Floating Joint

0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 30 42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Load Weight Allowable Moment MY3A, MY3B/M1 MY3A, MY3B/m1 MY3A, MY3B/M2 MY3A, MY3B/M3 30 20 50 40 30 200 100 50 100 20 40 30 10 MY3A 3B63 MY3A 3B63 50 40 30 10 20 5 4 3 2 MY3A 3B63 10 5 4 3 MY3A 3B63 20 MY3A 3B40 MY3A 3B40 MY3A 3B40 Load weight kg 5 4 3 Moment Nm Moment Nm Moment Nm 1 2 10 MY3A 3B40 0.5 0.4 0.3 0.2 1 2 MY3A 3B25 MY3A 3B25 5 4 3 MY3A 3B25 MY3A 3B25 0.5 0.4 0.3 1

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

29 35 40 52 58 58 70 88 104 128 152 6 6 7 12 12 15 15 7 10 12 14 17 20 26 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-H C D A B (mm) A B C 15 25 35 45 E

HEC_W-E

UPPER AND LOWER LIMIT ARISES -9-2 FIG. 10-1 MOISTURE AIR DIAGRAM -10-3 vi Contents Table List Page No.

KJ

A: One-touch fitting Port B: NPT female thread 15-4-39 2 Series KM Dimensions: KM11 2-FB applicable tubing O.D. 2-4.5 mounting hole N-FA applicable tubing O.D.

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

MK

Symbol A 11.5 12 B 4.5 4 W 19.5 21.5 W 5.5 6 A 11.5 12 B 4.5 4 A 7.5 8 B 0 0 Hs 17 19 W 1.5(4) 2(4.5) A 7.5 8 B 0 0 12 16 Bore size (mm) D-F9BAL Model Symbol Bore size (mm) A 10.5 11 B 3.5 3 W 14.5 15 Hs 17 19 12 16 4.1-13 Rotary Clamp Cylinder/Heavy Duty Series MK2 20, 25, 32, 40, 50, 63 How to Order MK2 B S A73 20 10 R F Number of auto switches Rotary clamp cylinder S 2 1 Mounting Style

HRX-OM-Q026

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRSH-A(Air cooled type) . 2-2 2.2.2 HRSH-W(Water cooled type) . 2-3 2.3 Function of Parts . 2-4 2.4 Operation Display

CXT

Number of mountings CXTl12 5 20 15 10 2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15

ARM10/11

2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.

ARM10/11

2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.

7

Note 5) For 2-color indication, mount the switch in the middle of the green indication. Hs B A 16 8.5 D-B54 Hs B 33 A Minimum Stroke for Auto Switch Mounting Unit: mm Same surface With 2 pcs. Auto switch model With 1 pc.

JA/JAH/JB/JS

2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 19 20.5 20.5 27 27 27 34.5 34.5 43.5 52 52 60 86 8 9 9 13 13 13 15 15 18 24 24 24 42 J D-X 20Data For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-5 6 Series JA Foot Style: JAL20 to JAF160 JAL20 to

JA/JAH/JB/JS

2.5 3 1.5 2 2 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 10 10 12 12 12 16 16 20 24 27 27 33 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 19 20.5 20.5 27 27 27 34.5 34.5 43.5 52 52 60 86 8 9 9 13 13 13 15 15 18 24 24 24 42 J D-X 20Data For 3.5 MPa hydraulic cylinders, operate within the maximum tension and compression force. 10-19-5 6 Series JA Foot Style: JAL20 to JAF160 JAL20 to

One-touch Fittings

9 1/2 15 to 30 14 to 15 2) The gasket can be reused up to 6 to 10 times.

AC Servo Motor Driver (Pulse input type/Positioning type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Initial value Recommended Value Parameter *1,*2 Para No Number of command input pulses per revolution *3. PA05 100 100 Electronic gear numerator *3. PA06 1 100 (Positioning mode: 10) Electronic gear denominator *3.

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O.

Square Tube Type Air Cylinder Series MB1

FD FE FT FX FY FZ Fd Port Cushion valve 32 40 50 63 80 100 4-FD 50 55 70 80 100 120 3 3 2 2 4 4 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 Fd B FY FT FE FX FZ Without air cushion Rear flange type/(G) Bore size (mm) ZZ Cushion valve Port 4-FD 32 40 50, 63 80, 100 147 151 172 212 B FY Rear flange type Bore size (mm)

OMR0031

An example is shown below. +3 +3 +3 +3 direction + direction direction + direction 0 5 10 0 5 10 2 8 [mm] 2 8 [mm] This example shows the Target Position set at +3 mm. The table moves +3 mm from the current position.