Environment

(MB) MA MC MD Section XX 11LEJS XB XA H9 XA 25ALEC [mm] Size Stroke range [mm] A B C D EH EV FH FV GH GV H J K L M O1 LEC S 25 15 to 100 130.5 116 13 20 44 45.5 57.6 56.8 66.2 139.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 101 to 400 155.5 141 LEC SS-T 32 20 to 100 148.5 130 13 25 51 56.5 69.6 78.6 76.2 173.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 101 to 500 178.5 160 LEC Y Size Stroke range [mm] R OA

Compressed Air Cleaning Filter Series

AME150C AME450C AME650 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Max. flow line Air flow rate (l/min (ANR)) Air flow rate (l/min (ANR)) Air flow rate (l/min (ANR)) AME250C AME550C AME850 Max. flow line Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Max. flow line Max. flow line Air flow rate (l/min (ANR)) Air flow rate (l/min (ANR

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

0.8 Vacuum pad connection port M5 x 0.8 783 Series ZSE2/ISE2 01 T1 Dimensions/Standard Type: ZSE2Grommet type: ZSE2-15 01 T1 Connector type: ZSE2-15C 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) 48.5 41 39 39 3.5 3.5 8.5 8.5 2 x 3.5 Mounting hole Piping port M5 x 0.8 depth 5 2 x 3.5 Mounting

Pressure: 2 (For Low Pressure (0~101kPa)), Port Size: M5X0.8, Option: L (Sensor Cable)

Pressure: 0 [Positive Pressure (0~1MPa)], Port Size: M5X0.8, Option: L (Sensor Cable)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread)

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread)

Pressure: 3 (For Compound Pressure (-101~101kPa)), Port Size: M5X0.8, Option: L (Sensor Cable)

Pressure: 1 (For Vacuum (0~101kPa)), Port Size: M5X0.8, Option: L (Sensor Cable)

Type: Pressure Sensor, Fluid Type: Air, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range

Type: Pressure Sensor, Fluid Type: Air, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Pressure: For Low Pressure (0~101kPa), Port Size: M5X0.8, Option: Sensor Cable

Pressure: For Compound Pressure (-101~101kPa), Port Size: M5X0.8, Option: Sensor Cable

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 12 + 0.2 0 0.1 0.3 NX A1 U1 L1 7 12 Material: Stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Material: Pin and retaining ring both stainless steel 304 Part no.

5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 VFA1000 VFA3000 VFA5000 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only.

CE

25, 50, 75, 100, 125, 150 94 69 15 6 25 42.5 M5 x 0.8 16 5.2 25 15.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5 M8 x 1.25 10 8 28 25.5 Q R T V Y N O P Bore size (mm) 12 20 M4 x 0.7 M5 x 0.8 47 7 53.5 22 7 5.5 M6 x 1 M5 x 0.8 50 15 62.5 36 5 For rod nut and accessory bracket, refer to page 10-12-20.

Basic Type/Direct Mount Type

A (Operating direction) CY3RG20 (mm) B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 CB 2 2 3 3 3 5 5 5 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x