Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

3 H Clean Series q 11 Vacuum type q Accuracy w Size e Motor type 16 25 32 40 Nil Basic type H High precision type Symbol Type Applicable size Compatible controller/ driver 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 LECP6 LECP1 LECPA LECPMJ Nil Step motor (Servo/24 VDC) V V V V r Lead [mm] A Servo motor (24 VDC) V V LECA6 Symbol 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 A 10 12 16 20 B 5 6 8

IDX-OM-U010

Option T . 11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 OPERATION / ERROR SIGNAL OUTPUT . 11-1 11.3 REMOTE OPERATION . 11-2 11.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 11-3 11.5 ELECTRIC CIRCUIT . 11-4 Chapter 12 Option V . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 SPECIFICATIONS . 12-1 12.3 MAINTENANCE . 12-2 Chapter 13 Inspection record . 13-1 13.1 INSPECTION RECORD .

Manifold Specifications

Component parts Dust cap VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 Plug MIL standard D-sub connector Number of terminals: 25 Cable: 25 cores x 0.3 mm2 For details, refer to page 3-3-8.

Compact

Example) CQ-M3 x 25 L 2 pcs.

CV/MVGQ

Standard Stroke Standard stroke (mm) Note) Bore size (mm) Symbol Specifications 25, 50, 75, 100, 125, 150 20 -XA Change of rod end shape 25, 50, 75, 100, 125, 150 25 25, 50, 75, 100, 125, 150, 200 32 25, 50, 75, 100, 125, 150, 200, 250 40 Note 1) Intermediate stroke except mentioned above is produced upon receipt of order.

CNS

36 90 63 35 14 180 28 30 30 M14 x 1.5 18.5 Up to 1200 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x 1.5 Bore size (mm) K KA M MA MM N P Q R S T V VA H ZZ 125 140 160 15 31 M12 x 1.75 M30 x 1.5 35 1/2 25 303 20 23 110 27 440 87.5 85.5 15 31 M12 x 1.75 M30 x 1.5 35 1/2 25 343 20 28 110 27 480 95 93.5 17 36 M12 x 1.75 M36 x 1.5 39 3/4 25 396 25 35 120 30.5 546.5 109 104 With

CUJ

Table 2 Applicable auto switch models Refer to pages 11 to 14 for detailed specifications.

CLS

11 Common for each auto switch Since this is a guideline including hysteresis, not meant to be guaranteed.

Rotary Table

Additionally, note that the 12 VDC relay does not apply to the auto switch. -12- 11. Pay attention to leakage current. <2-wire type> Current (leakage current) flows to the load to operate the internal circuit even when in the OFF state.

MIW/MIS

25 MB MA HC HE KB KA LA LB LC PA PB PD PC ME MD MIS12-10 MC HD HA, HB JB JA N Model 48 38 28 39 29 19 MIS12-30 MIS12-20 13 10 7 6 4 3.5 17.5 11.6 2.3 M2.6 x 0.45 19 4 M4 x 0.7 6 11 5 2.5H9 0 +0.025 18 6 MIS20-30 MIS20-20 MIS20-10 7 40.5 30.5 20.5 52 42 32 8.5 17.5 4H9 0 +0.030 5 5 2.8 M3 x 0.5 26 6 M6 x 1 9 25 12 8 10 15 14 26 10 Series MIW/MIS Finger options Tapped on upper and lower faces

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

Activated Carbon Filter

Bowl assembly specifications 11 to 13 7. Assembly of Optional parts 14 8. Troubleshooting 15 9. Replacement work procedure 16 to 22 1) Element assembly (AMK20) 16 to 17 2) Bowl assembly (AMK20) 18 1) Element assembly (AMK30/AMK40) 19 to 20 2) Bowl assembly (AMK30/AMK40) 21 to 22 10. Exploded Drawing 23 11.

Escapements Series MIW/MIS

25 MB MA HC HE KB KA LA LB LC PA PB PD PC ME MD MIS12-10 MC HD HA, HB JB JA N Model 48 38 28 39 29 19 MIS12-30 MIS12-20 2.5H9 0 +0.025 13 10 7 6 4 3.5 11.6 2.3 M2.6 x 0.45 19 4 M4 x 0.7 6 17.5 11 5 18 6 MIS20-30 MIS20-20 MIS20-10 7 40.5 30.5 20.5 52 42 32 4H9 0 +0.030 8.5 17.5 5 5 2.8 M3 x 0.5 26 6 M6 x 1 9 25 12 8 10 15 14 26 10 Series MIW/MIS Finger options Tapped on upper and lower faces

Compact Electric Actuator Series LG1

A A B Section BB PCD Thread Coupling Motor 28.3 10.5 30 8 26 32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25

IZx-OMV0005

Note 5) Refer to cautions on page 9 if IZN10E-11-(Female threads for piping) is used.

Dedicated Controller

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

VM

Mechanical Valve Series VM Model VM1000 VM100 VM200 Side piping Bottom piping Side piping Bottom piping Dimensions (mm) 11 X 36 X 16 11 X 28 X 25 17 X 44 X 25 17 X 44 X 30 25 X 40 X 52 Basic Roller Lever One Way Roller Lever Straight Plunger Roller Plunger Cross Roller Plunger Toggle Lever Push Button (Mushroom) Push Button (Extended) Push Button (Flush) Twist Selector (2 position) Key Selector

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Note 11) Refer to Straight Piping Length and Accuracy on page 4 for details.

Information

30 35 40 45 0 5 10 15 20 25 30 35 40 45 [50 Hz] Circulating fluid temperature [C] [60 Hz] Circulating fluid temperature [C] 012 018 024 A W HRS -20 (Single-phase 200 to 230 VAC) 1000 1000 Ambient 40C Ambient 32C Ambient 25C Ambient 40C 800 800 600 600 Ambient 32C 400 400 Ambient 5C Ambient 20C Ambient 25C Ambient 5C Ambient 20C 200 200 0 5 10 15 20 25 30 35 40 45 0 5 10 15 20 25 30 35 40