Fluoropolymer Piping Equipment

B E E F G H L1 L1 L2 L2 M Min. port size LQ3T2A-SB 1/4" 4 17 16 6 12 16 34.5 33.5 39.5 38.5 20 3.9 LQ3T3A-SB 3/8" 5 22.5 19.5 9 18 21 47.5 44.5 49.5 46.5 25 6.3 LQ3T4A-SB 1/2" 6 24.5 22.5 10 20 24 52.5 50.5 54.5 52.5 29 9.5 LQ3T5A-SB 3/4" 7 26.5 24 14 28 32 64 61.5 66 63.5 37 15.8 LQ3T6A-SB 1" 8 30 26 18 36 41 78 74 80 76 49 22 930 A LQ3 Series Space Saving Run Tee How to Order LQ3 T S R

Air Cylinder CP Series Cylinder Positioner Assembly

I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)

JIS Standard Hydraulic Cylinder

207 0.2 0.18 0.13 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 71 212 18 M16 x 1.5 25 22 7 14 66 207 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 78 231 22.4 M20 x 1.5 30 27 9 19 73 226 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 95 257 28 M24 x 1.5 35 32 11 24 85 247 0.030 0.076 0.2 80 80 65 55 M39 x 1.5 60 57 45 15 41 113 295 35.5 M30 x 1.5 45 42 13 30 98 280 0.030 0.076 0.036

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

153 85 304 280 Rc 1/2 M14 x 2 depth 30 Bore size (mm) Rod end lock Head end lock Bore size (mm) Bore size (mm) For lock type For non-lock type Z X W HR HN Y R Y Q Q R 63 63 63 45 59 29 14 (16) 147 15 142 (154) 63 308 54 86 80 80 80 53.5 68 40 19 (23) 182 17 175 (189) 82 355 66 104 100 100 100 79 64.5 40 19 (23) 188 23 180 (194) 85 410 66 128 Note) ( ): Denotes the dimensions for long stroke

MGP

Dimensions (mm) Dimensions (mm) 1 in = 25.4 mm 1 in = 25.4 mm M5 x 0.8 Relief port (Vacuum port) FB B + Stroke 5 10 A + Stroke (mm) FB A B Bore size (mm) B + Stroke FB 50mm stroke or less 66 67.5 109 109 117.5 117.5 121 141 51mm stroke or more 97.5 99 114 114 129 129 148 166 A + Stroke 20 25 32 40 50 63 80 100 19 20 22 22 23 23 24 29 Other dimensions are identical to the standard type. 66

V100

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

Pin Clamp Cylinder Series CKQ/CLKQ

Adjustable from 0.5 to 2 mm 70 70 Shim Mounting tap: M10 x 1.5 Pin hole: 8H7 Mounting tap: M10 x 1.5 Pin hole: 8H7 66 66 One 1 mm and two 0.5 mm shims are attached.

High Vacuum Angle Valve, XL Series

G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S

KR

Applicable tubing 17 10 76 18.5 21 33.5 23.8 17 26.5 1 2 KGW10-04 65 66 145 68 78 22 1 4 3 8 KGW12-02 KGW12-03 57.5 59.5 62 63.5 17 12 20.9 22 47.7 37.7 17 28.5 1 2 KGW12-04 66 68.5 22 147 Reference dimensions after R thread installation.

XL

G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S

Air Cylinder

Applicable bore size TX Rod trunnion Head trunnion CD LX LZ Z + Stroke Z + Stroke CS2 CM-B020 20 32 36 108 8 66 82 CM-B032 25 40 40 112 9 74 90 32 114 CM-B040 40 53 44.5 143.5 10 87 103 CM2U/CM2T (Rod/Head trunnion) Note) A pivot bracket pin and retaining rings are not included with the pivot bracket.

ZP

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

ZP

(58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K HS Plug G G Q + Stroke HR CR Z + Stroke CY3R25/32/40 CY3R15/20 (mm) A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) 0.43[0.33] 0.32 10-SYJ3443 10-SYJ3543 0.42[0.33] 0.16[0.080] 37 55 36 53 41 63 10-SYJ3123 2 position 10-SYJ3223 5 port body ported 0.9 M3 x 0.5 M3 x 0.5 10-SYJ3323 3 position 58 56 66 10-SYJ3423 10-SYJ3523 37 55 36 53 41 63 10-SYJ3133 2 position 4 port base mounted (For manifold base only)Note 1) 10-SYJ3233 1/8 10-SYJ3 M5 x 0.8 3 position 58 56 66 10-SYJ3433 10-SYJ3533 Note 1) Dedicated

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

.: 8, 5/16" : 10, 3/8" G: Approx. 300 H: Approx. 600 100.1 [102.3] 77.9 (Lead wire length) 13.6 B A 101.8 [104] (For manifold mounting) 2 x 4.2 Manual override 19 42 (52) (66) (For mounting) 2 x 4.2 (Light/surge voltage suppressor) (5.5) 1.2 (5.5) 47.6 12.5 (42.5) (49.5) 16.1 47.6 31.5 [38.5] + 24.5 28 10-SY7120-02(-F2) G H Air Preparation Equipment Pressure Control Equipment Flow Control

4-channel Flow Monitor ( compatible)

(Refer to page 66)) (3) Change the set value with UP or DOWN button, and press the SET button to set the value. Then, the setting moves to setting of OUT2. (The snap shot function can be used. (Refer to page 66)) (4) Complete the OUT1 setting. [P_2] or [n_2] is displayed on the sub screen (left). Continue with setting the OUT2.

Air Fittings & Tubing

17 10 76 21 33.5 23.8 18.5 17 26.5 1 2 KQ2W10-04S 65 66 145 68 78 22 1 4 3 8 62 63.5 57.5 59.5 KQ2W12-02S KQ2W12-03S 17 12 22 47.7 37.7 20.9 17 28.5 1 2 KQ2W12-04S 66 68.5 22 147 101 105 3 8 1 2 71 (71) 76 80 KQ2W16-03S KQ2W16-04S 26.5 22 69.5 75 20.9 34 25 100 (84) 16 Reference dimensions after R(PT) thread installation.

SYJ3000/5000/7000

) 3 position 0.42 [0.33] 0.16 [0.080] SV 36 53 41 63 37 55 2 position SZ 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 SY 36 53 41 63 37 55 Note 1) 4 Port Base Mounted (For manifold base only) 2 position SYJ 1/8 M5 x 0.8 56 66 58 3 position SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

MXQ

66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 123 123 123 133 157 182 221 274 299 MXQ25L-10 MXQ25L-20 MXQ25L-30 MXQ25L-40