Series IDG

.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 83 187 53 165 62 113 212 54 190 82 IDG10, IDG10H IDG20, IDG20H Values inside [ ] are for NPT threads 1/4, 3/8 15 Membrane Air Dryer Series IDG Dimensions (mm) 1in = 25.4mm

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 42 29 11 7.5 8 8.5 9 M4 x 0.7 10 12 13 15 M4 x 0.7 4.3 4.3 5.6 5.6 M5 x 0.8 6 8 10 12 58 64 83 93 8 8 9.5 9.5 13 8 8 10 10 M4 M4 M5 M5 4.5 4.5 5.5 5.5 8 5 5 6 6 13 15 18 21 18 26 30 36 42 13 15 18 21 18 22 24 30 12 16 20 25 10, 20, 30, 40, 50, 75, 100 125, 150

RSH/RS1H

G5-S 20 is socket set screw CV MVGQ CC 20, 32 only RB J Replacement Parts: Shock Absorber Replacement Parts: Seal Kit DKit no.

IDG

.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100 mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 IDG10/10H IDG20/20H Values inside [ ] are for NPT threads. 83 187 53 165 62 113 212 54 190 82 1/4, 3/8 14-19-30 27 Series IDG Membrane Air Dryer Single Unit Type IDG30/50

CM2

0.4 J 0.65 J 1.2 J JIS Symbol Double acting, Single rod CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB Standard Stroke Maximum stroke (mm) Standard stroke (mm) Note) Bore size (mm) MB1 20 1000 CA2 25 1500 25, 50, 75, 100, 125, 150 200, 250, 300 32 CS1 2000

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

Symbol Material -XC14 Change of trunnion bracket mounting position J 70C Nylon tarpaulin -XC15 Change of tie-rod length Bore size (mm) Cylinder stroke (mm) 110C K Heat resistant tarpaulin -XC18 NPT finish piping port 180 1,569 Maximum ambient temperature for the rod boot itself.

53

Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

10

J Nylon tarpaulin 70C K Heat resistant tarpaulin 110C* * Max. ambient temperature for rod boot itself. Water Resistant Air Cylinder Mounting Brackets/Part No.

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q B Pressure gauge (Option) K H OUT Pressure gauge port size Square embedded type pressure gauge (Option) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D A N F AC30A, 40A E P K C G G OUT IN Q B Pressure gauge (Option) K OUT Pressure gauge port size J L Square embedded type pressure gauge (

Stopper Cylinder

Q F Z Stroke 32 40 50 RSQB -DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore Width across flats K A

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (Single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (Single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

LVQ

Stainless steel L LQ-GP 2 J 07 Tubing size symbol (Refer to Table 1) Body class (Refer to Table 1) Insert pin (single) Insert pin material (J/K type only) Type Nil S Resin Stainless steel LQ-GH J 07 Holder (single) Tubing size symbol (Refer to Table 1) Type Note1) Replacement part type J shows the parts for LQ-GJ and LQ-GK.

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

39

L M N O P Q J K L M N O P Q Part no.

XM, XY

H J K P.C.D L1 8 x 8.4 L2 XMC-50 XMC-63 XMC-80 70 88 90 29 36 44 P.C.D 92.1 10.5 9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ

REA/REB

Speed 300 mm/s Dimensions Basic Type REA REA 25, 32, 40 Effective thread depth J L 0 -0.1 NN G 4-MM H G B 2Port size Direct Mount Type REAR Direct Mount Type REBR X D I Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL NB NB N N K W T F NA S + Stroke ZZ + Stroke F R (mm) MM x J B D F G H I K L N NA NB NN Model Port size Rc 1/8 REA25 REA32 REA40 46 27.8 13 8 20.5 34 10 70 M5 x 0.8

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108

CNS

Bore size J Nylon tarpaulin Rod boot 125 125 mm K Heat resistant tarpaulin 140 140 mm Nil With cushion in both ends 160 160 mm N Without cushion Cylinder stroke (mm) Refer to Maximum Stroke on page 9-8-9. Cushion R With rod bumper H With head bumper Built-in Magnet Cylinder Model In the case of one side, it is in the lock side.

Electric Actuator/Slider Type

Conductor size: AWG24 cable type M LEC Y C 1 Cable length (L) Motor type Y AC servo motor L 0.2 m J 0.5 m 1 1 m 3 3 m Cable description M MECHATROLINK-2cable U MECHATROLINK-3cable Not available for the MECHATROLINK-2cable. LEC-CYMis JEPMC-W6002-E manufactured by YASKAWA CONTROLS CO., LTD.

CNG

Refer to page 13 regarding the trunnion bracket. 11 Cylinder with Lock Double Acting: Single Rod Series CNG Clevis type (D): With rubber bumper/CNGDN Rc(PT) BP unlocking port Unlocks when pressurized Rc(PT) P Rear cylinder port RR L S + Stroke H GB A F K GA BN GC AL 8-J CZ TT H1 Rc(PT) P CD H10 (hole dia.) MM Front cylinder port d9 (shaft dia.)