SMC Corporation of America
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Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model MHW Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) MRHQ Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only. Misc.

3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 : 12 One-touch fitting 38.7 P=25 65.5 VQ5 VQZ VQD Manual override Indicator light L2 48 L1 6.5 65.5 P=25 A A A B A B A B A B A B 9 A A A A A A A 143 163 74.5 9 B B B B B 10 0.6 m, 1.5 m, 3 m Lead wire length n 1 2 3 4 5 6 7 Stations D-side 8 U-side

0.1] 10 Note 3) 0 , 5 , 10 D0418 2 Load mass [10g] 5 Yes to 100 Movement mode No D0419 2 1 0 , 1 No. 1 (0: ABS, 1: REL) (No. 0) Note 5) D041A 2 Threshold force value [0.1] 1 1 to 50 Yes D041B 2 Positioning width [m] 1 0 to 30 Yes Yes AREA A position 1 [m] More than D041C 4 1 Note1) 0 Note 1) Yes AREA A position 2 [m] More than D041E 4 1 Note1) 0 Note 1) Yes AREA B position 1 [m] More than

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

steel 20 Seal NBR 8 Series AS-FS Dimensions: Elbow Type Seal method: Gasket seal For M5, 10-32UNF Indicator window direction: 0 Indicator window direction: 180 Y W2 X D3 W1 Applicable tubing O.D. d L3 A L4 D1 T L2 L1 M H (Width across flats) Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS12l1FSl-M5E-02 2 5.8 15.8

Select compatible materials of construction for the gas Vacuum to 250 psig (1.7 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 14 to 160F (10 to 71C) (No freezing) 2.8 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 4 x 10-9 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10in.(0.25 m), 7in.(0.18 m), 5in.(0.13 m) Face seal, Tube weld 80 to 100 psig (0.55 to 0.7 MPa) 10-32 UNF thread Side Bottom mount 0.76

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

-30D (M) 13.5 x 100L 100 x 130L 130 10 -40D (M) -35D (M) x 105L 105 x 135L 135 -45D (M) -40D (M) x 110L 110 x 140L 140 -50D (M) -45D (M) x 115L 115 x 145L 145 -75D (M) -50D (M) x 120L 120 x 170L 170 -100 (M) -75D (M) x 145L 145 x 195L 195 -100D (M) CHQB50-10D (M) x 170L 170 90 CQ-M6 x 90L -15D (M) 95 x 95L -20D (M) 100 x 100L -25D (M) 105 x 105L -30D (M) 110 x 110L -35D (M) 115 12 x 115L

m (kg) 32, 40 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 32, 40 D1 1 10 50 51 100 101 200 10 100 51 50 101 200 -X Stroke (mm) Stroke (mm) 509 MGPW Series L L m m Horizontal Mounting Ball bushing MGPWL20 to 25, MGPWA20 to 25 (25) L = 50 mm, V = 400 mm/s or less (26) L = 100 mm, V = 400 mm/s or less 10 10 25 25 25 25 25 25 Load mass m (kg) Load mass m (kg) 20 20 20 20 20 1 1 20 10 25 26 100

Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Bore size (mm) The dimension inside ( ) is for D-A93.

1 I/O cable length [m]*10 o Cable length [m]*6, *9 LEC Y Nil Without cable H Without cable (Connector only) 1 1.5 *9 The length of the encoder, motor and lock cables are the same. Nil Without cable 2 2 m 5 5 m A 10 m Nil: Left Motorless *10 When Without driver is selected for driver type, only Nil: Without cable can be selected. Refer to page 624 if I/O cable is required.

A filtration degree of 5 m or less should be selected.

Model Mounted to body B C D E H F M P* I A J Q* MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 7 2.5 6 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 8 3 7 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 12 4 31 10 9.5 M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5

Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. (At 15 m: Reduced by up to 20%) Note 6) The allowable speed for pushing operation. When push conveying a workpiece, operate at the vertical work load or less. Note 7) A reference value for correcting an error in reciprocal operation.

M1 3A = M1E/M1E max = 2.25/10 = 0.225 m x g L1 M1E FE M3E = 0.05 x a x m x L2 (FE = 1.4/100 x a x g x m) = 0.05 x 300 x 3 x 0.04 = 1.8 [Nm] Investigate M3E. a From above, find the value of M3E max at 420 mm/s in Graph (3).

10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-23(S)A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18

Element length L250 L500 (L250 x 2) L750 (L250 x 3) A B C Symbol Port size Port size R 1 2 10 20 Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) Nominal filtration accuracy (m) Symbol Symbol 050 070 074 075 100 105 120 X50 001 002 005 010 020 040 50 70 74 75 100 105 120 0.5 1 2 5 10 20 40 Symbol Element category Material Bronze Stainless steel Polypropylene Glass fiber

I = I + IA kgm (m to m : Mass of I to I kg) D Calculation example When d1 = 0.1m, d = 0.05m, D = 0.04m, a = 0.04m, b = 0.02m m = 1kg, m = 0.4kg, m = 0.5kg, m = 0.2kg, Gear tooth ratio = 2 Cylinder: I I = 0.2 x = 0.03 x 10 -3kg m I = 1 x = 1.25 x 10 -3 kgm 0.1 8 0.04+0.02 12 b IB = (0.13 + 0.1 + 0.03) x 10 -3= 0.26 x 10 -3 kgm 0.05 8 I = 0.4 x = 0.13 x 10 -3 kgm a IA = 2 x 0.26 x 10 -3 = 1.04