5 Port Air Operated Valve SYA3000/5000/7000 Series

Model/SYA340 Series (Base mounted) Valve model Type of actuation Port size Flow rate characteristics Note 1) Weight Note 2) Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) (g) C[dm3/(sbar)] C[dm3/(sbar)] Cv b Cv 69 (34) 71 (36) 2 position Single Double 0.30 1.0 0.24 1.1 0.30 0.26 0.28 0.18 0.85 0.30 0.77 M5 x 0.8 0.19 Closed center Exhaust center Pressure center SYA340-01 1 8 3 position

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0.0075 92 0.0079 .2mm 0.0079 91 0.0083 90 0.0087 .22mm 0.0087 89 0.0091 88 0.0095 .25mm 0.0098 87 0.0100 86 0.0105 85 0.0110 .28mm 0.0110 84 0.0115 .3mm 0.0118 83 0.0120 82 0.0125 .32mm 0.0126 81 0.0130 80 0.0135 .35mm 0.0138 79 0.0145 1/64 0.0156 .4mm 0.0157 78 0.0160 .45mm 0.0177 77 0.0180 .5mm 0.0197 76 0.0200 75 0.0210 .55mm 0.0217 74 0.0225 .6mm 0.0236 73 0.0240 72 0.0250 .65mm 0.0256 71

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 20 101 6 X168 CX helical insert thread 186 166 145 124 104 83 62 41 207 8 X169 2 built-in magnets

P

AS2000-N02-X800 NPT1/4 12 50 26 20 62 58 21 170 AS3000-N03-X800 NPT3/8 12 60 26 17 71 64 24 250 AS4000-N04-X800 NPT1/2 17 81 36 22 92 83 30 480 Note) Reference dimensions

AP64

code M X MV4 FV4 TW4 MV6 FV6 TW6 Specifications Operating Parameters Gas Inlet pressure Cracking pressure 1) Maximum backpressure Proof pressure Burst pressure Ambient and operating temperature Cv AP64 Select compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) 3 psi (0.023 MPa) differential 2) 3500 psig (24.1 MPa) 4000 psig (27.6 MPa) 10 psig (69 MPa) -10 to 71

Thermo-chiller

resin Electrical system Power supply 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Earth leakage breaker Rated current [A] 30 40 50 Sensitivity current [mA] 30 Rated operating current4 [A] 17 32 41 Rated power consumption4 [kW(kVA)] 5.4 (5.9) 10.5 (11.0) 13.1 (14.2) Noise level (Front 1 m/Height 1 m)4 [dB(A)] 75 75 71

AP10PA

) rGauge port (Outlet) Specifications Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Maximum control pressure Ambient and operating temperature Cv AP10PA 7 to 150 psig (0.05 to 1.0 MPa) Select compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) 1) 5000 psig (34.5 MPa) 10 psig (69 MPa) 150 psig (1.0 MPa) -40 to 71

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

40D MHS2-50D MHS2-63D MHS2-16D Model Bore size (mm) 16 20 25 32 40 50 63 Air Fluid 0.1 to 0.6 0.2 to 0.6 Operating pressure (MPa) -10 to 60 Ambient and fluid temperature (C) 0.01 Repeatability (mm) 60 Max. operating frequency (c.p.m.) 120 Not required Lubrication Double acting Action 21 37 63 111 177 280 502 Effective gripping force (N) at 0.5 MPa Note) External grip Internal grip 23 42 71

Series ZCUK is available in 5 bore diameters., CYL, FREE MOUNT, W/VACCUM *LQA, ACTUATOR, ZCU COMPACT CYLINDER, EE, 10MM ZCU DBL-ACT AUTO-SW, .29394 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKQ1049(54)53(63)57(67)61(71)65(75)69(79)??

applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ±1%F.S., Backflow function available, DC, AIRLINE EQUIPMENT, Auth/Grp: 2/71

The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 71 lb

The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 71 lb

The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 71 lb

The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 71 lb

The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 71 lb

The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, VACUUM SWITCH, ZSE30, ZSE30A, N63, 71 lb

The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, VACUUM SWITCH, ZSE30, ZSE30A, 71 lb

The ZSE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, VACUUM SWITCH, ZSE30, ZSE30A, 71 lb

The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 71 lb

The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 71 lb