Body Size: 40, Thread: N (NPT), Port: 04 (1/2), Option: D [Float Type Auto Drain (N.O.)], Attachment: Standard, Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 04 (1/2), Options: D (N.O., Normally Opened), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge

Body Size: 40, Back Flow: K (w/Backflow), Thread: N (NPT), Port Size: 04 (1/2), Options: D (N.O., Normally Opened), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 04 (1/2), Options: D (N.O., Normally Opened), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 8 (Metal Bowl w/Level Gauge), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: N (Non-relieving), Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °

Body Size: 40, Back Flow: K (w/Backflow), Thread: N (NPT), Port Size: 04 (1/2), Options: D (N.O., Normally Opened), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 2 (Metal Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge:

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 04 (1/2), Options: D (N.O., Normally Opened), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 2 (Metal Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi

Body Size: 40, Thread: N (NPT), Port: 04 (1/2), Option: D [Float Type Auto Drain (N.O.)], Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: RZ (R + Z)

Body Size: 40, Thread: N (NPT), Port: 04 (1/2), Option: D [Float Type Auto Drain (N.O.)], Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 04 (1/2), Options: D (N.O., Normally Opened), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: 2 (Metal Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge:

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 04 (1/2), Options: D (N.O., Normally Opened), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: 8 (Metal Bowl w/Level Gauge), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure

Body Size: 40, Back Flow: w/o Backflow, Thread: N (NPT), Port Size: 04 (1/2), Options: D (N.O., Normally Opened), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 6 (Nylon Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure Gauge: psi

Body Size: 40, Thread: N (NPT), Port: 04 (1/2), Option: D [Float Type Auto Drain (N.O.)], Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F)

Body Size: 40, Back Flow: K (w/Backflow), Thread: N (NPT), Port Size: 04 (1/2), Options: D (N.O., Normally Opened), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Z [Product: psi, °C; Pressure

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

PF-OMN0011_C

-40-W) AWG26 0.51 mm 1.00 mm 3.5 mm -68No.PF-OMN0011CN-C / (PF3W704/720740) A B C 1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W711) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W721) A B C 1 V 1.5 V 5 V 4 mA 5.9 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521 30 250 -69No.PF-OMN0011CN-C / A B C D 0.6 V 1 V 5 V 5.4 V 2.4 mA 4 mA 20 mA 21.6 mA -70No.PF-OMN0011CN-C

3

wire (NPN equivalent) 100 V 12 V Relay, PLC 2-wire 24 V A90V No IC circuit 5 V,12 V 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 B A Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) 16 20 Mounting position Mounting position 16 20 A A B B Operating range Note) Operating range Note) Solid State Switch Reed Switch 24 Series MY1W Mounting of Auto Switch & Installation of Lead Wire Cover (50, 63) Caution Be sure to install