VCA

C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33 39.5 26 31 35 43 23.5 27 39.5 43.5 57.5 65.5 35 41 26.5 29 41.5 48 50 55 VV2CA3 VV2CA4 8 Series VCA Manifold Exploded View Series VCA20 Description No. 1 2 3 4 Part no.

VCA

A G H 1 VDW Q = 300 S VQ U V (Y) (X) VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 = 280 25 VXA U side D side Stations 1 2 3 4 5 n VN LVC LVA For manual override J2 LVH W T R N Z M LVD Manual override 16 LVQ 1 1 LQ L 2 2 2 2 LVN n-3/8, 1/2 (VCA30) n-1

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

ZCUK

F9BWV 2-wire Relay, PLC IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

AC

Unit Series AC 21 to 41 How To Order V D AC 31 B N 03 8 -X2217 Z Y Air Combination Unit With External Epoxy Coating, Stainless Fasteners Body Size Symbol 21 31 41 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Regulator Handle Orientation Symbol Nil Y Description Downward Handle Upward Handle Model Combination Symbol Nil A B Bowl Description Metal Bowl Metal Bowl with Sight

Series AC Epoxy Coated F.R.L.

Unit Series AC 21 to 41 How To Order V D AC 31 B N 03 8 -X2217 Z Y Air Combination Unit With External Epoxy Coating, Stainless Fasteners Body Size Symbol 21 31 41 Name Plate, Caution Plate On Bowl in psi, F Size 1/8 3/8 1/2 Regulator Handle Orientation Symbol Nil Y Description Downward Handle Upward Handle Model Combination Symbol Nil A B Bowl Description Metal Bowl Metal Bowl with Sight

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V1 (Mounting Position: V + AF + AR*K), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator),

ZSP1

1 Adsorption Confirmation Switch Series ZSP1 ZSE ISE PSE For General Pneumatics Z I SE3 PS Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data Can be integrated with ZX ejector system.

AC Servo Motor Driver (SSCNET Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

MRQB-OM0002

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 1 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 2 , 2 2 2 2 3 , , ,, 4 , , , , , , , , , , , , 5m [] ,, , , , , , , , 5 ,, , , , , , , , , , , , , , 6 , 2 ,40mm, ON ON ON ON , ,: 1000 (ms) (mm) V(mm/s) = <> ,,(ON ) ,5m , ,30m, , <> ,100m <> (D-A96A96V ) ,,( ) [n ,n ] ,, ,, ,D-A90,A90V

SMC Pneumatic Clean Series

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

Air Fittings & Tubing

D1 Port B min. port size Weight (g) a b H (Hex.)

VNH

Main port 2 Port 2-Rc 2-Rc Pilot port A B C D E F G H I 3 Port 3-Rc 3-Rc 3 8 3 8 Rc 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1 2 2-Rc 3 4 2-Rc1 Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 772

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

PFA/PFW

These vortexes are stable under certain conditions, and their frequency is proportional to the flow velocity, resulting in the following formula. f = k x v f: Frequency of vortexes, v: Flow velocity, k: Proportional constant (determined by the vortex generator's dimensions, shape, etc.) Therefore, the flow rate can be measured by detecting this frequency.

CE

63 1105 1333 1789 3-3-3 2 (m1+m2)V E(J= m1 kg m2 kg V m/s 4. 4-1 CE1 4-2 A A B B C COM(OV) D COM(OV) E 12 24V F 0V G CEU5 CEU5 3 +12V +12V 1k A 680 COM +12V +12V 1k B 680 COM +12V DC12V60mA GND F.G. 4-3 (1)CEU5 CE1-R** (2) (3) (4) (5) *(CEU5**-D)EMC CEU5) 5. 5-1 () CE1 14.5mT CE1 15000 18cm 5-2 0.1mm 0.0 0.2 0.1 A B (1)0.8mm (2) sin cos 2 0.8mm

CUJ

CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (without magnet) (mm) b Bore Size A (a) B (b) C (c) B 4 6 8 10 10 () 15 () 13 () 13 (13) 19 (22) 13 (33) c + Stroke C + Stroke 13 () 21 () 13 () A 13.5 (15) 22 (24) 13 (36) a Numbers in parentheses are the dimensions of SMC Series CU cylinders.

Digital pressure switch for energy-saving control ejector

Power supply/output cable connector pin numbers (Pressure switch cable assembly) -15No.TQ0010298-OM003-B Internal circuit and wiring example NPN output type NPN open collector 2 outputs (Use one output for controlling the supply pilot valve) Max. applied voltage 26.4 V, Max. load current 80 mA Residual voltage 2 V or less.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.