High-precision Digital Pressure Switch

value (main display). (1) Press and hold the SET button for 1 and 3 seconds in measurement mode.

Fieldbus system (DeviceNet compliant)

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

$ <@ G9 1 4 9 L9 4 5 9 * M9 4 5 9 * MN9 4 D9 R port P/E port DO9 MO9 LO9 LN9 4 H9 1 4 9 3 >1 ? >! ?

Table of Contents - Tubing

I.D. 1 2 3 1 2 3 1 L 210 280 265 D 18 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 52 35 22 54 27 17 41 1.5 4 2.5 28 1 2 1.5 1 2 24 325 6 4 37 305 330 8 31 5 Burst Pressure Characteristics Chart 725 Burst pressure psi 580 Burst pressure 435 290 145 Max. operating pressure 0 4 32 68 Operating temperature F 104 140 TUB-10 Polyurethane Coil Tubing (Metric) continued

4

P = 26 25 55.2 19 G: 300 H: 600 50.6 Applicable cable O.D. 6 to 8 Grommet (G, H) Pg9 DIN terminal (D, DZ) Manual override (Non-locking) For 4 x M4 (For mounting) 83 111 4.6 43.5 39.3 21.6 27 R R P 29 38 20 11 (1) 1 (Pitch) P = 26 1/8" [3(R) port] 1/4" [1(P) port] 28.5 12 18.5 L1 L2 6 (Station n) (Station 1) Max. 10 75.6 62.5 40 A A 31 1/4", 1/8" [2(A) port] (Pitch) P = 26 5 22 n: Stations

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Note) AS-FP Inch size Metric size Meter-out Meter-in 0 1 02 23 01 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS-FM 03 05 07 09 11 13 04 06 08 10 12 AS-D AS-T With One-touch fitting ASP Thread type M3 Port size Note) For applicable tubing O.D. selection, refer to the Model on page 484. Use 1/8" tube.

Series MLGP

Specification 2-1.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

2 3/4 1 11/4 11/2 1/4 VDW VCH41(N.C.)

Rotary Table

4 13 Magnet 4 12 Bearing retainer 1 11 Table 1 10 Cushion pad 2 Size : 3, 7 9 Adjusting bolt 2 8 Hexagon nut 2 7 Pinion 1 6 Piston 2 5 End cover 2 4 Seal 1 3 Plate 1 2 Cover 2 1 Body 1 No Description Qty Note . 20 - Basic circuit Circuit structure The standard circuit for operating a rotary cylinder with an air filter, regulator, solenoid valve and speed controller is shown in Figure 1 below

5 Port Solenoid Valve Series SQ1000/2000

1.TURN B 74.5 28 5.5 35 13 Approx. 10 2-M4 clamping screw Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3,

Mini Rotary Actuator

Note 19 - CRJU05~1 11 8 6 12 4 10 3 10 18 11 14 7 9 1 13 15 17 16 2 17 15 14 18 18 Hexagon socket head set screw 2 17 Wear ring 2 16 Magnet 2 15 Piston seal 2 14 O-ring 2 13 Hexagon nut 2 12 Round head no. 0 Philips screw 3 11 Hexagon socket head cap screw 4 10 Bearing 2 9 Hexagon socket head set screw 2 8 Stopper retainer 1 7 Holder 1 6 Stopper 1 5 Cover 2 4 Bearing retainer 1 3 Shaft

Multi Channel Pressure Sensor Controller

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

2–4

Insulation resistance 50 M or more at 500 VDC (between lead wire and case) 1500 VAC for 1 min. Note 1) (between lead wire and case) 1000 VAC for 1 min.

PSxx-OMS0006CN

) 1 13 35 () (50 ) (26 ) [3 ] () (22 ) (24 ) 3 () 3 -20No.PS-OMS0006CN-G ON OFF ON ON OFF ISE20 [P_1] OUT1 0.500 MPa [H_1] OUT1 0.050 MPa ZSE20 [P_1] OUT1 -50.5 kPa [H_1] OUT1 5.1 kPa ZSE20F [P_1] OUT1 50.0 kPa [H_1] OUT1 5.0 kPa 1 -21No.PS-OMS0006CN-G 3 3 3 () <> 3() 3(P_1n_1)(H_1) () () 1 1 1[-]( (50)) -22No.PS-OMS0006CN-G (P1LP1H) 22P1L()P1H()WH1() (n1Ln1H) 31 [F

PSxx-OMR0001CN

C(4 ) C(6 ) F(G ) H 13 13.6 19 -21No.PS-OMR0001CN-J 2 ISA3--B-L () ISA3--B-L 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 C(4 ) C(6 ) F(G ) H 13 13.6 19 -22No.PS-OMR0001CN-J 2 ISA3--B-R ISA3--B-R ISA3--B-LN ISA3--B-RN 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 C(4 ) C(6 ) F(G ) H 13 13.6 19

SI Unit

Table 4-5 Details of 1 Byte feedback information about the valve output status module Bit Description Explanation 0 Status of safe output 0: OFF, 1: ON 1 Status of the status bit in bit0 0: invalid, 1: valid 2..7 Reserved Fixed to 0 26 No.EX##-OMY0011-A 5.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

.:; ;,i=-, ,,.r:,,. ,:: 1::':::,4':::rr.i,;.::'i.ri:;.: 'i.t.i.il:i:i=*1+at=r=i1t:i:i:t:, =!i i:r-i=,, ti ' ' ' ,*r:,:,.r.,:::aa:.:;l.;:i.i.i.tii-,:,'.ar'''ll.'1:1,:,::,1*tlLr:f:fl:a::.:::a::l:a:..:r.:,,::,i,.i,i..,. -r.rLi'g+;,:,=.:11:i:::':itf::1.:i,;=:.:,1 ;,t .,.', , . i:,:*:,'*':,1=]:t*r:1:f?:t:a:l*!a,-,'a*r1]la::1::':..:::.:::.1 . . =r. r::!1::1+ti i:a"a:r:r ia '.

Speed Controller with Uni One-touch Fitting AS Series

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 Control type 5 32" 04 06 08 10 12 03 05 07 09 11 13 3 16" AS-FG Meter-out Meter-in 0 1 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

33

Refer to back page 50 for Safety Instructions and pages 13 to 16 for Temperature Control Equipment Precautions. Operation Maintenance Warning Caution 1. Confirmation before operation 1. Clean the ventilation hole. 1) The fluid level of a tank should be within the specified range of HIGH and LOW.

Ionizer Gun

Function . 13 4-1. Name of parts . 13 4-2. LED indication . 13 4-3. Mode setting switch . 14 4-4. Emitter maintenance (cleaning and replacement) . 15 4-5. Alarm function . 17 5. Performance . 18 5-1. Installation distance and Discharge time (Discharge time of 1000V100V) . 18 5-2. Static neutralization range (Discharge time of 1000V100V) . 19 5-3. Pressure Flow characteristics . 20 6.