F

T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T

Table of Contents

W D 1.6 x P 0.1 x W + W D 5.0 x P 20Data W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-64.)

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Series SV

M12 52 l M12 M12 48 6 6 32.3 28.3 16 M12 31.3 31.3 l 14.9 Terminal no.

0.4

unit S kit P kit F kit L kit !

Rubber seal 5 Port Solenoid Valve Series SYJ5000

length) 87.2 [91.6] With interface regulator 107.5 [109.7] (Light/surge voltage suppressor) 69.6 [76.6] 45 50.1 [57.1] + 54.2 34.7 31.5 6 8.5 21.5 6 43.9 32 24 15 17 17 1/8 (P, R port) 45.5 L plug connector (L): SYJ5240-L-01 M plug connector (M): SYJ5240-M-01 DIN terminal (D): SYJ5240-D-01 M8 connector (W0): SYJ5240-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

Series KP/KPQ/KPG

Male Branch "Y": KPU Effective area mm Note 1) D Model L TPH TPS A H (width across flats) P Connection threads R Weight g Applicable tubing O.D. mm 2-Applicable tubing P M D KPU04-01 KPU04-02 KPU06-01 KPU06-02 KPU08-01 KPU08-02 KPU10-02 KPU10-03 KPU12-03 KPU12-04 7 8 9 10 15 17 23 25 29 30 41.5 43.5 45.5 46.5 52.5 55.5 59 61.5 63.5 65.5 12 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 45.4 49.4

CLA

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire

Modular Type Filter Regulator Series AW

Construction AW20K to 40K A-A i A w t SMC K P q C U O S L H o t OUT (Outlet pressure) IN (Inlet pressure) A Parts list y Material AW20K AW30K AW40K AW40K-06 Description No. Note e Zinc die-cast Aluminum die-cast Platinum silver 1 2 Body r Bonnet Black Polyacetal u Parts no. AW20K Description Material No.

V

Series VT Not Available In The USA BACKGROUND Many current pneumatic solenoid valves are a c t u a l l y o f s o l e n o i d p i l o t c o n s t r u c t i o n . T h e s o l e n o i d d o e s n o t o p e r a t e d i r e c t l y u p o n t h e s p o o l o r p o p p e t w i t h i n t h e v a l v e . W h a t t h e solenoid does is open a very small pilot valve.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Orifice symbol (diameter) Solenoid valve (Port size) DC 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6mm) VX21 VX22 VX23 Model Class H 01 ( ) 02 ( ) 1 8 Rated voltage S L Z 1 4 02 ( ) 03 ( ) 02 ( ) 03 ( ) Port no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

IIIIIII

Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.

HRX-OM-W002

9.6 Pump capacity 9-15 HRX-OM-W002 Chapter 9 Documents 9.6.5 HRR012/018/024/030-A/W-20-T1 Fig 9-18 Pump capacity(HRR012/018/024/030-A/W-20-T1) 9.6 Pump capacity HRR Series 9-16 HRX-OM-W002 Chapter 9 Documents 9.7 Required facility water flow (for water-cooled type) 30 HRR030-W-20 HRR024-W-20 Facility water flow rate [L/min] 25 HRR018-W-10/20 20 HRR012-W-10/20 15 10 5 0 0 10 20 30 40 50 Facility

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

VS 8-2/VS 8-4

Terminal block box (Terminal block) Terminal block box P.3, 17 P.3, 17 T kit IP65 compliant IP65 compliant IP65 compliant Electrical entry IP65 enclosure with use of multiple wire cable with sheath and waterproof connector Lead wire P.3, 19 P.3, 19 L kit 25-core cable 26 pins Circular connector Circular connector IP65 enclosure with use of waterproof circular connector P.3, 21 P.3, 21 M kit