Low Maintenance Filter Series FN1

0 2 4 4.5 100% 0 2 4 4.6 102% 0 2 4 4.4 98% 0 2 4 4.5 100% Time it takes to clog the filter (min) The values in percentage indicate the percentage of times when the time it took to clog the filter for the first time is set to 100% Introduce a certain concentration of dust and back-flush the filter when the pressure loss reaches 0.2 MPa.

Ejector Valve Unit, Series ZYY/ZYX

Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)

Antistatic Tubing TA  Series

Operating Pressure 104 to 107 Surface resistance Note) Miniature fittings: Only the following types are available for M and MS series Max. operating pressure (MPa) M Series MS Series M-3AU-3, M-3AU-4, M-5AU-3, M-5AU-4 M-5AU-6, M-5H-4, M-5H-6 MS-5AU-3, MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 How to Order 100 TAS1065 B Operating temperature (C) Length per roll Color Length 20 m roll 100 m reel

ZSE30/ISE30

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

a o t r cl cl en nt er er e tm e m nt nt is us u t u w C 0 us o 90 k o c lo o C l dj C C 19 dj se c Cl 1 A k A A wi e w oc ge dj k A is oc k ng dj u wi e Cl an st us se ro ra m r ta t ot m r d at ti n e n io on e n e on nt e nt tio nd r r a a ti n n g ta e 5 9 g ta e 9 ro 5 ro m m u im u im ax M ax M Note) The drawing shows the rotation range of the positioning pin hole.

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Class B or equivalent (130C) Note) Coil insulation type Note) Based on JIS C 4003 How to Order 1 L 02 0 1 1 4 VS C Thread type Direct operated/Metal seal solenoid valve Electrical entry Nil Rc NPT NPTF Option 4, 5 port valve N Symbol Electrical entry Electrical entry position C T U D T Sub-plate Conduit Type of actuation Conduit with terminal Sub-plate Body size: 1/8 standard F Single

5 Port Air Operated Valve

5 Port Air Operated Valve VFA1000/3000/5000 Series RoHS SYA SYJA VZA VFA VFA VFRA VPA4 SYJA VZA VTA VGA VPA VPA3 1495 VFA1000/3000/5000 Series Model Selection by Operating Conditions q Air Operated Valve: Single Unit Series Sonic conductance C[dm3/(sbar)] Type of actuation Port size Pilot port direction VFA1000 2 position single VFA1000 (B)2 4(A) 1 (P) (EB)3 5(EA) M5 x 0.8 1/8 VFA3000 VFA5000

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

ZP C ZCU Dimensions H B AMJ Ball joint type: 10 to 32 Misc.

Modular F.R.L. Unit

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto drain (N.C.)

IDUS/IDFS

(C) Outlet air press. dew point (C) Ambient temp.

Stainless Steel Heat

(C) Outlet air press. dew point (C) Ambient temp.

LVQ

0 to 100 Ambient temperature (C) VX3 0 to 60 Weight (kg) 0.085 0.175 0.223 0.835 0.725 VXA Specific Product Precautions VN LVC Be sure to read before handling.

HRX-OM-S004

Table 7-1 Quality criteria for clean water (tap water) Standard value Item Unit For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Ozone Resistant

100 200 300 100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060 425 625 825 925 3000 210 1020 300 400 500 600 AWM Mist separator regulator VQZ AWD Micro mist separator regulator SQ AS Speed controller VQD SY Flow control valves SYJ SX 3-port solenoid valve (2) VQ VQ VQZ

Polyurethane Tubing TU/TIUB Series

Polyurethane Tubing TU/TIUB Series RoHS KQ2 KQB2 20 m roll 100 m roll (TU1610 is reel.) 100 m roll, 200 m roll For general pneumatic tubing Flexible Polyurethane tubing Model/Specifications Option Manufactured upon receipt of order (Please consult with SMC.)

Safety Instructions

Blue (100 VAC) 2 (, +) 2 Red (200 VAC) Indicator light Indicator light With indicator light With indicator light Red (+) DC Blue (100 VAC) Series VC (Class H coil) Red (100 VAC) Grommet, Conduit, Conduit terminal AC circuit For energy-saving circuit, there is the polarity. 1 DIN terminal Since internal connections are as shown below for the DIN terminal, make connections to the power supply

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VQC

N.O. 4-position dual 3-port valve (C) 4 2 1 5 3 N.C.

Blue BMW-062-010-C BMW-125-010-C .012 Green BMW-062-012-C BMW-125-012-C .014 Orange BMW-062-014-C BMW-125-014-C .016 Grey BMW-062-016-C BMW-125-016-C .017 Brown BMW-062-017-C BMW-125-017-C .019 Red BMW-062-019-C BMW-125-019-C .020 Dk.

Blue BMW-062-010-C BMW-125-010-C .012 Green BMW-062-012-C BMW-125-012-C .014 Orange BMW-062-014-C BMW-125-014-C .016 Grey BMW-062-016-C BMW-125-016-C .017 Brown BMW-062-017-C BMW-125-017-C .019 Red BMW-062-019-C BMW-125-019-C .020 Dk.