45 71 Existing model 26 52 78 52 78 31 62 93 64 95 36 72 108 77 113 42 84 126 98 140 45 90

V100

VS3135 A01-01 A01-02 A07-52 q Description Electrical entry VS3145 Solenoid cover Body 100 VAC 200 VAC Grommet A12-01 A12-02 A08-52 w e Spool/Sleeve 24 VDC A01-01-63 A01-02-63 A07-52-63 100 VAC 200 VAC Conduit terminal 24 VDC A12-01-63 A12-02-63 A08-52-63 Replacement Parts Material Part no. VS3135 XT019-6 XT013-13-2 XT010-15 Description VS3145 No.

5

01 03 50 12 Part no.

Air Fittings & Tubing

D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1

CQ2

A type mounting bracket part No.YA-03 Joint YU-03 Joint Part No. Applicable mounting bracket Bore size (mm) Weight (g) Joint part No. B bracket A bracket YB-03 YU-03 YA-03 32, 40 25 YB-05 YU-05 YA-05 50, 63 40 Bore size (mm) YB-08 YU-08 YA-08 80 90 Part No.

SY

(Cv = 2.1) Series CS1 SGP3/8 x 1m AS420-03 (Cv = 4.11) AN400-04 (Cv = 5) Base mounted type SY7140 -03 (Cv = 1.2) Series MB/CA1 Series CS1 SGP3/8 x 1m AS420-03 (Cv = 4.11) AN300-03 (Cv = 3.67) SY9140 -04 (Cv = 2.8) Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer Steel tube size x Length Speed controller Silencer SGP1/2 x 1m AS420-04 (Cv

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

Table of Contents

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

ZSE30/ISE30

Lead wire with connector ZS-27-A Bracket ZS-27-B Panel mount adapter ZS-27-C 1 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Specifications ISE30 0 to 1MPa 0.1 to 1MPa 1.5MPa 0.001MPa Air, Inert gas, Non-flammable gas ZSE30 100 to 100kPa 101 to 101kPa 500kPa 0.2kPa Rated pressure range Regulating pressure range Proof pressure Setting/Display resolution Fluid

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

L SY3000-52-6A Dimensions SY5000-52-4A Applicable fittings size d 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" Model A L D 16 18 20.5 22 24 16 18 20.5 22 SY7000-70-2A 10-KQ2P-04 10-KQ2P-06 10-KQ2P-08 10-KQ2P-10 10-KQ2P-12 10-KQ2P-03 10-KQ2P-07 10-KQ2P-09 10-KQ2P-11 6 8 10 12 14 6 8.5 10 11.5 32 35 39 43 45.5 32 35 39 43 EXH block disk By installing an EXH block disk in the exhaust passage of a manifold

Table of Contents

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

Table of Contents

-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S(-F20) ASQ530F-02-10S(-F20) ASQ530F-02-12S(-F20) ASQ530F-03-06S(-F20) ASQ530F-03-08S(-F20) ASQ530F-03-10S(-F20) ASQ530F-03-12S(-F20) ASQ630F

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

Hydraulic

(mm) With rod boot Bore size (mm) Stroke range (mm) l e f B C F GA GB J M NA NB P R S T Q B-rod C-rod B-rod C-rod 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 21.5 15 52 25 to 1400 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 12 15 52 52 25 to 1400 1/3.5 stroke 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 15 15 52 55 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Free Mount Cylinder

67 62 52 57 52 47 57 52 47 42 42 9 8 10 80 65 55 80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard type. 44 46 Related Products

VQ4000

or less 7.0 1.9 52 or less 6.4 0.42 1.9 VQ4000 Rc 3/8 0 5 VQ44 0 Metal seal 0.18 45 or less 47 or less 6.2 1.5 47 or less 6.9 0.17 1.7 Exhaust center 0.28 (0.34) 0 5 VQ44 1 Rubber seal 0.38 50 or less 52 or less 7.0 1.9 52 or less 7.3 0.38 2.0 0 5 VQ45 0 Metal seal 0.18 45 or less 47 or less 6.2 1.6 47 or less 6.4 0.18 1.6 Pressure center 0.28 (0.34) 0 5 VQ45 1 Rubber seal 0.38 50 or less

PFA/PFW

DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1

42

52 VQ4000 3/8 Exhaust center Metal seal VQ440 5 0 6.2 0.18 1.5 6.9 0.17 1.7 45 47 47 0.28 (0.34) Rubber seal VQ440 5 1 7.0 0.38 1.9 7.3 0.38 2.0 50 52 52 3-position Pressure center Metal seal VQ450 5 0 6.2 0.18 1.6 6.4 0.18 1.6 45 47 47 0.28 (0.34) Rubber seal VQ450 5 1 7.0 0.38 1.9 7.1 0.38 2.0 50 52 52 Double check Metal seal VQ460 5 0 2.7 3.7 55 57 57 0.50 (0.56) Rubber seal VQ460