Check Valve Series AK 1

ASN Minimum operating pressure 0.02 MPa Ambient and fluid temperature 5 to 60C (No freezing) AQ JIS Symbol Flow Characteristics ASV AK2000-01/-02 AK4000-02 AK How to Order Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) ASS Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa Inlet pressure: 0.1 MPa AK 2 000 02 0.5 MPa 0.7 MPa ASR 0.5 MPa 0.3 MPa 0.3 MPa 0.7 MPa

ASD

41.7 40.4 35.4 15.2 18.5 15 11 R(PT)1/4 17 34.4 29.4 18.5 55 28.2 46.5 19.7 10 ASD430F-02-10S 18.5 21 58 31 49.3 6 ASD530F-02-06S 12.8 17 74 25.2 48.3 20.3 8 ASD530F-02-08S 15.2 18.5 76 28.2 51.3 41.9 46.9 48.8 43.8 23 19.8 15.4 R(PT)1/4 19 42.8 37.8 10 ASD530F-02-10S 21 18.5 80 32.6 54.1 23.1 12 ASD530F-02-12S 22 20.9 83 34.4 55.9 6 ASD530F-03-06S 17 74 12.8 25.2 48.3 20.3 8 ASD530F-03-08S

ZISE80.eng

[F 7] Setting of fine adjustment of display value 0% 1 s Mounting and Installation Manual [F 8] Setting of auto-preset Display to show the unit specification OFF [F 9] Setting of power saving mode 1 s Installation Mounting Mount the optional bracket and panel mount adapter to the Pressure switch.

PSxx-OME0003CN

No.PS-OME0003CN-F

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

ZISE30A.eng

Pressure Setting Item Default setting [F 3] Setting of response time 2.5 ms Measurement mode The power is supplied [F 4] Setting of display resolution 1000-split Safety Instructions [F 5] Setting of auto-preset Manual The measurement mode is the condition where the pressure is detected and indicated, and the switch function is operating.

ZISE20A.eng

Function selection mode In measurement mode, press the button between 3 and 5 seconds, to display [F 0]. Select to display the function to be changed [F ]. Press and hold the button for 2 Measurement mode Power is supplied. Press the button between 3 and 5 seconds.

ZISE20B.eng

Function selection mode In measurement mode, press the button between 3 and 5 seconds, to display [F 0]. Select to display the function to be changed [F ]. Press and hold the button for 2 Measurement mode Power is supplied. Press the button between 3 and 5 seconds.

ZISE20C.eng

Function selection mode In measurement mode, press the button between 3 and 5 seconds, to display [F 0]. Select to display the function to be changed [F ]. Press and hold the button for 2 Measurement mode Power is supplied. Press the button between 3 and 5 seconds.

ZISE40A.eng

ON: Green OFF: Red [F 2] Setting of OUT2 Same setting as [F 1] OUT1. At the output mode, Error detection mode can be selected. Display color is linked to the setting of OUT1, and can not be selected.

ZISE20B-L.eng

Function selection mode In measurement mode, press the button between 3 and 5 seconds, to display [F 0]. Select to display the function to be changed [F ]. Press and hold the button for 2 Measurement mode Power is supplied. Press the button between 3 and 5 seconds.

ZISE20C-L.eng

Caution: [F 4] Auto-preset function OFF [F81] Security code OFF Press the button once.

CL

Nil S n Mounting style CNA Basic style Axial foot style Rod side flange style Head side flange style Rod side trunnion style Head side trunnion style Clevis style B L F G U T D CNS Auto switch Nil Without auto switch (Built-in magnet) CLS For the applicable auto switch model, refer to the table below.

MLGC

BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

MLGC

BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Low Maintenance Filter Series FN1

Description Material 1 5 SCS13 Cover O-ring 2 6 SCS13 Bowl Seal NBR 7 O-ring 65 x 250mm 3 SUS304 Element FPM 8 Scraper 65 x 500mm FN111 FN112 9 O-ring CDLQB63-30D-F Compact cylinder with lock 4 CDLQB63-50D-F Replacement parts: Seal kit Note Model Order no. Material FN11N NBR KT-FN11N Items 5 through 9 from the above chart.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Uside Dside *Std valve is non-polar (+ or com) ** Contact P/A when ordering latching type valves mounted on a manifold. 3m How to Order Manifold VV3Q 1 1 08 C U 1 D X11 Plug-in Unit Manifold Series 1 VQ100 Manifold base type 1 Plug-in unit Stations Use only when ordering SI manifolds. 02 2 stations *18 18 stations Option * All std. 1W valves.

ZB-OM00301

5MMO 6 B 6() 9 - No.ZB-OM00301 / kPa / P1 0-101 15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4 LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02

VVXA21/22

#5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .''< " % " Operating Fluid and Ambient Temperature % " ?# ! ?# " 4 4 * )< > )< > > )< )< " $ 8 @ )