Vacuum Pad

Suction Verification C.

Vacuum Pad

Suction Verification C.

XLDV Series

Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Body option CUJ Nil C M F Standard With rubber bumper Rod end male thread Boss on head side With rubber bumper Rod end female thread (Standard) C CU Cylinder stroke (mm) With rubber bumper Rod end male thread CM Bore size Standard stroke Long stroke CQS 35, 40, 45, 50, 75, 100, 125, 150, 175, 200 5, 10, 15, 20, 25, 30 12, 16 Combination of body options is available

W2M/4M

o uss cl63n liltrd an the supPly eurrent 4-wire: Input signal of 0-20(mA) Power supply ot l215(V) Current 4-wire: 0-20 mA Input impedance: 200(c,) quivalent 3 TheAir Filterand Nrist SeDaratorshould be maintained periodically.

EXxx-OMN0029CN

(3)B180(1/2) (1) (2) (3) A B C (EX600-ZT1) -17No.EX-OMN0029CN-D SI EX600-S A SI 1 PNP() 2 NPN() TM DN DeviceNet No. 1 LED 2 3 4 (BUS OUT) 5 6 (PCI) 7 8 9 10 () 11 (BUS IN) 12 (2 ) (BUS OUTPCI) -18No.EX-OMN0029CN-D BUS IN BUS OUT 1 DRAIN 2 V+ 3 V4 CAN_H 5 CAN_L BUS OUT BUS OUT DeviceNetDeviceNet (BUS IN ) T SI IP67 DeviceNet -19No.EX-OMN0029CN-D (1) (2) (3) (4)

Heavy Duty Stopper Cylinder Series RSH/RS1H

type snap ring for shaft C type snap ring for shaft C type snap ring for shaft Return spring 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 Clear anodized Clear anodized 20, 32 only 20, 32 only Nickel plated Nickel plated Hexagon socket head set screw Hexagon socket head set screw 20 only Nickel plated 20 only Hexagon socket head plug Spring pin Wear ring

Electro-Pneumatic Regulator IT1000/2000/4000

o uss cl63n liltrd an the supPly eurrent 4-wire: Input signal of 0-20(mA) Power supply ot l215(V) Current 4-wire: 0-20 mA Input impedance: 200(c,) quivalent 3 TheAir Filterand Nrist SeDaratorshould be maintained periodically.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

How to Order Manifold Assemblies (Example) How to Order Valves Example (SZ3000, positive common with power supply terminals) SZ3 5 1 C6 LOZ 60 Double solenoid SZ3260-5LOZ-C6 (3 sets) Single solenoid SZ3160-5LOZ-C6 (2 sets) Type of actuation Supply/Exhaust block (U side mounting) 1 2 3 4 5 A B C 2 position single solenoid 2 position double solenoid 3 position closed center Switch specifications

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

Digital Pressure Switch

0 kPa 5 kPa X580 10 kPa -10 kPa 0 kPa 10 kPa -60No.PS-OMV1001-C Dimensions Body dimensions -61No.PS-OMV1001-C Mounting brackets Bracket A Bracket B -62No.PS-OMV1001-C Bracket C -63No.PS-OMV1001-C Panel mount adapter Panel mount adapter + Front protective cover -64No.PS-OMV1001-C Panel cut-out dimensions Single Pressure switch Two or more in a row n: The number of the Pressure switch

Free Mount Cylinder Series CU

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28 (38) 25 (35) 22 (27) 48 (58) 40 (50) 36 (41) 71 (101) 56 (86) 50 (75) 133 (170) 106 (143) 95 (128) 235 (294) 193 (252) 176 (230) 347 (425) 286 (364) 262 (335) For the mass of auto switch, refer to page 1263.

HRX-OM-O021

Table 3-3 Power supply cable and Earth Leakage BreakerRecommended Terminal block Recommended earth leakage breaker screw Recom Tightening Model Power supply Cable qty. x torque Rated Sensitivity Rated diameter mended voltage size voltag of leak current crimp e current [A] terminal [V] [mA] 3coresx12AWG 1-phase (3 cores 200-230V AC HRS050-A-20 200, x3.5mm2) (including 230 20 30 M4 5.5-4 1.5Nm

ALB900

To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no. A 3 4 , 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 1 1 3 4 ALBA90-10 ALBA90-20 14-13-19

“

Flow Rate Characteristics Relief Characteristics IR1220-01-A Supply pressure: 0.7 MPa IR1220-01-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate:

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Rubber bumper (Magnet type) Standard Strokes Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 50, 100, 150, 200 Made to Order Made to Order: Individual Specifications (For details, refer to pages 1507 and 1508.) 300 6 50, 100, 150, 200, 250, 300 500 Symbol Specifications 10 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Air-hydro 50, 100, 150, 200, 250, 300, 350, 400, 450

Speed Controller: Standard Type Series AS In-line Type

2 U seal Retaining ring for hole type C HNBR Tool steel y !

Slit Valve XGT Series

For 200 mm wafer For 300 mm wafer 529

Low Profile Slide Table Series MXF

160 200 50 100 150 200 0 0 0 Load (N) Load (N) Load (N) D-X Individual -X 139 Series MXF Construction !

253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.210 inputs6 outputs1 M (when differential receiver), 200 k (when open collector)0 to ?