Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Number of pages has been increased from 20 to 28. YU A flow adjustment valve (0.05 to 5 L/min) has been added. A 2 to 200 L/min flow range option has been added. A rear ported type has been added. Number of pages has been increased from 28 to 32.

smcmaintenancepartslist

Contents Bore size (mm) @6 @7 28 @9 #0 31 #2 33 Lube type Piston seal Rod seal 40 50 63 80 100 CVS1-40-PS CVS1-50-PS CVS1-63-PS CVS1-80-PS CVS1-100-PS Cushion seal Set of left nos. @6, @7, @9, #0, #2, #5 Cylinder tube gasket 28, 31, 33 and 34 are non-replaceable parts, so they are not included in the seal kit.

Modular F.R.L. Unit

Page 23 Page 28 Mist Separator Page 29 Micro-Mist Separator Page 32 . Air Filter + Regulator . Filter Regulator . Made to Order Specifications . Modular Type Filter Regulator AFM20 to 40 .

Best Pneumatics Vol. 14

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR Recommended Tightening Torque (Nm) Connection thread Torque VEX 1/8 1/4 3/8 1/2 3/4 1 12 to 14 M5 7 to 9 22 to 24 28 to 30 28 to 30 36 to 38 AMR After tightening by hand, tighten further approximately 1/6 turn using a tightening tool.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

34 45.1 [60.6] 21.6 28 34 [40.5] 31.1 31.1 15 21 21 25 25 10 10 97.6 18 18 97.6 [ ] for AC Other dimensions are the same as the grommet style

MGP

28 11 M12 X 1.75 80 100 28 48 52 72 75 90 128 148 300 320 92 85 178 171 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Demensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 200st< 50st< 200st 50st< 200st 200st< 25st< 50st 25st< 50st 200st< 50st< 200st 50st< 200st 50st 50st 200st< 25st 25st 160 180 63.5 64 80 100 115 137 142 162 18.5 21 45.5 46 30 36 80 100 109.5 121 130

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

20 24 36 44 56 V 18 22 20 28 28 Y 38 47 Z Bore size (mm) 16 20 32 40 50 14 14 19 1 8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.

Air Cylinder Series CA2

MM 16 22 24 10 55 M14 x 1.5 13 25 12 38 55.5 3 x 18l Polished round 12 40 Y-04D +0.3 +0.1 CJ1 E1 NX NZ L CJP 16 27 28 14 60 M18 x 1.5 15 27 12 38 55.5 3 x 18l Polished round 12 50, 63 Y-05D +0.3 +0.1 D1 CJ2 28 37 36 18 71 M22 x 1.5 19 28 18 55 76.5 4 x 25l Polished round 18 80 Y-08D +0.3 +0.1 A1 L1 U1 CM2 30 83 37 40 21 83 M26 x 1.5 21 38 20 61 4 x 30l Polished round 20 100 Y-10D +0.3 +0.1

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

4.5 80 ZPT80H-B10 82 16.5 28 M10 x 1.5 4.5 Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 Model A 63 ZPT63H-A16 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 1191 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Width across flats 60 M16 x 1.5 70 Hexagon width across flats 22 4 x M5 x 0.8 1/8 (Rc, NPT, NPTF) Width across

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A J L B C D E F G H 0.25 K 1/4-28 NY-075 0.51 1/4-28 0.94 1.18 0.69 0.25 0.51 0.71 0.16 3/4", 7/8" NY-106 0.51 0.25 5/16-24 5/16-24 0.94 1.18 0.69 0.25 0.51 0.71 0.19 1 1/16" NY-125 0.75 0.38 7/16-20 7/16-20 1.31 1.69 0.94 0.38 0.75 1.02 0.25 1 1/4", 1 1/2" NY-G050 0.75 0.38 1/220 1/2-20 1.32 1.69 0.94 0.38 0.75 1.02 0.31 2" Material: Carbon steel Jam nut (Rod thread) (in)

Regulator

27 28 54.3 27.8 37.5 AR30-D 53 86.5 30.5 31.5 3.5 28 32.5 28 59.8 27.8 43 AR40-D 70 91.5 35.5 40.5 28 41.5 28 68.8 27.8 52 1/8, 1/4 M421.5 M381.5 1/4, 3/8, 1/2 1/4, 3/8 AR40-06-D 75 93 35.5 40.5 28 41.5 28 68.8 27.8 52 AR50-D 90 125 43 45 28 51 27.8 61.5 AR60-D 95 155 45 50 28 51 27.8 61.5 3/4 M421.5 3/4, 1 1 Model Optional specifications Bracket mount Panel mount Q R U AR20-D 30 34

CG5-S

GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB 2-

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-28-1A For 01T For 01T1 For 01C For 01F AXT625-28-3A Junction cover assembly 9 AXT625-28-7AStations VVF2000-26-5AFor 01T AXT623-22 Stations 13 NBR Rubber plug For 01T For 01T1 For 01C For 01F (Terminal and adapter plate) 8 AXT625-28-1 VVF2000-26-6 Adapter plate Resin Replacement Parts: Sub Assembly

CG5-S

GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8 GB GA NN MM Cover surface BA CB D FY FB 2-

CJ5-S

18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7

CJ5-S

) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are shipped together. 10-14-8 9 Stainless Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 0.1 0.3 NX + 0.2 0 A1 U1 RE A B L1

VFR

AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-28-1A Material Steel plate Steel plate NBR NBR NBR NBR NBR No. Description Material Part no. AXT625-28-3A For 01T For 01T1 For 01C For 01F For 01SU Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations For 01T For 01SU AXT623-22 NBR Rubber plug !

Guide Cylinder Series MGG

29.5 30.5 30 30 34 24.5 27.5 26 33.5 23 (32) 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 27 (36) 40 40 35 37.5 38 36.5 34.5 35.5 34.5 35 39 29.5 32 31 38 28 (40) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 24 (36) 32 (36) 50 50 40.5 43 43.5 43.5 41.5 42.5 40 42 46 36.5 39.5 38 43.5 28 (40) 24 (36) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table Dimensions: MXQ6L / Symmetric Type 1322Axial piping