Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Size 1 2 3 7 10 20 30 50 Fluid Air (Non-lube) Size Suction flow rate L/min (ANR) 1/2/3/7 10/20/30/50 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Possible to use in vacuum or under low pressures Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Free mounting orientation How to Order 04 4 5 1 VP3 A G 1 VP series 3 port solenoid valve CE-compliant Q CE-compliant Note) Nil Number of solenoids Single Note) Electrical entry: D/DL/DS/DZ only 1 Body size Thread type 1 4 6 8 1 2 1 2 Rc Nil G F 1 NPT N NPTF T Body ported 5 Body type Pilot

Dedicated Controller

F H L 6mm 10mm 20mm Note) The following options are necessary for operating and setting the controller. LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Electric Slide Table / High Precision Type 《 AC servo motor 》

Rubber back of the belt is softened and sticky. f. Crack on the back of the belt 4. Troubleshooting Alarms below are abstract of representative examples.

ARJ1020F

(Refer to p.2.0-0 of fittings and tubing.) Accessory (Option) Part No. Part No. Description ARJM104, 6, 10 Manifold base How to Order ARJ1020F-M5-06 ARJ1020F-M5-04 M5 ARJ 20 10 F 04 1 Option Miniature regulator 1 Set at 0.2MPa Port size Only the adjusting spring is different from standard.

AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

VP3145/3165/3185

Possible to use in vacuum or under low pressures External pilot type Vacuum: Up to 101.2 kPa Low pressure: 0 to 0.2 MPa Free mounting orientation 04 4 5 1 VP3 A G 1 SY SYJ Thread type Series VP 3 port solenoid valve Rc G NPT NPTF T N F Nil VK Number of solenoids VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

VT325

VVT34 Porting specifications 1 0 05 V100 Thread type Port size Nil F N T Rc G NPT NPTF Symbol R Bottom Side P Side Side A SY Symbol Port size 1 0 Side Side 02 1 4 03 3 8 SYJ Instruct by specifying the valves and blanking plate to be mounted on the manifold along with the manifold base model no. VVT340-051 1 pc. VO325-001G 4 pcs. DXT083-21A1 pc.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

IDX-OM-W026

1 2 3 4 5 "0" i 2 7 HFC i-5 IDF Series i-2 i-4 IDX-OM-W026 i i 2 8 CAUTION !

IDX-OM-Y002

Therefore, wait until the temperature of hot parts become 50oC and below. 1.2.3 Hazard of Compressed Air Circuit WARNING Before replacing or cleaning parts, be sure to bleed compressed air remaining inside of the product until the gauge indicates 0.

IDX-OM-W014

1 2 3 4 5 "0" i 2 7 HFC i-5 IDU Series i-2 i-4 IDX-OM-W014 i i 2 8 CAUTION !

IDX-OM-W023

1 2 3 4 5 "0" i 2 7 HFC i-5 IDU Series i-2 i-4 IDX-OM-W023 i i 2 8 CAUTION !

IDX-OM-V020

Therefore, wait until the temperature of hot parts become 50oC and below. 1.2.3 Danger of Compressed Air Circuit WARNING Before replacing or cleaning parts, be sure to bleed compressed air remaining inside of the product until the gauge indicates 0.

/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 1, /: None, 2nd Nominal Nozzle Size: 0 (0)

/N.C.), 1st Selection Vacuum V Port: 8 (Vacuum, V Port: Ø8), 1st Selection Quantity: 1, /: None, 2nd Nominal Nozzle Size: 0 (0)

/N.C.), 1st Selection Vacuum V Port: 9 (Vacuum, V Port: Ø5/16), 1st Selection Quantity: 1, /: None, 2nd Nominal Nozzle Size: 0 (0)

/N.C.), 1st Selection Vacuum V Port: 8 (Vacuum, V Port: Ø8), 1st Selection Quantity: 1, /: None, 2nd Nominal Nozzle Size: 0 (0)

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover