CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion Air cushion type is not available for 21-/22-CJ2.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Keyway dimensions l b Model Port size Rc A B C F H J K S U W BA BB CA CB SA SB SC SD SE DD (h9) D (g6) CDRA1BS50 CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x

ZP

44 50 60 11 14.5 20.5 13.8 15.1 17.5 26.5 29 33 44 50 60 11 14.5 20.5 14.0 15.3 17.7 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Keyway dimensions l b Model Port size Rc A B C F H J K S U W BA BB CA CB SA SB SC SD SE DD (h9) D (g6) CDRA1BS50 CDRA1BS63 CDRA1BS80 CDRA1BS100 5 5 5 5 36 41 50 60 2.5 2.5 3 4 25 30 35 40 8.5 10 12 12.5 25 30 40 45 15 17 20 25 8.5 10 12 12.5 34 34 34 34 46 57 70 85 17 20 23.5 25 33 33 33 33 14 21 29 39 62 76 92 112 48 60 72 85 M8 x 1.25 depth 8 M10 x 1.5 depth 12 M12 x 1.75 depth 13 M12 x

CY1

CY1HT25-PS CY1HT32-PS Above Nos. 28, 29, 30, 31, 32, 33 Seal kits are sets consisting of items 28 through 33, and can be ordered using the order number for each bore size. 52 Series CY1H Magnetic Rodless Cylinder High Precision Guide Type Dimensions Single axis type/10 CY1H10 4-M4 x 0.7 thread depth 6 46 39.5 23 1 CY1H10-B Guide central axis 15 1.3 46 Piping port surface 95 + Stroke 54 2-

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Type SS5YJ3-20,SS5YJ3-21P The 3 way valve can be used on the 4 way manifold by simply sealing off the unused "R" port with plug VJ3000-33-1.

Speed Controller with Indicator

Connection thread size Wrench tightening angle after hand-tightening [deg] Proper tightening torque [Nm] G1/8 10 to 20 3 to 4 G1/4 15 to 35 4 to 5 G3/8 15 to 35 8 to 9 G1/2 15 to 35 14 to 15 33 Series AS-FS Specific Product Precautions 3 Be sure to read this before handling. Refer to the back cover for Safety Instructions.

Stability of suction position,

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Fluoropolymer Piping Equipment

5.8 LQ1T4A-R8 1/4" 1/4" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R10 1/4" 1/2" 1/4" 6 15 24 15 9 18 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T4A-R17 1/4" 3/8" 1/2" 7 20 20 29 14 28 17 17 26 44 44 54 23 23 39 3.6 LQ1T4A-R20 3/8" 1/4" 1/2" 6 24 24 9 18 21 21 43 38.5 43 28 28 3.6 LQ1T4A-R33 1/8" 1/2" 1/8" 15 24 15 14 21 14 33 43 33 16.5 28 16.5 1.8 LQ1T5A-R2 3/4" 3/8" 3/4" 7

HEC-OM-S008

31 0D 02 31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02

7ND9071en

6.4 Diaphragms.33 6.5 Communication board.33 7 ERROR MESSAGES.34 7.1 Failsafe errors.34 7.2 Alarms.34 7.3 Errors.34 7.4 Warnings .35 7.5 Notifications.36 8 TROUBLE SHOOTING.36 9 ND9000 WITH LIMIT SWITCHES.37 9.1 Introduction .37 9.2 Installation on a valve controller .40 9.3 Electrical connections.41 9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41

CG5-S

+ Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18 18 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis type (D)/CJ5DS CDH9 +0.030 0 Cdd9 0.030 0.060 NB GA Piping port 2-M5 x 0.8 Clevis pin ( ) GB MM CA CB D NA A CX +

One-touch Fittings Series KQ2

P. 29 P. 33-34 22 Series KQ2 One-touch Fittings Male connector: KQ2H Inch M Min. hole dia. Applicable tube O.D. (inch) Thread UNF NPT H (Hex.) Weight (g) D Part No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Instantaneous flow: L/min cfm Accumulated flow: L ft3 L3 IO-Link/ NPN/PNP Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F L4 IO-Link/ NPN/PNP Analog 4 to 20 mA + ZS-33-D *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Applicable solenoid valve SYJ314, SYJ314M SYJ324, SYJ324M VQD Plug (VJ3000-33-1) Plug (VJ3000-33-1) Seal the unused "R" port at the end of the manifold. Seal the unused "R" port at the end of the manifold. VZS VFS VS eSS5YJ3-41, -S41 The 3 port valve can be used on the 4 port manifold by simply sealing off the unused "R" port with plug VJ3000-33-1.

ZR

Individual spacer (ZR1-R1-2) PV V X X PD X X 110.5 105.5 X PV V 70.5 SMC 16.5 X PD 12 V V 35.5 (Pitch) 33 (Pitch) 33 35.5 PV PD EXH PS Rc 1/8 V port Vacuum port 13-3-33 33 Large Size Vacuum Module: Vacuum Pump System Series ZR How to Order Combination of vacuum switch valve and release valve Refer to Table (1).

CJ5-S

hole NB A FX FZ NA F FT BB 0 0.3 S + Stroke Z + Stroke H A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030

Cylinder with Lock

Note 32 Tie-rod Carbon steel 4 Zinc chromated 33 Tie-rod nut Rolled steel 8 Zinc chromated 34 Flat washer Steel 8 80, 100 35 Bumper A Urethane 1 36 Bumper B Urethane 1 37 Wear ring B Resin 1 38 Rod end nut Carbon steel 1 Zinc chromated 39 Magnet (1) 40 Rod seal B NBR 1 41 Piston seal B NBR 1 42 Cushion seal A Urethane 1 43 Cushion seal B Urethane 1 44 Cushion valve seal NBR 2 45 Cylinder

CJ5-S

S Rod cover side GB F NN MM GA Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 0 0.3 CEP1 BA CB D CE1 LH LB LY CE2 With head cover port in axial location (R) 0 0.3 LT BB NB A ML2B NA X Y LX LZ S + Stroke Z + Stroke H C J G5-S CV 2-LC Mounting hole MVGQ CC Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33