XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service

Regulator

AR-OMX0055-B PRODUCT NAME Regulator MODEL / Series / Product Number AR20(K)-(F,N)01(F,N)02(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR30(K)-(F,N)02(F,N)03(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)02(F,N)04(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)06(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR50(K)-(F,N)06(F,N)10(B,E,E1,E2,E3,E4,G,M)(-1,N,R,Y,Z,ZA)-D AR60(K)-(

VHK

C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22

CEx-OMI0064

2ROM (1)E / 2ROM ,E RS-232C NO. 2ROM , ON,E 2ROM ,E 2ROM 80 ,LCD E2FUL SMC (2)E , (3),,LCD E2Err 25 - 8 RS-232C 8-1 RS-232C 1200,2400,4800,9600,19200bps ASCII 1 7 1 8-2 (1) VR DR DW PR PW FR FW SR SW OR OW IR IW BR BW RS HR TS EE () LR 21 LW , ,, 26 - (2) , ,, No. ,, # No.

VNB

VXA I (DIN terminal: D) VN Main port Rc A Model B C D E F G H I J K L M N P Q R S T U LVC VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 52 26 4.5 24.3 2.3 25 34 55 LVA 80 90 50 60 35 40 17.5 20 84 100 92 108 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154 170 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 LVH Port size

Angle Seat Valve

Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type N.C. 1/4 to 1 10, 15, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C./N.O. 1/4 to 50A 10 to 12 N.C.

Angle Seat Valve /

10, 15, 20, 25, 35, 40, 50 N.C.

EX600-DX_DY_DM_eng

24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10 13 12 7 6 5 7 6 5 Group Group

VXP21/22/23

Model Power source Frequency (Hz) 50 25 12 60 20 8 AC VXP21 DC 50 45 20 60 40 15 AC VXP22 DC 50 60 25 60 50 20 AC VXP23 DC Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C ) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (D) (S) 99 100 183

LJ1H

25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140

ITV

50 75 1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

Digital Flow Switch (Integrated display type)

Replacement part Element Part number Remarks Vinyl chloride piping tube (25 A) ZS-40-U25 25 A Vinyl chloride piping tube 1 pc.

0.5

Red flashes if the CPU is abnormal. q w e r t y u Green lights up when emitters require cleaning.

PFxx-OMO0004CN

-2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB

LEH_C

(F.S.),LEHZ32,40:20(F.S.) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 11 - 2.1.2 6N LEHZ 10 K 4 2 1 R 1 2 10 10 D DIN D DIN 16 16 1DIN 2 0 2 0 I/O (m) L ) L ) 25 25 ) 10,16,20,25 32 32 1.5 1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

EX510

15 e t y y t Shown with cover removed.

HRX-OM-S004

30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-5 Cooling capacity(HRS100-A-20/40/46-) 8.4.2 HRS150-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 18 18 16 16 14 14 Cooling capacity [kW] Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30

Ionizer

Static Neutralization Characteristics 1) Installation distance and discharge time (Discharge time from 1000 V to 100 V) High speed static neutralization cartridge Air purge: Yes Supply pressure: 0.02 MPa (1 L/min (ANR) per nozzle) Air purge: No 30 45 25 40 60 Hz 35 1 Hz Discharge time (s) Discharge time (s) 1 Hz 20 30 15 Hz 5 Hz 25 15 20 Sensing DC 10 15 Sensing DC 1 Hz/60 Hz 60 Hz 30 Hz

Flow Control Equipment

Meter-out Graph/Pressure to time Meter-in Graph/Pressure to time Movement of the cylinder by fixed throttle valve c ontrol valve d e Movement of the cylinder e p s y b er by meter control Pressure Stroke Pressure Stroke Pressure Stroke e cylind ement of th PH Delay in pressure transmission Mov PR (Atmospheric pressure) Delay in pressure transmission PR (Atmospheric pressure) During the operating