kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H
LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H
STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) HEC 3-2
Communication Format
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 to 9010(at 20 C)4.5 (at 20 C)?
20 20 20 14 14 14 14 D 2 A Connection thread H1 L1 Copper extension nozzle: KNL (mm) Model Nozzle size D Outside diameter L1 Outside diameter KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 1.5 2 1.5 2 6 6 6 6 300 300 600 600 D L1 Note) When a copper extension nozzle is ordered separately, a self-align fitting will also be required for connection with the blow gun.
Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)
Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.
operating ow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42 7 42 7 60 7 Bypass circuit (With valve) Installed Electric conductivity setting range [S/cm] 0.5 to 45.0 0.5 to 45.0 0.5 to 45.0 Circulating uid system Pump capacity Particle lter nominal ltration rating (Accessory) [m] 5 Circulating uid outlet, circulating uid return port CH1: Rc1 (Symbol F: G1, Symbol N: NPT1) CH2: Rc1/2
Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7
80 85 90 95 100 105 60 65 70 75 80 85 73 78 83 88 93 98 16 to 25 Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R QA Q GC GB E MM GA D J C 2.8 A Width across flats L 2 x P through A1 H E 4 x T counterbore 0.5 B S Z (mm) S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0
Station 3 2 1 D side U side Stations 02 03 2 stations 3 stations 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valve S070 A 5 B G Electrical entry Body type Body type Base mounted with clips Symbol A G C Grommet Plug lead with light/surge voltage suppressor Coil voltage Power consumption Pressure specification Flow rate 24 VDC 12 VDC
S. or l ess H yst eresi s F. S. or l ess Repeat abi l i t y F. S. or l ess Sensi t i vi t y F. S. or l ess Tem perat ure charact eri st i cs F.