Rated Flow Range: 0.1 to 10 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: ø6, Output Specification: Out 1: NPN; Out 2: NPN, Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: Panel Mount Adapter, w/Flow Adjustment Valve, Calibration Certificate: -, Made to Order: -

Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 30, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,

(Normally Closed) at non-pressurized without drain emissions, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 30, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit: Name plate, bowl caution plate and pressure gauge units

(Normally Open) at non-pressurized with drain emissions, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 30, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape spacer:

(Normally Open) at non-pressurized with drain emissions, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit indicator), Size of Body: 30, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit: Name

Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit indicator), Size of Body: 30, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,

Material: [Resin] Polycarbonate Case, Case Guard: Presence, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 40, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,

(Normally Open) at non-pressurized with drain emissions, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 40, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape spacer:

(Normally Open) at non-pressurized with drain emissions, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit indicator), Size of Body: 40, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit: Name

Exhaust Structure: Non-relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit indicator), Size of Body: 40, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,

(Normally Open) at non-pressurized with drain emissions, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 40, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit: Name plate, bowl caution plate and pressure gauge units:

(Normally Open) at non-pressurized with drain emissions, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit indicator), Size of Body: 40, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit: Name

Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 20, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,

No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit indicator), Size of Body: 20, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,

Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 20, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,

(Normally Closed) at non-pressurized without drain emissions, Pressure Gauge: No (No Pressure Port Plug), Size of Body: 20, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape spacer

(Normally Closed) at non-pressurized without drain emissions, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit indicator), Size of Body: 20, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A, Lubricator Oil Discharge Outlet: Without drain cock, Pressure Unit

No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit indicator), Size of Body: 20, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,

Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with color zone), Size of Body: 20, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,

No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with limit indicator), Size of Body: 20, Check Valve: None, Pressure Switch: None, Residual Pressure Relief 3-Port Connection Valve: Yes, Set Pressure: 0.05 to 0.7 MPa, Drain Outlet: N/A,