Cylinder

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Suction flow rate l/min (ANR) 6 10 15 20/25 32 2 5 10 15 20 0.1MPa 0.05MPa 0.15MPa 10 to 60C (With no condensation) 30 to 400mm/s 0 to 5mm compared to the standard stroke Ball bushing bearing/Slide bearing Bearing type 10-/11-/12-: Fluorine grease 21-/22-: Lithium soap base grease 10-/12-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 Grease Particle generation grade (Refer to front matter pages 13

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

M8 x 1.25 40 41 28 43 20.5 32 13 ZPT50HB-A14 -B10 50 52 36 54 24 35.5 65.5 16.5 M10 x 1.5 ZPT50HB-B 8 ZU M8 x 1.25 50 52 36 54 24 35.5 16.5 -B10 M10 x 1.5 ZL ZY ZPT HB-A16 (Male thread) ZPT HB-B (Female thread) 63 80 63 80 ZF M16 x 1.5 ZP (Rc, NPT, NPTF) 8 1 Hexagon width across flats 22 6 6 Hexagon width across flats 24 SP 25 G Width across flats 37 45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7

Clean Regulator/Fluororesin Type

Nil X401 Standard Applicable fittings LQ1 LQ2 Symbol 1 2 Nil N Rc 1/8 NPT 1/8 Rotating the mounting hole 90 Fitting size (IN side) Fitting size (OUT side) Note 2) Note 2) Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Fitting size Fitting type Applicable fitting size Fitting type Symbol Symbol Nil 07 11 13 19 25 Note 1) 2 3 4 5 6 Same as IN side 2 3 4 5 6 07 11 13

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

(Port location: Side ported type only) A port B port 25 42 65 13 Series MSUA These drawings indicate the condition when the B port is pressurized.

MLGC

8 10 13 10 9 14 9 10 14 10 D-B59W D-G79/K79/K79C D-H7BAL D-H7/H7W/H7NF 4 4 4.5 5 7 8.5 9 10 D-H7C D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 45 D-G59F D-G5NBL 5 35 5 40 5.5 40 Since this is a guideline including hysteresis, not meant to be guaranteed.

MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 21 31 20.5 13 18 58 3H9 depth 3 +0.025 0 15 9.5 4-3.2 4-6.5 4.5 4.7 2-M3 x 0.5 thread depth 6 A G H 8 4-M4 x 0.7 Operating port 2-M3 x 0.5 Section AA M 8 N 2 ( 1): The number of pitches 0.3 15 (Table length) 16 4.5 J 8 Z 2.4 Max. 9 ZZ H G 3H9 depth

240

4 8 Bearing stopper Size 6: Aluminum alloy Size 10: Carbon steel 9 Motor plate Aluminum alloy Anodized 10 Guide ring Aluminum alloy Size 10 only 11 Bearing 12 Bushing Oil impregnated sintered copper alloy 13 Soft wiper !2 e w i !1 t !

0.5

Functions and Indications Page 13 Alarm Page 13 Wiring Page 14 Wiring Circuit Page 14 Operation Chart Page 15 DimensionsPage 16 Fan Type Ionizer IZF10/IZF10R Series Technical Data/Static Neutralization Performance q Installation Distance and Discharge TimePage 20 w Static Neutralization RangePage 20 How to Order Page 21 Accessories Page 22 Accessories Sold Separately Page 22 Specifications

Air Cylinder

62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm] Part no.

Compact Guide Cylinder

4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x

Intrinsically Safe Valve

G NPT NPTF 13 Body Ported Series 53-SY5000/7000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)(Refer to page 40 for details) How to Order Valve

PFxx-OMJ0005CN

11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 13 11 17 13 39 17 NPT1/81/4 G1/8 G1/8 G1/

K35-OMX0029

signal power supply 24V 13 CAL 14 E-STOP *1 *1 When the air servo cylinder is operated, turn ON the E-STOP signal.

Air cylinder (Series compatible with secondary batteries)

Air Cylinder Speed controller Solenoid valve Regulato r Air source Air filter Fig. 12 Basic Circuit 24 5.Structure Fig 13. Standard product: Double acting/single rod Table 15 Components No.

MGP-OM0242Q

Clean Series / Precautions 13 13. Troubleshooting 17 14. Auto Switch 18 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

MHS

MH*-OMM0056 MHS2-D MHS3-D MHS4-D MHSJ3-D MHSH(J)3-D 1. 23 2. 2-1. 45 3. 3-1. 6 3-2. 67 3-3. 713 3-4. 13 3-5. 14 3-6. 14 3-7. 14 4. 4-1. 14 4-2. 1518 4-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D

Electric Slide Table / High Precision Type 《 AC servo motor 》

Stop operation at once if there are abnormal noises or vibrations. -13- Abnormal noises or vibrations may mean that the product is not properly mounted, and if allowed to continue in this state, damage to the equipment may occur. 4. Never touch the rotating parts of the motor while in operation. 5.

JXCx-OMT0034CN

JXC-OMT0034CN (GW)(CC-Link) / LEC-GMJ2 1. . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4 () . 8 (1) . 8 (2). 8 (3)(LEC) . 8 (4). 8 (5) . 8 (6) . 9 (7) . 9 3. . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGMJ2) . 13 (2)DIN (LECGMJ2D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (STATION NO.,B RATE) . 15 4.2 (CN2SW) . 16 4.3 (LEC) . 17 5. . 19 5.1 CN4 . 19 5.2 CN3 . 19 5.3 CN1CONT . 19 5.4 CN2PC

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23