Clean Rodless Cylinder Series CYP

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1

Electro-Pneumatic Proportional Valve Series VEF/VEP

(Refer to the flow characteristics.) 1 (P) 2 (A) 3 (R) Current A Current A Choked flow Q: Air flow rate [L/mi (ANR)] P: Valve-inlet pressure [MPa] S : Effective area [mm2] t : Temperature [C] 293 273 + t Q = 120 x S (P + 0.1) F1 solenoid F2 spring Flow Characteristics: 2 Port Controlled opening 1 (P) 2 (A) 3 (R) Spool Effective area (mm2) 1 (P) 2 (A) 3 (R) Sleeve Current A Current A Choked

VF1000-OMP0001

DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000 VF1000 VF3000 VF3000 VF3000 VF3000 VF5000 VF5000 VF5000 VF5000 () P P(SUP) P A B A(CYL2) B(CYL1) A B EA EB R1(EXH2) R2(EXH1) R1 R2 (B)2 4(A) (B)2 4(A) (R2)3 1 5(R1) (P) (R2)3 1 5(R1) (P) 3(R2) 1(P) 5(R1) JIS () Z (B)2 (A)4 1:P 2:

ZQ-OM01601

DC24V10% DC24V 10% DC(+) DC(-) 8 / / 9 ( ) 10 , 5 m / / 11 1015 10 "-M" (kPaMPa) ( ) "M" 12 SI kPa,MPa 48 - No. 13 14 () 15 () / ( ) () 49 - 80mA 3.5 F.S.1 1F.S. 50 - 100.0-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S.1 digit 1 0 3 1/2 7 LED () 2% F.S

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

MHL2

Wide Opening Air Gripper Series MHL2 Parallel Style/10, 16, 25, 20, 32, 40 How to Order D 16 MHL 2 1 Y59A S Wide opening Number of auto switches 2 1 n S 2 fingers 2 Numbers of fingers n Bore size 10mm 16mm 20mm 25mm 32mm 40mm 10 16 20 25 32 40 Auto switch Without auto switch (Built-in magnet) Auto switch specifications Action Load voltage Auto switch model no.

NVEPA|VEFseies

P O Flow Characteristics/Operating Principles P O, O Construction Detail .. PO Dimensions P O Installation PO Power Amp.: Series VEA Model / S pec ific ations . . . . P O H o w t o O r d e r . . . . . . . . . P @ Dimensions/ Handling Instructions . . . . . P@, @, @ External Connections P@, @ Features and Functions P@ Sample Applications . . .

5 Port Solenoid Valve Series SV

Total stroke time t Stroke L Stroke mm Speed d% d% Speed at the end Stroke Speed at the end u Time s SOL: ON (OFF) VI Table of Contents Series SV Manifold Variations P. 2 Valve Manifold Common Specifications Serial Wiring Manifold specifications Decentralized Serial Wiring P. 5 Cassette base manifold SV1000/SV2000 Tie-rod base manifold SV1000/SV2000/SV3000/SV4000 IP67 protection Applicable

PSE100

(Refer to p.3.1-9 .) Table1 ZSE3 ISE3 : PSE511 (For 100kPa) : PSE512 (For 100kPa) : PSE510/520 (For 1MPa) GS 4. Selection of "LED2 display mode" 5. Selection of "OUT1 output mode" 6. Selection of "OUT2 output mode" PS ISA ZSE1 ISE1 Press the button "S". By pressing the button "S", the calibration is completed. "Output mode" is entered by pressing the button "S".

FGE-C

industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 ) JIS B 8433-1993: 2) 1. 2. 3. 1. 2. 3. 4. 4/12 FGX-OM-L009-B 1 1.5 3) 3)1 1 () 5/12 FGX-OM-L009-B FGESL Series FGESL O (P) 0.02MPa () FGE S L A:179mm FGE S V V (P11) L B:419mm FGE S L C:669mm V (V )V 50mm O .

Electro-Pneumatic Valve NVEP/NVEF Series

P O Flow Characteristics/Operating Principles P O, O Construction Detail .. PO Dimensions P O Installation PO Power Amp.: Series VEA Model / Spe c i f i c a t i o n s . . . . . P O H o w t o O r d e r . . . . . . . . . P @ Dimensions/ Handling Instructions . . . . . P@, @, @ External Connections P@, @ Features and Functions P@ Sample Applications . . .

Return Filter FH100 Series

Element Relief valve P M 0 1 Paper Micromesh With relief valve None Hydraulic fluid 0 1 2 N W V Petroleum Water-glycol, Emulsion Phosphoric ester Note) N, W and V refer to the hydraulic fluid symbol indicated at the end of the element part number. Replacement Element Part No.

5 Port Solenoid Valve Series SQ1000/2000

Note 4) Except valve weight 20 Series SQ1000/2000 SQ1000/Flat Cable Kit Stations SS5Q13JD0 L4 L3 5.25 L2 49.5 47 10.3 L1 M5: External pilot port Indicator light P = 11.5 19.2 47.8 25 20.5 1.5 1.5 Manual override (mounting hole dimension) 113 {double (double solenoid) dual 3 port valve} 108.5 {single, double (latching)} 34 10 4.6 122 (3 position) (108.5) A A A B A B A 2.PUSH 2.PUSH 94 1.TURN

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

Series KG Stainless Steel One-touch Fittings

P. 128 Male connector: KGH Part No. H (Hex.) L M Effective orifice(mm 2) Nylon Urethane Connection thread R(PT) M5 Applicable tube O.D.

IDX-OM-W026

L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC THR MC MC PRR CM C01 MC OLR OLP1 CM OLP2 C11 FM PRS MOV P M C11 FM PRS M P IDF55E-30 IDF75E-30 GFCI R GFCI R GFCI GFCI TB TB PRR PRR THR THR CM CM MC2 MC2 FM FM THP THS THP MC1 MC1 MC2 MC2 PRS1 PRS1 P P PRS2 THR PRR PRS2 THR PRR P P M M CM PRS OLR FM PRS1 PRR MC PRS2 TB MC1 ILS GFCI MC2 THR MOV C01 CM THS OLP1 C11 FM THP OLP2

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) P=10.5 13.5 (L3) 3 L2 6 .5 L1 2 1 16 .5 Station 5.5 D side 2.3 2-M5 X 0.8 External pilot port (Only external pilot style(R)) 7.8(C3, C4, C6) 21.6 (M5: 5.7) 35 5.5 53 300 (Lead wire) Cover dia 1.6 Cross section 0.34mm2 (Top piping) 39.5 7.8 42.5 P R 1 3 15 8 2-M5 X 0.8 PE port 13.4 2-Rc(PT)1/8 R(EXH) port 16.3 The broken line indicates DIN rail mounted style [-D]. 41.2 2-Rc(PT)1/8 P(SUP)

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -