Vacuum System Peripherals:

Light/Surge voltage suppressor DC: 0.45 W (With indicator light: 0.5 W) AC DC: 1 W (With indicator light: 1.05 W) Pilot valve specifications Nil Nil Individual specifications Common specifications Z With surge voltage suppressor S Y With light/surge voltage suppressor Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Pneumatic Positioner IP300/IP3100

'1l8 NPT G43-P10-N01 or KSl OB-AD1 1 (St.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

SMC Electronic Switch Series Variations

ZSM 18 NPN Open Collector 1 output w/ analog output, 3 revolution adjustment Lead wire length PFl 0.6m 19 NPN Open Collector 1 output w/ analog output, 200 revolution adjustment 3m 30 IFl 55 PNP Open Collector 1 output w/o analog output, 200 revolution adjustment 5m 50 ZSE1/ISE1 Specifications ZSE1 101kPa to 0 ISE1L 0 to 100kPa ISE1 0 to 1MPa Model Operating pressure range 200kPa 1MPa Max

AS-FG/ASD-FG

-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 14.3 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 27.5 11.6 6 5/32" R(PT) 1/8 14.3 14.2 31.1 36.1 12 32.1 27.1 17 NPT 1/8 12.7 23.1 30.2 AS221FG-01-08 AS221FG-N01-05 19 18.5 25.3 32.4 15.2 8 3/16" 11.4 36.1 31.1 32.1 27.1 16.5 14.2 23.9 31 15 AS221FG-01-10 AS221FG-N01-07 21 21 33.1 40.2 18.5 10 13.2 1/4" 18.5 19 15 25.3 32.4 AS221FG-02-04 AS221FG-N01

Process Pump

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-S Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-S (Union elbow) 1 LQ1U22-S (Union) 1 LQ1E21-S Union elbow Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

NCX2 seies

D-F7BV D-F7BAL, D-J79W D.A72,D-A72H B i r w n l 8 t u w n (Black) D.F7PW D-E80A D-E73A (Black) o Reed swil.h Beed swltch o e Brue :Ei*" lblack) ked) D.A76H. D-E75A (+) E | 'FesisLort Black ;fi-+4--lrl" (-) o Series NCX2 6.14 10.14 Aub sr.

Series AS-FM/AS-M/ASD-FM

Max. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 12.7 9.6 22.1 12.3 17.3 8 7 30.1 25.1 28.8 33.8 10-32UNF 16.5 13.5 26.1

PSxx-OMM0006CN

R1/8 (M5 ) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n

Air Cylinder NCX2 Series Slide Unit

D-F7BV D-F7BAL, D-J79W D.A72,D-A72H B i r w n l 8 t u w n (Black) D.F7PW D-E80A D-E73A (Black) o Reed swil.h o e Beed swltch Brue :Ei*" lblack) ked) D.A76H. D-E75A (+) E | 'FesisLort Black ;fi-+4--lrl" (-) o Series NCX2 6.14 10.14 Aub sr.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

-01SD AS221F-01-04SD 1/8" 8.4 27.5 20.4 4 9.3 20 5/32" 9.3 20.4 27.5 12.7 21 13.4 AS221F-N01-03SD AS221F-01-06SD R 1/8 12 14.2 7.2 1.2 31.6 13.5 6 11.6 34.7 21 AS221F-N01-05SD AS221F-01-08SD NPT 1/8 12.7 14.2 7.2 1.2 31.6 3/16" 13.2 24 31.1 16.5 32.4 18.5 25.3 8 15.2 23 13.4 34.7 AS221F-N01-07SD AS221F-01-10SD 1/4" 13.2 23.9 31 17 21 10 18.5 44.5 35.3 25 23 15.3 AS221F-N01-09SD AS221F-02-

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01SD 1/8" 8.4 4 9.3 27.5 20.4 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-01-06SD AS221F-N01-03SD 6 11.6 13.5 35.6 R 1/8 14.2 7.2 1.2 31.6 12 3/16" 11.4 23.1 30.2 14.3 16.5 AS221F-01-08SD AS221F-N01-05SD NPT 1/8 12.7 14.2 7.2 35.6 1.2 31.6 8 15.2 18.5 32.4 25.3 AS221F-01-10SD AS221F-N01-07SD 1/4" 13.2 23.9 31 18.5 10 18.5 21 40.2 15 33.1 AS221F-02-04SD AS221F-N01-09SD 5/16" 15.2 25.3 32.4 21 15

ZL3-OM00801

2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *3 20 [m/s 2] *4 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 21 No.ZL3-OM00801-A 9.2 / ZL3-JSY3140 *1 [ms](0.5MPa 27 [Hz] 5 [DCV] 24 10 [W] 0.4 *1 JIS B 8419:2010 20 9.3 9.4 GZ33

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

-01ST 1/8" 8.4 20.4 27.5 4 9.3 12.7 5/32" 9.3 20.4 27.5 13.4 21 AS221F-01-06ST AS221F-N01-03ST 34.7 R1/8 12 14.2 7 1.5 31.6 13.5 6 11.6 21 13.4 34.7 AS221F-01-08ST AS221F-N01-05ST 16.5 NPT1/8 12.7 14.2 7 1.5 31.6 3/16" 13.2 24 31.1 18.5 25.3 32.4 8 15.2 23 23 AS221F-01-10ST AS221F-N01-07ST 15.3 17 1/4" 13.2 23.9 31 21 33.1 40.2 10 18.5 25 25 AS221F-02-04ST AS221F-N01-09ST 18.5 15.2 25.3 32.4

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)