Compact Electric Actuator Series LG1

mm Lead 150 Slide screw 20 mm Lead 500 10 mm Lead Ball screw Horizontal specification Maximum speed 1000 600 500 930 740 20 mm Lead 100W mm/s 500 Slide screw 20 mm Lead 180 10 mm Lead Ball screw 100W Nm Rated thrust 90 20 mm Lead 50 Slide screw 20 mm Lead Rolled 0.05 Repeatable positioning accuracy Ball screw Ground 0.02 mm 0.1 Rolled Slide screw Motor output Horizontal specification

PFxx-OMS0001CN

V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 20 1 atm()[Anr] ripple -13No.PF-OMS0001CN-A 9022545 -14No.PF-OMS0001CN-A 2 0.50.7 Nm M4 (4 ) (71 ) M4 -15No.PF-OMS0001CN-A

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

Turntable Cylinder Series MGT

25 30 10 12 15 39 45.5 55.5 103 121.5 145 M10 M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

212

] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 6.6 [25] 0.00 0 1.3 [5] 2.6 [10] 4.0 [15] 5.3 [20] 7.9 [30] 9.2 [35] 11 [40] 12 [45] 13 [50] 15 [55] 16 [60] 6.6 [25] 0.00 0 0.1 [0.5] 0.3 [1] 0.4 [1.5] 0.5 [2] 0.8 [3] 0.9 [3.5] 1.1 [4] 1.2 [4.5] 1.3 [5] 0.7 [2.5] Flow rate gal/min [L/min] Flow rate gal/min [

76

Workload Not compressed Time (sec) 0 5 10 15 20 Time (sec) 0 5 10 15 20 Digital control Digital scroll compressor, which has the unloading function, controls the compressor output depending on the load by repeating compression and nocompression as shown in the figure above.

EXxx-OMN0027CN

PLC H.T. ) Enable (SC_MonSs) 1 Disable Enable 2 1 2 (OC_Mon) Disable Enable (Inrush) 100msec 3 Disable 0.1 ms 1.0 ms 4 (Filter_T) 1.0 ms 10 ms 20 ms 1.0 ms 15 ms 5 (SigExt_T) 15 ms 100 ms 200 ms Enable Val165000 4 ON 3 ON/OFF (Counter) 6 Disable 1(EX600-DXPC1EX600-DXNC1) 22 OFF 0.5 mA ()OFF 0.5 mA 3 OFF 0.5 mA 31 4x1000 -54No.EX-OMN0027CN-D No. (H.T.

Series CQ2

Refer to pages 15 through 20 for safety instructions, actuator precautions and auto switch precautions Installation and Removal of Snap Rings Caution Selection Caution Weight of moving cylinder parts m1/ Without built-in magnet Allowable kinetic energy 1.

Wireless System

devices Communication line Communication connectors required q w SI unit: Comparison when 15 units are connected Wireless system Wireless master: 1 unit Wireless slave: 15 units 1 line (Connector at one end) 1 place Current (Wired) SI unit: 15 units 1 line (Connector at one end) 14 lines (Connector at both ends) 29 places Interchangeability maintained * Maximum I/O of wireless master/

MHS

/ MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3

MGF

Standard Strokes Intermediate stroke Model Standard stroke (mm) Intermediate strokes (at increments of 5mm) other than standard strokes are available with spacers of 5, 10, 15, 20 and 25mm.

Bernoulli Gripper

40 15 30 10 20 5 10 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] Supply pressure [MPa] Air Consumption ZNC30m ZNC40m ZNC20m 160 200 140 180 Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] Air consumption [L/min (ANR)] 140 120 160 120 100 140 100 120 80 100 80 60 80 60 60 40 40 40 20 20 20 0 0 0 0 0.6 0.5 0.4 0.3 0.2 0.1 Supply pressure [MPa] 0

02-cxs-e

CXSM6-PS 6 10 15 20 25 32 CXSM 6-PS CXSM 10 A PS CXSM 15-PS CXSM 20-PS CXSM 25-PS CXSM 32-PS !9 @0 @1 Set of left nos. !9, @0, @1 Piston seal CXSM10A-PS Rod seal NBR CXSM15-PS O-ring CXSM20-PS CXSM25-PS CXSM32-PS Seal kit includes !9, @0 and @1. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

3 Position Cylinder Series RZQ

If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

Adsorption Plate

less 250 x 250 18 625 or less 282 Body size under 100 to 150 350 or less 300 x 300 20 900 or less 339 20 to 350 under 150 to 200 400 or less 23 Over 900 under 200 to 250 450 or less Order a thickness equal to or greater than that shown on the table.

Compact and Lightweight

80 80 20 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption 15 60 60 15 60 60 Suction flow rate Air consumption 10 40 40 10 40 40 Suction flow rate 5 20 20 5 20 20 0 0 2 4 6 8 10 12 14 Supply pressure [MPa] 0 0 0 0 2 4 6 8 Supply pressure [MPa] 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Suction flow rate [L/min

SL5200

0.14 20 0.14 15 0.10 15 0.10 10 0.07 10 0.07 5 0.03 5 0.03 0 0.00 0 0.00 0 20 40 60 80 100 Flow rate (slpm, N2) 0 40 80 120 160 200 240 280 320 Flow rate (slpm, N2) ) If connection size differs, flow characteristics also differ.

Refrigerated Air Dryer

Standard Products Series IDFB Standard inlet air type Rated inlet air temperature: 100F (37.8C) Outlet air pressure dew point Note) Air flow capacity SCFM (m3/h [ANR]) Rated inlet condition Model Refrigerant Port size 37F (2.8C) 45F (7.2C) 50F (10C) Page IDFB3E IDFB4E IDFB6E IDFB8E IDFB11E IDFB15E IDFB22E IDFB37E IDFB55E IDFB75E 11 (19) 10 (17) 12 (20) NPT 3/8 16 (27) 15 (25) 17 (28) NPT