CL

41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Allowable radial load (N) Ta = I (Nm) (a) (b) Size I: Inertial moment High precision type High precision type High precision type High precision type Basic type Basic type Basic type Basic type Refer to page 11-9-7. . : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48

MB

41 Series MB Made to Order Specifications Please contact SMC for the detailed specifications, delivery and prices.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

LFE-OMY0008

[F20] 45 [F22] 46 OFF [F30] 47 OFF[] [F32] 48 OFF[] [F33] 50 FR0 [F34] 51 OFF [F80] 52 [] [F81] 53 OFF [F82] 54 [*] [F90] 55 OFF [F98] 56 OFF [F99] 57 OFF 30 [F10](41 ) OUT2 (20L/min ) OFF OFF OFF OFF 27 No.LFE*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.

Digital Flow Switch (Remote type sensor unit)

Refer to the outline dimension drawing (page 41) for mounting hole dimensions. The self tapping screws should not be re-used. Direct mounting (PF3W511/521) Mount using the self tapping screws (nominal size: 4.0 x 4 pcs.) for installation. The tightening torque must be 1.0 to 1.2 Nm. Refer to the outline dimension drawing (page 41) for mounting hole dimensions.

CS1

100 157.5 50 36 59 15 8 35 16 85 47 90 43 14 31 19 36 Lube Non-lube Air-hydro M30 X 1.5 to 1400 1401 to 1600 100 161 128 M14 X 1.5 188 112 180.5 50 36 59 15 9 35 16 14 19 47 90 43 31 36 1/2 3/4 M36 X 1.5 to 1400 1401 to 1600 18.5 106 197 182 144 M16 X 1.5 206 118 14 19 53 90 43 36 45 56 40 59 17 9 39 M40 X 1.5 3/4 to 1800 1801 to 2000 18.5 125 227 204 162 115 M18 X 1.5 231 132 60 48 17 41

AN

Model Port size Effective area (mm2) Weight (g) ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 A B C Dimensions (mm) 1 8 ANB1-02 15 10 51 22 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1 1 1 ANB1-12 280 1 4 ANB1-14 450 1 2 610 Construction/Parts/Dimensions ANB1-01 to 04 JIS symbol ANB1-04: PP ANB1-06 to 14 How to Order

VCW

93 36.5 13.5 15 32 25 23 M5 24 59.5 46 57.5 60 55 48.5 101 57.5 68 1/2 22 45 96.5 41 11 17 36 22.5 23 M5 26 65 48 63 62 60.5 50.5 103 63 70 1/4, 3/8 VCW42 30 50 101 41 13.5 17 36 25 23 M5 26 67 48 65 62 62.5 50.5 103 65 70 1/2 35 60 108.5 41 17.5 17 36 30 28.2 M5 26 70.5 48 68.5 62 66 50.5 103 68.5 70 3/4 5 Series VCW How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C

ZR

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

Rotary Table/

High precision type High precision type High precision type High precision type Ta = I (Nm) Basic type Basic type Basic type Basic type I: Inertial moment 1 2 3 7 10 20 30 50 70 100 200 31 41 0.56 41 Refer to page 3. 32 45 0.82 45 . : Angular acceleration Load . 33 48 1.1 48 2 = (rad/s 2) t 2 54 71 1.5 71 : Rotation angle (rad) 86 74 107 2.9 78 74 2.4 78 t: Rotation time (s) 166 137 197

VCW

93 36.5 13.5 15 32 25 23 M5 24 59.5 46 57.5 60 55 48.5 101 57.5 68 1/2 22 45 96.5 41 11 17 36 22.5 23 M5 26 65 48 63 62 60.5 50.5 103 63 70 1/4, 3/8 VCW42 30 50 101 41 13.5 17 36 25 23 M5 26 67 48 65 62 62.5 50.5 103 65 70 1/2 35 60 108.5 41 17.5 17 36 30 28.2 M5 26 70.5 48 68.5 62 66 50.5 103 68.5 70 3/4 4.5-7 Series VCW How to Order Manifolds How to Order Manifold Assemblies (Example)

AC Servo Motor Driver (Pulse input type)

Changing PD04 from 00212100 to 0021210D 0 D 41 - (2) Symbol allocation using the setup software: Changing pins CN1-16 to Gain changing selection (CDP). Change PD04 from 00212100 to 0021210D in the I/O tab. Select Single Axis Write. Cycle the power the parametersto be enabled.

ZQ-OM01401

) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25

Series LQ3 High Purity Fluororesin Fitting

M L K J H E t W1 W2 M 14 20 25 29 37 49 58 69 89 100 117 136 14.5 20.5 24.5 30.5 36.5 48.5 6 7 7 9 9 10 11 16 21 24 32 41 10 17 22.5 24.5 27 30 16 21 26 32 41 50 17 24 28 36 43 55 8 8 8 8 13 13 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3P1A LQ3P2A LQ3P3A LQ3P4A LQ3P5A LQ3P6A 1/4 (E) (E) L Panel Aperture (K) Straight Union : LQ3U (mm) Inch Size H Model Tubing O.D.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

93 36.5 13.5 15 32 25 23 M5 24 59.5 46 57.5 60 55 48.5 101 57.5 68 1/2 22 45 96.5 41 11 17 36 22.5 23 M5 26 65 48 63 62 60.5 50.5 103 63 70 1/4, 3/8 VCW42 30 50 101 41 13.5 17 36 25 23 M5 26 67 48 65 62 62.5 50.5 103 65 70 1/2 35 60 108.5 41 17.5 17 36 30 28.2 M5 26 70.5 48 68.5 62 66 50.5 103 68.5 70 3/4 5 Series VCW How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Features .pages 4-5 Preferred Options Guide.page 7 Q Q Base Mounted Valves and Manifolds.page 9 Specifications.pages 10-11 How To Order .pages 12-15 Options .page 16 Q Q Q Body Ported Valves and Manifolds .page 17 Q Specifications.pages 18-19 How To Order .pages 20-23 Options .page 24 Q Q Technical Reference .page 25 Q Dimensional Drawings.pages 26-39 Operations Guide .pages 41

Environment

range [mm] R OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41