Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers Nil S 2 pcs. 1 pc. 22 Vacuum suction type Nominal size 10 15 20 30 Auto switch Without auto switch (without magnet) Nil Connecting

PSxx-OMF0005CN

kPa 2.0 64 5 m 100 kPa 0.05mm 0.05mm [s] [s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G ISA2-H 100 kPa 1.5 64 5 m 100 kPa 2.0 64 5 m [mm] [mm] [kPa] [kPa] -22No.PS-OMF0005CN-E ISA2 () 1 ON ( +)ON ()ON OFF Yes 2 No ( OFF +)ON 1 ()ON 3 ()ON 1,3 OFF 4 5 ON OFF 6 7 8 -23No.PS-OMF0005CN-E No.

Safety Instructions

Blue (100 VAC) 2 (, +) 2 Red (200 VAC) Indicator light Indicator light With indicator light With indicator light Red (+) DC Blue (100 VAC) Series VC (Class H coil) Red (100 VAC) Grommet, Conduit, Conduit terminal AC circuit For energy-saving circuit, there is the polarity. 1 DIN terminal Since internal connections are as shown below for the DIN terminal, make connections to the power supply

EX500-DX_e

EX500-DX B Install the product using 2 M5 screws x 20 mm minimum with a head 9 to 11. NOTE Refer to the product catalog or SMC website (URL http://www.smcworld.com) to obtain more detailed information about product specifications. 1 3 5 7 9 11 13 15 The direct current power supply to combine should be UL1310 Class 2 power supply when conformity to UL is necessary.

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) A 9 13 11 13.5 B 6 8.5 11.5 14.5 A 9.5 13.5 11.5 14 B 6.5 9 12 15 A 6.5 10.5 8.5 11 B 3.5 6 9 12 C 8 12 10 12.5 D 5 7.5 10.5 13.5 C 12 16 14 16.5 D 9 11.5 14.5 17.5 C 11 15 13 15.5 D 8 10.5 13.5 16.5 32

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F

MHT2

DRail mounting Direct mounting 20D-A7H/A80H D-A73C/A80C D-F7BAL/F7BAVL D-F7/J79 D-F7V/J79C D-F7W/F79F D-F7WV D-J79W D-M9 D-M9V D-F9W D-F9WV D-F9BA D-A7/A80 D-A79W D-A9 D-A9V Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 3.5 6 9 12 A 6.5 10.5 8.5 11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 40 22 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 61.5 30 48 32 10 19.5 31.5 21.5 30.5 13.2 13 17 21 7 1 4 3 8 73.5 44 52.8 44 12.7 23.7 37.7 25 35.9 15.2 15 18.5 22 9.5 5 16 1 2 83 62 Metric Applicable

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

Magnet Gripper Unit for Collaborative Robots

Polyurethane tube for piping 4 (TU0425BU-100) 2m Conversion cable 1pc. 4 - 2.

Series SY100 3 Port Solenoid Valve Rubber Seal

3 Port Solenoid Valve Rubber Seal Series SY100 Low power consumption: 0.5W (Standard, Without light) (Current draw: 21mA at 24V DC) SY Body width: 10mm Cv0.008 (Standard style) Cv0.012 (Large flow capacity style) SYJ Large flow capacity style:0.75W (Current draw: 31mA at 24V DC) VK VZ VT Exceedingly long life VT 100 million cycles (By SMC life test data) VP VG VP VQ VQZ VZ Vacuum Applications

฀AS

Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.

IDUS/IDFS

Use an air compressor of 100 l/min or greater air delivery. Since the auto-drain is designed in such a way that the valve remains open unless the air pressure rises to 0.15MPa or higher, air will blow out from the drain discharge port when the air compressor starts up until the pressure increases.

PFxx-OMO0007CN

-2No.PF-OMO0007CN 1 1.5 3) 3) 1 1 () -3No.PF-OMO0007CN () () -4No.PF-OMO0007CN () * (100 ) :050 -5No.PF-OMO0007CN * (15 / ) FG 49 N () IN IN OUT OUT () IN () -6No.PF-OMO0007CN *) 6 33 2 () () 10 m DC(-)() () -7No.PF-OMO0007CN * ( ) () CE 050 -8No.PF-OMO0007CN * ON , 10 /23 3 OFF (19 ) * OUT -9No.PF-OMO0007CN (11 ) SI L/min L (11 ) 1/8 1/4 3/8 1/2 -10No.PF-OMO0007CN N

3-Position Rotary Table

The following graphs show the displacement at point A, which is 100 mm apart from the center of rotation, where the load is applied.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

5 Port Solenoid Valve Series SQ1000/2000

2.9 (0.16) SQ1530 20 or less 100 Metal seal 26 or less Dust proof Pressure Enclosure center 3.2 (0.18) SQ1531 25 or less 100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

PSxx-OMH0002CN

(Full span Full-scale) O PLC DC1224[V] ON-OFF 1 NPN OFF PLC PLC 2 NPN ON PLC PLC ON-OFF ON-OFF NPN PNP 1 NPN OFF ON-OFF PLC DC1224[V] 2 NPN ON R R.D. 1.0005R.D. 1.0005 = 0.05 0.8005R.D. 0.8005 = 0.04 S SUS ON-OFF ON OFF ON-OFF 25[]0 50[]-550[] )3.0[F.S.]25[] 100[kPa] F.S.=100-0=100[kPa] 3.0F.S.=1000.03=3[kPa] 050[] 3[kPa] -10No.PS-OMH0002CN-D () () 25[]ON-OFF )100