Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread)

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: M5 (Female Thread)

Pressure: 3 (For Compound Pressure (-101~101kPa)), Port Size: M5X0.8, Option: L (Sensor Cable)

Pressure: 1 (For Vacuum (0~101kPa)), Port Size: M5X0.8, Option: L (Sensor Cable)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Pressure: For Low Pressure (0~101kPa), Port Size: M5X0.8, Option: Sensor Cable

Pressure: For Compound Pressure (-101~101kPa), Port Size: M5X0.8, Option: Sensor Cable

Sensor Range: 0 [Positive pressure (0 to 1 MPa)], Accuracy: ±2% F.S., Port Size: M5X0.8, Output Specification: L (IO-Link/Switch: 1 output)

Type: Pressure Sensor, Fluid Type: Air, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 1.5, Operating Temperature Range

Type: Pressure Sensor, Fluid Type: Air, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [Threads] Male thread, Plumbing Thread Type: M, Plumbing Thread Nominal: M5x0.8, Fluid Characteristics: Noncorrosive / Incombustible, Pressure Resistance(MPa): 0.5, Operating Temperature Range

Sensor Range: 1 [For Vacuum (0~-101kPa)], Accuracy: ±2% F.S., Port Size: M5X0.8, Output Specification: L (IO-Link/Switch: 1 output)

Sensor Range: 1 [For Vacuum (0~-101kPa)], Accuracy: A (±1%F.S.), Port Size: M5X0.8, Output Specification: L (IO-Link/Switch: 1 output)

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

In addition, the universal type is only available with 180 setting. 688 A Speed Controller with Indicator Stainless Steel Type AS-FSG Series Needle Valve/Flow Rate Characteristics AS201FSG-01, AS211FSG-01 AS201FSG-02, AS211FSG-02 AS101FSG-M5, AS111FSG-M5 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 500 AS-F Flow rate [L/min (ANR)] Flow rate [L/min (ANR

1.63

10 100 -X Eccentric distance L (mm) 507 MGPW Series L L m m Horizontal Mounting Slide bearing MGPWM20 to 63 (17) L = 50 mm, V = 200 mm/s or less (18) L = 100 mm, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

3

A AA C J L L J K (4 locations) Flat washer With 4 pcs.

VK300

: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21 3R 1P 62.8 2.3 Refer to grommet type for other dimensions. [ ]: For port size 01 Dimensions

Precision Clean Regulator

SRP1-M5 SRP1-01 Pressure gauge part no.

ZSE40/ISE40

x 0.8, T1: NPT1/8, M5 x 0.8, W1: Rc 1/8 C4: With 4 One-touch fitting, C6: With 6 One-touch fitting, M5: M5 female threads 5-wire oil resistant heavy-duty cord (0.15 mm2) 01/T1 types approx. 60 g, W1 type approx. 80 g, C4/C6/M5 types approx. 92 g (Each including 0.6 m lead wires) Port size Lead wire Weight Note) When equipped with auto shift function, the following ranges can be set.