Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

60 90 75 40 60 Suction flow 45 20 30 15 0 0 20 40 60 80 100 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow [L/min(ANR)] Supply pressure [MPa] 256 Vacuum Pad with Ejector ZHP Series Construction A-A Component Parts t !

NCA1

Not applicable for types: Double rod (W), Trunnion (T), XC8, XC9, XC10, XC11, Over sized rod (XB5) with front mounts.

HRX-OM-Y098

fluid outlet 0.6 60 Pressure [MPa] 0.5 50 Lifting head [m] Usable flow rate range 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow[L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20CH2 0.6 60 0.5 50 Lifting head [m] Pressure [MPa] 0.4 40 Usable flow rate range Circulating fluid outlet 0.3 30 0.2 20 Chiller display

AMH

160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMH250 1 2 3 8 1 2 , AMH350 3 4 1 2 3 4 , AMH450 1 1 1 1 AMH550 AMH650 3 4 1 2 , , 14-20-34 6 Micro Mist Separator with Prefilter Series AMH AMH850 Dimensions Accessory D: With auto-drain (N.O.) for AMD850 female thread Option T: With element service indicator Courtesy of Steven Engineering

3 Port Solenoid Valve Rubber Seal Series SY100 1

1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Series Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e A 2 OUT A IN OUT t BLEED A-A w y Note Component Parts Material No.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Construction ARP20(K)/30(K)/40(K) ARP20K/30K/40K (With backflow function) r q 1 I N e C SM 2 OUT A A IN OUT t A-A BLEED w y Note Component Parts Material No.

Compact Guide Cylinder End Lock Type SeriesMGP

Bore size (mm) OB OL P PA PB PW Q R S T U VA VB 75st or less Over 75 to 175st 75st or less Over 75 to 175st Over 175 to 275st Over 175 to 275st Over 275st Over 275st 11 7.5 Rc1/8 32 15 34 30 96 44 110 78 98 63 124 200 300 83 121 171 45 48 32 11 7.5 Rc1/8 38 18 38 30 104 44 118 86 106 72 124 200 300 84 122 172 46 48 40 14 9 Rc1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

Steam Valve

(mm) Model Flange Note) Kv Conversion Cv Rc VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 0.9 1.0 1.1 4.3 4.6 8.6 13.6 1.1 1.2 1.3 5.0 5.4 9.9 16 1 8 1 4 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 25 1 1 4 1 15.7 18 32 32 1 2 1 32.9 38 40 40 2 53.6 50 62 10.8 50 Note) The companion

AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

VK300

: Base mounted (A port bottom ported) How to Order Applicable solenoid valve VK334Applicable blanking plate assembly VK300-42-1A Bracket VK300-43-1A VG VV3K3 05 40 01 VP P port: Rc 1/8 Thread type Option Valve stations S070 R port: Rc 1/8 01 Nil None 1 station Port size Nil Rc G NPT NPTF F With bracket (Not mounted) VQ F N T 01 Rc 1 8 20 20 stations A port: Rc 1/8 VKF Type 42: Base mounted

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

OMU0023

77 4D M 109 6D m 14 0E SO 46 2E . 78 4E N 110 6E n 15 0F SI 47 2F / 79 4F O 111 6F o 16 10 DLE 48 30 0 80 50 P 112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X

Check Valve Series AK 1

5/32, 1/4 5/16 x NPT 1/8 8, 10, 12 5/16, 3/8, 1/2 Free flow Female thread Male thread t r t r Free flow One-touch fitting Male thread u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

VP3145/3165/3185

Double solenoid Single solenoid 81 4 6 8 1 2 1 1 Thread type 1 2 Passage, Type of actuation Rc G NPT NPTF T N F Nil Port size (IN, OUT port) N.C.

0.5

IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38