XL-OMY0002

10. 10-1. 2 2P5P6 16 XL-OMY0002 10-2 1 2 3 c b 1 S 2 O 4 M a S aa M 0.2MPa b S 0.3MPa c S 25,40,50,160 O 3 4 O O O O O O 17 XL-OMY0002 10-3. 1 2 3 2 3 O 4 1 M O M O O O O O O 4 5 O S M XLD-25 S XLD-40,50,160 S XLD-63,80,100 S S 25 4050160 O S 18 XL-OMY0002 6 7 c Nm c O XLD-25 0.360.1 S XLD-25 0.630.1 O S S 0.3MPa S c c O O O O O 8

AC Servo Motor Driver (Pulse input type)

L A B C Series Equivalent Lead (Including pulley 5(2.86) 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

VXA21/22

Ambient and Fluid Temperature Ambient temperature C Fluid temperature C Temperature Water (Standard) Air (Standard) Oil (Standard) Vacuum (V, M) (3) Max. Min. 40 1 60 5(1) 40 5 40 40 5 5(2) Note 1) Dew point: 10C or less. Note 2) 500cSt or less. Note 3) "V", "M" in the parenthesis are option symbols.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Digital Gap Checker

DIN rail ISA-5Part number L Number of stations ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 Seal for extra station ISA-15 Threaded plug with seal ISA-12Piping type Part number Rc1/8 ISA-12-A : This is applicable in both G1/8 ISA-12-C piping specification C and F. -11No.PS-OMT0002-E 2 About this product Centralized lead wire ISA-21Bracket

AHC System Series MA

1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 1-YNM5 MA3 1-YNM5-R1 MA3 1-YNM5-R2 MA3 1-YNM5-R3 MA3 1-YNM5-R4 MA3 1-YNM5-R5 MA3 1-YNM5-S6 MA3 1-YNM5-R6 MA3 0-AM3 MA3 0-AM5 500 MA Air pressure port 6 x M5 x 0.8 10 11 D35 AHC unit (Double Acting) Electrical contact points: 12 14 15 580 20 24 41 25 250 Tool adapter 270 751 Series MA3 With D-sub connector MA3-YM5Robot adapter MA310-C D-sub connector

5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2

Rotary Cylinder Series MRQ Size: 32, 40 1

2 !3 !4 !5 !6 !7 !8 !

Series AP3500

Seat material Material Code Material PCTFE (Standard) Vespel 2) No code VS Code Body material 316L SS secondary remelt Hastelloy C-22 S H 2) Not available with H material.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20*2 Nil Without option B With lock Size Stroke 100 200 300 400 500 600 25 V V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) i Controller Nil Without controller Cm1mm With controller 1 D T 7 C Communication plug connector

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

IC circuit 5 V 3-wire (NPN) 3-wire (PNP) 2-wire Lead wire length symbols: 0.5 m Nil (Ex.)

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

Digital Gap Checker

DIN rail ISA-5Part number L Number of stations ISA-5-1 73.0 1 ISA-5-2 135.5 2 ISA-5-3 173.0 3 ISA-5-4 210.5 4 ISA-5-5 248.0 5 ISA-5-6 285.5 6 Seal for extra station ISA-15 Threaded plug with seal ISA-12Piping type Part number Rc1/8 ISA-12-A : This is applicable in both G1/8 ISA-12-C piping specification C and F. -11No.PS-OMR0002-K 2 About this product Centralized lead wire ISA-19Bracket

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Doc. no.CM2Y-OM0001H-A PRODUCT NAME MODEL / Series / Product Number CM2Y-ZCG1Y-ZCQ2Y-Z CQSYCA2Y-Z SERIES Contents Safety Instructions 2~5 1. Specifications 6 2. Installation and Handling 6~9 3. Maintenance 10~14 4. Basic Circuit for Cylinder Operation 15 5. Troubleshooting 16~17 6.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Right Left Right Left 112 (3.7) Vacuum (V) port (M5) Note 5) 21 10 Dimensions 1 2 3 4 5 6 7 8 (mm) n L1 L2 K J 5 6 Note 2) The above dimensions are for ZQ1000M2 .

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

HEC-OM-S019

Signal Style and Part No. 5 4 3 2 1 5 4 3 2 1 Temperature sensor cable length N L E Nil Standard Option/function Remote function 1 : +24V 2 : 24V COM (See section 3 remote ON/OFF function) 7 Output Cut off Alarm Common 6 Output Cut off Alarm a contact (OPEN During Alarm) 8 Output Cut off Alarm b contact (CLOSE During Alarm) 9 Temperature Alarm a contact (OPEN During Alarm) 11 Temperature

Digital Pressure Switch

Remarks Bracket A ZS-46-A1 Rear piping Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket C ZS-46-E Bottom piping Self tapping screws: Nominal size 3 x 10L (2 pcs) ZS-46-B Rear piping Panel mount adapter ZS-35-B Bottom piping ZS-46-D Rear piping Panel mount adapter + Front protective cover ZS-35-E Bottom piping Lead wire with connector ZS-46-5F 5 cores, 2 m, waterproof ZS-27-01 Rear

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Magnetic body (Iron plate, etc.) 750 CQS 2122CQS/ 1011Compact Cylinder 10112122Standard: CQSB12 to 25, CQSB12 to 25 12 17.5 5 M3 x 0.5 effective depth 6 2 x M5 x 0.8 2 x 2 x 6.5 counterbore 5.5 M5 x 0.8 (Piping port) (Relief port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 2 x 3.5 through 32 0.5 15.5 25 6 Flat washer 5 10 4 4 3.5 27 + Stroke 15.5 30.5 + Stroke 25 16 17.5 5 5.5 2 x M5 x 0.8

High Vacuum Slit Valve

GV*-OMH0003-C PRODUCT NAME High Vacuum Slit Valve MODEL / Series / Product Number XGT312-50336-** XGT313-50336-** B Contents Safety Instructions 2 to 3 1. Specifications 4 2. How to order 5 3. Construction/Operation 6 to 8 4. Precautions 9 to 10 5. Replacement Part List 11 6. Maintenance 12 7.