For the RSQ12/16/20/32/40/50 and RSG40/50, refer to the “Specific Product Precautions” section in the catalog.
The RSQ series catalog can be found here. And the RSG series catalog can be found
https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://smccatalog.partbuilder.smcpneumatics.com/support/faq/en-jp/?ca_id=actuators&fa_id=10710
Low Profile SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model
(mm) A Weight (g) D Note) Model 2-applicable tubing L M P FR soft nylon FR double layer 12 1 8 KRU06-01S 41.5 45.5 17 14 13 6 1 4 KRU06-02S 49 43 12.8 10.4 4.2 17 12.8 22 3 8 KRU06-03S 51 44.5 35 1 8 1 4 KRU08-01S KRU08-02S 48.5 49.5 52.5 55.5 16 24 8 15.2 17 25.6 17.7 18.5 15.2 3 8 KRU08-03S 56.5 50 36 1 4 3 8 KRU10-02S KRU10-03S 55 55.5 61 62 30 19 10 18.5 18.5 40 40 28.4 21 1 2 KRU10-04S
For other voltages, special order request will have to be submitted. 2 Base Mounted Configurations Series DXT474 How to Order Solenoid Operated Valve DXT474 * * * * * * Type of Actuation Manual Override 1 Normally Closed Nil Non-locking push type 2 Normally Open B Locking slotted type D Push-locking slotted type E Push-locking lever type Valve Type P Supply Valve E Exhaust Valve Light and
Do nol loosen the recessed head screw on the top of the sensitivity adiusting screw because ii is lor prelenting the screw trom slipping otf. @ World Wide QS\E Support... North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics lnc. (Milwaukee) SMC Pneumatics lnc. (Richmond) SMC Pneumatics Inc.
/60 HZ, 220v 51 er,t1z, 1 00v 50/6o HZ, 2o0v 59 @lz 130"F or less (Standard) 95"F or less (Low power cons!
Sft{; ~RE E S ITt -380 Non-corrosive stainless steel is used for diaphragm (SUS630) and fitting (SUS304) . ~Hg ~ PRESSURE SWITCH rt3 , Po Atmospheric pressure detection and vacuum pressure measurement for load lock chamber in semiconductor production equipme~ nt ~ .
E EtherCAT 9 EtherNet/IP P PROFINET D DeviceNet L IO-Link Mounting 7 Screw mounting 8*1 DIN rail *1 The DIN rail is not included. It must be ordered separately. (Refer to page 7.) * Only the step motor type is applicable.
Refer to back page 50 for Safety Instructions and pages 387 to 391 for F.R.L. Precautions. 662
Usable stroke by buckling strength Usablestroke by Mounting style buckling strength (cm) Pressure Symbol and sketch (MPa) Symbol of bracket Rod side Frang e F Head side flange 103 92 113 Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301
3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !
3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !
E) Remove the used element and O-ring from the bowl. In this operation, remove the support ring to make the replacement easier. D) E) Point O-ring for bowl Support ring Rotate approxim ately 10. Replacement should be performed while the bowl is held upright as the O-ring easily falls off. -18- Doc. no. AMX-OMU0058-C F) Remove the internal assembly which is mounted in the bowl.
For this reason, use caution that the valves with external pilot specification cannot be pressurized from exhaust port [3/5(E)]. As compared with the types which do not integrate the back pressure check valve, C value of the flow rate characteristics goes down. Please contact SMC for details.
C 4(A)2(B) 4(A)2(B) , [D ] SY 90 [E ] 60 MAX.
Integrated solenoid valve and speed adjustment mechanism; Compatible with UR3(e), UR5(e), UR10(e), and UR16(e); URCap downloadable; Standard ISO9409-1-50-4-M6
(e), UR16(e); URCap software downloadable; Standard ISO9409-1-50-M6
Bore size: 16mm; Compatible with UR3(e), UR5(e), UR10(e) and UR16(e); Weight: 430g (15.2oz); Gripping force: External: 32.7 N, Internal: 43.5 N; Action: Double Acting; Opening/Closing Stroke: 10mm; Standards: ISO9409-1-50-4-M6
(e), UR16(e); Standard ISO9409-4-50-M6