SMC Corporation of America
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M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x

C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.C.

(Value in the initial stage) Model Flow characteristics (2) Type of actuation Port size Pilot port size b Cv b Cv Valve model Pilot C C Body ported Body ported Base mounted VZA212-P-M5 0.13 0.35 0.52 0.15 0.43 0.60 N.C. M5 x 0.8 M5 x 0.8 Body side VZA222-P-M5 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 M5 x 0.8 Body side VZA214-1P-01 0.22 0.35 0.85 0.25 0.30 1.0 N.C.

-100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty and Disclaimer and measurement laws are added.

For AIR EXH: AN120-M5 Foot Silencer Specifications Symbol Model PB1011A PB1013A Built-in solenoid valve Actuation Air operated Main fluid suction/discharge port Rc, NPT, G 1/8 female thread Rc, NPT, G 1/8 female thread Supply port Exhaust port Port size Pilot air M5 x 0.8 female thread AIR SUP AIR EXH FLUID OUT Body wetted parts Diaphragm Check valve Liquid contact seals Polypropylene (PP

K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 Model M 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Controller Connectors These are connectors 'all halfpitch type' used for CN1 (control input/output) and CN2 (general purpose input/output).

Symbol (B) 2 (A) 4 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Valve model Port size Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27

A B C 2 3 5 Grommet Size 1 Resin A 24 VDC Size 2 B E N.C. N.O. A B 4 7 Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet With surge voltage suppressor Size 3 C F N.C. N.O.

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

When the IDF100F-30 is provided with options C, R and V and specified to have the facility water piping direction on the right side, the part number will be IDF100F-30-CRVW4. NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

Description 1 DC(+) 2 OUT2 3 DC(-) 4 OUT1(C/Q) -35No.PS-OMW0009-C 3 Installation Connector pin No. (Lead wire side) Connector pin No.

(mm) Connection thread R Effective area (mm2) Min. port size <M5, M6> <M5, M6> Weight (g) M D1 D2 L1 L2 A Model Nylon Urethane M5 x 0.8 M6 x 1 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 20.5 21 22 8 9 4 12 10.4 21 16 2.5 3.5 3.5 23.5 23.5 1 8 M5 x 0.8 M6 x 1 12 14 22 21 21.5 23 2.5 3 3.5

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation T1: Outlet Thermo-chiller temperature amount Customer equipment T = T2 T1 7325 [W] = 7.3 [kW]

Appropriate clamping torque (Nm) 0.18 to 0.25 1.13-3 4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000 How to Order L 1 5 5 VQD11 Body Sub-plate port size 2 3 5 M5 thread Without sub-plate (Manifold) M5 thread Body ported Body ported (Single unit) Body ported (Manifold) Base mounted M5 Base mounted M5 Valve option Electrical entry Standard (2W) Vacuum (2W) Large flow (4W) Large

COIL TEMPERATURE CLASS CHART Class A 105 C / 221 F Class B 130 C / 226 F Class F 155 C / 311 F Class H 180 C / 356 F Class N 200 C / 392 F Class C 220 C / 428 F 86 86 SOLENOID VALVES . . . Valve Types and Function Three-Way Valve a valve that has two orifices and three ports. One orifice is always open when the other is closed and one port is always open to one of the other two ports.